Patent US4861222A successfully refreshed from Google Patents.
US4861222A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cassette elevator for use in a modular article processing machine
Assignee: Motorola Solutions Inc
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Filing: 1984-03-09
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Granted: 1989-08-29
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Expires: 2004-03-09
Abstract
Abstract Improved handling of multi-wafer cassettes in automated wafer processing machines is accomplished by means of an improved cassette elevator. The design of the cassette elevator is such that the receiver/sender portion of the wafer processing machine can be easily configured to accommodate single or multiple cassette elevators served by a single wafer loading spatula without increasing the width of the receiver/sender units. In addition, an automatic tilt feature of the cassette elevator substantially reduces the likelihood of wafer breakage during the cassette loading and unloading operation.
Inventors
- 👤 Ninko T. Mirkovich
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:39
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3411; H10P72/3412; H10P72/3402; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
77 words
In a wafer processing machine, a cassette elevator comprising: a cassette platform adapted to carry a multi-wafer cassette; a carrier plate, said cassette platform being pivotally coupled to said carrier plate in a cantilever fashion; and drive means coupled to said carrier plate for vertically positioning said carrier plate and cassette platform, said drive means being positioned to allow passage of a spatula under said cassette platform when said cassette platform is in a fully raised position.
Claim 2
Dependent Claim
77 words
In a wafer processing machine, a cassette elevator comprising: a cassette platform adapted to carry a multi-wafer cassette; a carrier plate, said cassette platform being pivotally coupled to said carrier plate in a cantilever fashion; and drive means coupled to said carrier plate for vertically positioning said carrier plate and cassette platform, said drive means being positioned to allow passage of a spatula under said cassette platform when said cassette platform is in a fully raised position.
Claim 3
Dependent Claim
45 words
A cassette elevator according to claim 1 further comprising: means for tilting said cassette platform when said cassette platform is in said fully raised position and for restoring said cassette platform to a substantially horizontal orientation when said cassette platform is in a lowered position.
Claim 4
Dependent Claim
21 words
A cassette elevator according to claim 1 further comprising: cover means for substantially isolating said drive means from said multi-wafer cassette.
Claim 5
Dependent Claim
101 words
A cassette elevator according to claim 1 further comprising: cover means for substantially isolating said drive means from said multi-wafer cassette; a pivot pin carried by said carrier plate; a platform carrier pivotally carried at a leading edge thereof by said pivot pin, said platform carrier carrying said cassette platform; a cam carried on said cover means; and a cam follower carried on said platform carrier, said cam and cam follower being arranged to pivot said platform carrier about said pivot pin thereby imparting a tilt to said cassette platform as said cassette platform is moved to its fully raised position.
Claim 6
Dependent Claim
83 words
The cassette elevator as set forth in claim 1 and further comprising: a second carrier plate; a second cassette platform, adapted to carry a multi-wafer cassette, pivotally coupled to said second carrier plate in a cantilever fashion, a second drive means coupled to said second carrier plate for vertically positioning said second carrier plate and second cassette platform; wherein said second cassette platform is positioned relative to the first cassette platform so that said spatula can access multi-wafer cassettes on either cassette platform.
Claim 7
Dependent Claim
99 words
A cassette elevator comprising: a carrier plate; drive means for vertically positioning said carrier plate; a pivot pin attached at one end to said carrier plate and extending horizontally therefrom; a platform carrier attached at one edge thereof to said pivot pin and extending approximately horizontally therefrom; said platform carrier being rotatable about said pivot pin; and means for tilting said platform carrier only when said platform carrier is adjacent the upper end of its travel and for maintaining said platform carrier at a substantially horizontal position when at locations other than adjacent the upper end of its travel.
Claim 8
Dependent Claim
99 words
A cassette elevator comprising: a carrier plate; drive means for vertically positioning said carrier plate; a pivot pin attached at one end to said carrier plate and extending horizontally therefrom; a platform carrier attached at one edge thereof to said pivot pin and extending approximately horizontally therefrom; said platform carrier being rotatable about said pivot pin; and means for tilting said platform carrier only when said platform carrier is adjacent the upper end of its travel and for maintaining said platform carrier at a substantially horizontal position when at locations other than adjacent the upper end of its travel.
Claim 9
Dependent Claim
54 words
The cassette elevator as set forth in claim 6 wherein said means for tilting includes: cover means for separating said drive means from said platform carrier; a cam attached to said cover means; and a cam follower, attached to said platform carrier, for engaging said cam and imparting a tilt to said platform carrier.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-28 | 1993-02-27 | 1993-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-28 | 1997-02-27 | 1997-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-28 | 2001-02-27 | 2001-08-29 | $7700.00 | Window Closed / Lapsed |