US4856326A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for measuring an adhesion force of a thin film
Assignee: NEC Corp
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Filing: 1988-07-26
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Granted: 1989-08-15
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Expires: 2008-07-26
Abstract
Abstract An apparatus for measuring the adhesion force of a thin film deposited on a substrate of a specimen. The apparatus comprises an inclining mechanism for mounting a sample dish with a specimen inclined by a predetermined angle with respect to the sample dish, an indentor disposed above the specimen for deforming the specimen by indentation, a driver for driving the indentor perpendicular to the sample dish, a load transducer for measuring a load applied to the specimen by the indentor, a sensor for sensing propagation of a crack produced in the specimen by the load, a displacement gage interlocked with the driver for measuring a penetration depth of the indentor, and a measuring mechanism for measuring the adhesion force of the thin film to the substrate.
Inventors
- 👤 Yuji Tsukamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 20:05
CPC Classifications
G; G01; G01N; G01N19/00; G01N19/04; G01N2203/00; G01N2203/02; G01N2203/06; G01N2203/0605
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
154 words
An apparatus for measuring an adhesion force of a thin film, comprising: an inclining mechanism for mounting a sample dish with a specimen including a substrate and a thin film deposited on said substrate, said specimen being inclined by a predetermined angle with respect to said sample dish; an indenter disposed above said specimen for deforming said specimen by indentation; a driver for driving said indenter perpendicularly to said sample dish; a load transducer for measuring a load applied to said specimen by said indenter; a sensor for sensing propagation of a crack produced in said specimen by said load; a displacement gauge interlocked with said driver for measuring a penetration depth of said indenter; and measuring means for measuring said adhesion force of said thin film to said substrate on the basis of said load and said penetration depth at a time when said sensor produces a sense signal and said predetermined angle.
Claim 2
Independent Claim
154 words
An apparatus for measuring an adhesion force of a thin film, comprising: an inclining mechanism for mounting a sample dish with a specimen including a substrate and a thin film deposited on said substrate, said specimen being inclined by a predetermined angle with respect to said sample dish; an indenter disposed above said specimen for deforming said specimen by indentation; a driver for driving said indenter perpendicularly to said sample dish; a load transducer for measuring a load applied to said specimen by said indenter; a sensor for sensing propagation of a crack produced in said specimen by said load; a displacement gauge interlocked with said driver for measuring a penetration depth of said indenter; and measuring means for measuring said adhesion force of said thin film to said substrate on the basis of said load and said penetration depth at a time when said sensor produces a sense signal and said predetermined angle.
Claim 3
Dependent Claim
39 words
An apparatus as claimed in claim 1, wherein said measuring means measures said adhesion force by performing a calculation (W/δ 2 )·cos α where α denotes said predetermined angle, W denotes said load, and δ denotes said penetration depth.
Claim 4
Dependent Claim
15 words
An apparatus as claimed in claim 1, wherein said sensor includes an acoustic emission sensor.
Claim 5
Dependent Claim
19 words
An apparatus as claimed in claim 1, wherein said inclining mechanism is operable to change the angle of inclination.
Claim 6
Dependent Claim
14 words
An apparatus as claimed in claim 1, wherein said load transducer includes an electrobalance.
Claim 7
Independent Claim
152 words
An apparatus for determining an adhesion force of a thin film of a substrate, the apparatus comprising: a sample dish; an inclining mechanism mounted on said sample dish and inclining the specimen by a predetermined angle with respect to said sample dish; an indenter disposed above the specimen for deforming the specimen by indentation; a driver connected to the indenter for driving the indenter against the specimen, thereby applying a load to the specimen; a load transducer for measuring the load applied to the specimen by said indenter, said sample dish being mounted on said load transducer; an acoustic emission transducer for sensing propagation of a crack produced in the specimen by the load; a displacement gauge cooperatively arranged with said driver for measuring a penetration depth of said indenter; and measuring means coupled to said load transducer and said acoustic emission transducer for measuring the adhesion force of the thin film.
Claim 8
Independent Claim
152 words
An apparatus for determining an adhesion force of a thin film of a substrate, the apparatus comprising: a sample dish; an inclining mechanism mounted on said sample dish and inclining the specimen by a predetermined angle with respect to said sample dish; an indenter disposed above the specimen for deforming the specimen by indentation; a driver connected to the indenter for driving the indenter against the specimen, thereby applying a load to the specimen; a load transducer for measuring the load applied to the specimen by said indenter, said sample dish being mounted on said load transducer; an acoustic emission transducer for sensing propagation of a crack produced in the specimen by the load; a displacement gauge cooperatively arranged with said driver for measuring a penetration depth of said indenter; and measuring means coupled to said load transducer and said acoustic emission transducer for measuring the adhesion force of the thin film.
Claim 9
Dependent Claim
20 words
An apparatus as claimed in claim 6 wherein the acoustic emission transducer includes a plumbum-zironic acid-titanic acid (PZT) piezoelectric ceramic.
Claim 10
Dependent Claim
21 words
An apparatus as claimed in claim 6 wherein the indenter has a spherical tip having a radius of approximately 10 microns.
Claim 11
Dependent Claim
45 words
An apparatus as claimed in claim 6 wherein said displacement gauge includes: a mirror mounted on said sample dish; a light-issuing probe mounted on the indenter facing the mirror; and a sensor for generating an electronic signal in response to light reflected from the mirror.
Claim 12
Dependent Claim
27 words
An apparatus as claimed in claim 9 wherein the mirror includes a sheet of glass coated with one of the group consisting of gold, platinum, and palladium.
Claim 13
Dependent Claim
14 words
An apparatus as claimed in claim 6 wherein said driver includes a piezoelectric actuator.
Claim 14
Dependent Claim
59 words
An apparatus as claimed in claim 6 wherein said measuring means includes a computer coupled to said inclining mechanism, said load transducer, and said displacement gauge for calculating a value indicative of shearing stress based on a load applied to the specimen, the penetration depth of the indenter, and an angle of the specimen with respect to the horizontal.
References Cited (Backward Citations)
US4606225A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-14 | 1993-02-13 | 1993-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-14 | 1997-02-13 | 1997-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-14 | 2001-02-13 | 2001-08-15 | $7700.00 | Window Closed / Lapsed |