Abstract The ability of alkali hydroxide to etch silicon is enhanced by the controlled addition of metallic salts which readily dissociate in a strong base (pH>/=10) solution. When introduced into the alkali hydroxide (e.g. potassium hydroxide) solution, the controlled concentrations of additive metallic ions increase the electronegativity of the solution and thereby enhance its ability to attract electrons away from the silicon atoms within the crystal lattice being etched. By adding controlled levels of properly chosen electropositive ions, the rate at which the electrons are removed from the silicon atoms in the surface planes of the crystal lattice that are exposed to the etching solution can be controllably increased. As a result of removal of the electrons from the silicon atoms, the silicon atoms dissolve out of the crystal planes at rates modified by the degree of impurity addition, resulting in improved etching characteristics and geometries over that of conventionally employed alkali hydroxide solution.
Inventors
👤 Robert K. Lowry
👤 Edward U. Adams
Bibliographic Details
Application Number—
JurisdictionUS
Data Sourcegoogle_patents
Last Synchronized2026-11-03 20:01
CPC Classifications
C; C09; C09K; C09K13/00; C09K13/02
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
101 words
A method of etching silicon comprising the steps of: providing an alcoholic solution of potassium hydroxide containing a dissolved metallic salt, the cation of which has a positive valence of at least +2, that readily dissociates in a strong base solution and thereby supplies an added quantity of positive valence ions therein, which dissolved salt effectively increases the electronegativity of the alcoholic solution of potassium hydroxide such that the ability of the solution to attract electrons from the atoms of silicon to be etched is enhanced; bringing said etchant solution to an etching temperature; and contacting silicon with said etchant solution.
Claim 2
Independent Claim
101 words
A method of etching silicon comprising the steps of: providing an alcoholic solution of potassium hydroxide containing a dissolved metallic salt, the cation of which has a positive valence of at least +2, that readily dissociates in a strong base solution and thereby supplies an added quantity of positive valence ions therein, which dissolved salt effectively increases the electronegativity of the alcoholic solution of potassium hydroxide such that the ability of the solution to attract electrons from the atoms of silicon to be etched is enhanced; bringing said etchant solution to an etching temperature; and contacting silicon with said etchant solution.
Claim 3
Dependent Claim
24 words
A method according to claim 1, wherein said metallic salt has a solubility in aqueous basic solution at least equal to 4.0 g/100 ml.
Claim 4
Dependent Claim
14 words
A method according to claim 1, wherein said potassium hydroxide solution has a pH≧10.
Claim 5
Dependent Claim
25 words
A method according to claim 1, wherein said metallic salt is one containing a cation selected from the group consisting of barium, lanthanum and tin.
Claim 6
Dependent Claim
23 words
A method according to claim 1, wherein said dissolved salt is one containing a cation species whose ionization potential is greater than five.
Claim 7
Dependent Claim
30 words
A method according to claim 1, wherein the quantity of said metallic salt in said solution is such as to supply a cation concentration of 50 ppm to 5,000 ppm.
Claim 8
Dependent Claim
17 words
A method according to claim 1, wherein said etching temperatures lies in a range of 65°-95° C.