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US4854731A Expired / Lapsed US ⏱️ 0.0 years remaining

Temperature sensing apparatus

Assignee: Siliconix Ltd
•
Filing: 1987-08-03
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Granted: 1989-08-08
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Expires: 2007-08-03
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Abstract

Abstract It is desirable to be able to sense the temperature of a semiconductor element to detect, for example, overheating of that element. A temperature sensing apparatus is disclosed which comprises a polysilicon device, functioning as a temperature transducer and integrated with a semiconductor element. A silicon oxide layer separates the temperature transducer device from the element.

Inventors

  • 👤 James O. M. Jenkins

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 10:44
CPC Classifications
G; G01; G01K; G01K7/00; G01K7/01; G01K1/00; G01K1/16

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 84 words
Temperature sensing apparatus comprising a substrate, a semiconductor element on the substrate; at least one semiconductor device on the substrate for sensing the temperature of the semiconductor element; and means providing both electrical isolation and thermal contact between the device and the element, the means the device and the element comprising an integrated circuit; and circuit means connected to the device and arranged to provide a signal solely in dependence on the electrical conductivity of the device indicative of the temperature of the element.
Claim 2
Dependent Claim 84 words
Temperature sensing apparatus comprising a substrate, a semiconductor element on the substrate; at least one semiconductor device on the substrate for sensing the temperature of the semiconductor element; and means providing both electrical isolation and thermal contact between the device and the element, the means the device and the element comprising an integrated circuit; and circuit means connected to the device and arranged to provide a signal solely in dependence on the electrical conductivity of the device indicative of the temperature of the element.
Claim 3
Dependent Claim 22 words
Temperature sensing apparatus as claimed in claim 1, wherein the means providing both electrical isolation and thermal contact comprises a dielectric layer.
Claim 4
Dependent Claim 18 words
Temperature sensing apparatus as claimed in claim 2, wherein the dieletric layer comprises silicon nitride and/or silicon dioxide.
Claim 5
Dependent Claim 16 words
Temperature sensing apparatus as claimed in claim 1, wherein the semiconductor device is integrated in polysilicon.
Claim 6
Dependent Claim 17 words
Temperature sensing apparatus as claimed in claim 1, wherein the semiconductor device is an unipolar junction device.
Claim 7
Dependent Claim 24 words
Temperature sensing apparatus as claimed in claim 5, wherein the unipolar junction device consists of either a diode, a MOS switch or a resistor.
Claim 8
Dependent Claim 18 words
Temperature sensing apparatus as claimed in claim 1, wherein the semiconductor element consists essentially of a MOS switch.
Claim 9
Dependent Claim 33 words
Temperature sensing apparatus as claimed in claim 7, wherein the circuit further includes gate biasing means for the switch operable to turn off the MOS switch at a predetermined temperature of the switch.
Claim 10
Dependent Claim 21 words
Temperature sensing apparatus as claimed in claim 1, wherein the output circuit comprises a voltage source for applying a predetermined voltage.

References Cited (Backward Citations)

US3182201A Cited
US3440883A Cited
US3566690A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-08-07 1993-02-06 1993-08-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-08-07 1997-02-06 1997-08-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-08-07 2001-02-06 2001-08-08 $7700.00 Window Closed / Lapsed

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