US4859548A
Expired / Lapsed
US
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Method for generating a lattice structure with a phase shift on the surface of a substrate
Assignee: Siemens AG
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Filing: 1986-10-27
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Granted: 1989-08-22
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Expires: 2006-10-27
Abstract
Abstract A method for generating a lattice structure with a phase shift on a surface of a substrate characterized by the steps of exposing of a photo-sensitive surface in an optical interference field and then subsequently exposing the same surface to a second interference field with the spatial frequencies of the two interference fields being changed a small amount between the two exposures. The photo-sensitive surface can be a photoresist layer applied on the substrate. After developing of the layer, this lattice structure is produced by etching. Another embodiment of the method is produced by means of a laser-active etching wherein the photo-sensitive surface is compound of a substrate surface in contact with an etchant and the etchant reaction is activated by the exposure.
Inventors
- 👤 Gerhard Heise
- 👤 Ulrich Wolff
- 👤 Richard Matz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:24
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/32; G02B5/18; G02B5/1847; G02B5/1857; G03; G03F; G03F7/00; G03F7/0005; G03F7/001; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
116 words
In a method for generating a lattice structure on the surface of a substrate by providing a substrate with a photo-sensitive surface, holographically exposing the photo-sensitive surface by creating an optical interference field of light waves to expose the photo-sensitive surface and subsequently developing the exposed surface, the improvements comprising said step of holographically exposing including creating a first interference field of a spatial frequency, creating a second interference field of a different spatial frequency relative to the spatial frequency of the first field and superimposing these first and second fields onto the photo-sensitive surface to expose the surface with both fields to create a lattice structure with a phase shift determined by said two fields.
Claim 2
Dependent Claim
116 words
In a method for generating a lattice structure on the surface of a substrate by providing a substrate with a photo-sensitive surface, holographically exposing the photo-sensitive surface by creating an optical interference field of light waves to expose the photo-sensitive surface and subsequently developing the exposed surface, the improvements comprising said step of holographically exposing including creating a first interference field of a spatial frequency, creating a second interference field of a different spatial frequency relative to the spatial frequency of the first field and superimposing these first and second fields onto the photo-sensitive surface to expose the surface with both fields to create a lattice structure with a phase shift determined by said two fields.
Claim 3
Dependent Claim
53 words
In a method according to claim 1, wherein the creating of each of the first and second interference fields is by projecting two planar, coherent waves to create the first field, and subsequently changing the angle of incidence of the two planar coherent waves on the substrate to create the second interference field.
Claim 4
Dependent Claim
57 words
In a method according to claim 1, wherein the step of creating the first and second interference fields comprises projecting two divergent coherent waves from two sources of divergent waves to create the first field, then changing the distance of the substrate from the two sources to obtain a different spacing for the second field and exposure.
Claim 5
Dependent Claim
99 words
In a method according to claim 1, wherein the step of providing the substrate provides a substrate attached to a mirror extending relative to the substrate surface at a fixed angle, the step of creating the first interference field projects a planar wave onto the surface of the substrate and the mirror with the mirror reflecting a portion of the wave onto the substrate to create the first interference field and the step of creating a second field includes changing the angle of incidence of the planar wave onto the mirror and substrate to create the second interference pattern.
Claim 6
Dependent Claim
35 words
In a method according to claim 4, wherein the step of changing the angle of incidence is by rotating the mirror and substrate on an axis extending perpendicular to the axis of the planar wave.
Claim 7
Dependent Claim
64 words
In a method according to claim 1, wherein the step of providing a substrate with a photo-sensitive surface comprises providing a substrate having a photoresist layer on the surface of the substrate, said developing comprising developing the photoresist subsequent to the exposure by said two fields and then etching the developed photoresist to attack the surface of the substrate to create the lattice structure.
Claim 8
Dependent Claim
83 words
In a method according to claim 6, wherein one step of creating the first and second interference fields creates a first interference field by projecting two planar coherent waves at an angle of incidence to the surface of the substrate and layer of photoresist, after exposing the photoresist to the first interference field, rotating the substrate on an axis extending perpendicular to the axis of each wave to create a second angle of incidence for the two waves and the second interference field.
Claim 9
Dependent Claim
58 words
In a method according to claim 6, wherein the step of forming first and second interference fields creates a first interference field by projecting two divergent coherent waves from sources of divergent waves onto the substrate, the step of creating of the second interference field comprises changing the distance between the substrate and the sources of divergent waves.
Claim 10
Dependent Claim
82 words
In a method according to claim 6, wherein the substrate having the photoresist layer is secured to a mirror at a given angle, said step of creating the first interference field comprises projecting a planar wave onto a portion of the photoresist layer and on the mirror with the mirror reflecting the wave onto the layer to create the first interference field, creating the second interference field by changing the angle of incident of the planar wave on the mirror and substrate.
Claim 11
Dependent Claim
36 words
In a method according to claim 9, wherein the step of changing the angle of incidence is by rotating both the mirror and substrate on an axis extending perpendicular to an axis of the planar wave.
Claim 12
Dependent Claim
136 words
In a method for generating a lattice structure on the surface of a substrate by providing a substrate having a photo-sensitive surface in contact with an etchant, said etchant having a reaction to etch said surface being activated by light being projected on said surface, and etching a lattice structure on said surface by creating a holographic optical interference field of light waves and projecting the field into the surface, the improvement comprising said step of creating a holographic optical interference field including creating a first interference field of a spatial frequency, creating a second interference field of a different spatial frequency relative to the spatial frequency of the first field and superimposing these first and second fields onto the photo-sensitive surface to etch a lattice structure with a phase shift determined by said two fields.
Claim 13
Dependent Claim
136 words
In a method for generating a lattice structure on the surface of a substrate by providing a substrate having a photo-sensitive surface in contact with an etchant, said etchant having a reaction to etch said surface being activated by light being projected on said surface, and etching a lattice structure on said surface by creating a holographic optical interference field of light waves and projecting the field into the surface, the improvement comprising said step of creating a holographic optical interference field including creating a first interference field of a spatial frequency, creating a second interference field of a different spatial frequency relative to the spatial frequency of the first field and superimposing these first and second fields onto the photo-sensitive surface to etch a lattice structure with a phase shift determined by said two fields.
Claim 14
Dependent Claim
52 words
In a method according to claim 17, wherein the step of creating a first interference field projects two planar coherent waves under angles of incidence onto the photo-sensitive surface, said step of creating the second interference field being by changing the angle of incidence of the two planar waves on the substrate.
Claim 15
Dependent Claim
30 words
In a method according to claim 12, wherein the changing of the angle is by rotating the substrate on an axis extending perpendicular to an axis of said planar waves.
Claim 16
Dependent Claim
53 words
In a method according to claim 11, wherein the step of creating the first interference field comprises projecting two divergent coherent waves from two sources of divergent waves to create a first interference field, said step of creating the second interference field comprises moving the substrate to a different spacing from said sources.
Claim 17
Dependent Claim
92 words
In a method according to claim 11, wherein the step of providing the substrate provides a substrate secured to a reflecting mirror at an angle to the surface of the substrate, said step of creating a first interference field directing a planar wave at the mirror and substrate with a portion of the wave being reflected by the mirror onto the substrate to form the first interference pattern, said step of creating the second interference field being by changing the angle of incidence of the planar wave on the mirror and substrate.
Claim 18
Dependent Claim
34 words
In a method according to claim 15, wherein said step of changing the angle of incidence comprises rotating the mirror and substrate on an axis extending perpendicular to an axis of the planar wave.
References Cited (Backward Citations)
US4402571A
Cited
EP0188919A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-21 | 1993-02-20 | 1993-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-21 | 1997-02-20 | 1997-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-21 | 2001-02-20 | 2001-08-22 | $7700.00 | Window Closed / Lapsed |