US4851693A
Expired / Lapsed
US
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Compensated scan wave form generator for ion implantation equipment
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1988-06-03
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Granted: 1989-07-25
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Expires: 2008-06-03
Abstract
Abstract A scan controller for an ion implantation system includes a compensation circuit for generating a scanning signal from a triangle voltage signal. The scanning signal causes an ion beam to be deflected so that, in the variety of geometries describing the orientation of the target in the implantation system, the position of the intersection of the ion beam with the planar target surface changes linearly with time. In one embodiment the scanning signal has the form v(t)=-d -e/(t+c). In other embodiments the compensation circuit approximates the above function by means of polynomials.
Inventors
- 👤 Peter A. Fisher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:11
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/147; H01J37/1472; H01J37/1474; H01J37/1477; H01J37/30; H01J37/317; H01J37/3171
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
66 words
An apparatus for scanning an ion beam comprising: means for generating a voltage signal having a triangle wave form; means for deriving from said voltage signal a first scan voltage signal v(t) having the form v(t)=-d-e/(t+c) where d and c are constants and e is a non-zero constant; and means for supplying said scan voltage to a first pair of electrodes for deflecting said ion beam.
Claim 2
Independent Claim
66 words
An apparatus for scanning an ion beam comprising: means for generating a voltage signal having a triangle wave form; means for deriving from said voltage signal a first scan voltage signal v(t) having the form v(t)=-d-e/(t+c) where d and c are constants and e is a non-zero constant; and means for supplying said scan voltage to a first pair of electrodes for deflecting said ion beam.
Claim 3
Independent Claim
71 words
An apparatus for scanning an ion beam comprising: means for generating a voltage signal s(t) having a triangle wave form; means for deriving from said voltage signal a scan voltage signal which is a polynomial of degree 2 in s(t) of the form a 0 +a 1 s(t)+a 2 (s(t) 2 ); and means for applying said scan voltage signal to a first pair of electrodes for deflecting said ion beam.
Claim 4
Independent Claim
71 words
An apparatus for scanning an ion beam comprising: means for generating a voltage signal s(t) having a triangle wave form; means for deriving from said voltage signal a scan voltage signal which is a polynomial of degree 2 in s(t) of the form a 0 +a 1 s(t)+a 2 (s(t) 2 ); and means for applying said scan voltage signal to a first pair of electrodes for deflecting said ion beam.
Claim 5
Independent Claim
105 words
An apparatus for scanning an ion beam comprising: means for generating a voltage signal s(t) having a triangle wave form; means for deriving from said voltage signal a scan voltage signal which is a polynomial of degree N in s(t) of the form a 0 +a 1 s(t)+ . . . +a N (s(t) N ) wherein N is a positive integer≧2; means for adjusting the amplitude of each of said coefficients of said polynomial independently of the adjustment of any other of said coefficients of said polynomial; means for supplying said scan voltage to a first pair of electrodes for deflecting said ion beam.
Claim 6
Independent Claim
105 words
An apparatus for scanning an ion beam comprising: means for generating a voltage signal s(t) having a triangle wave form; means for deriving from said voltage signal a scan voltage signal which is a polynomial of degree N in s(t) of the form a 0 +a 1 s(t)+ . . . +a N (s(t) N ) wherein N is a positive integer≧2; means for adjusting the amplitude of each of said coefficients of said polynomial independently of the adjustment of any other of said coefficients of said polynomial; means for supplying said scan voltage to a first pair of electrodes for deflecting said ion beam.
Claim 7
Dependent Claim
84 words
An apparatus as in claim 1 further including: means for deriving from said voltage signal a second scan voltage signal having the form v.sub.2 (t)=-d.sub.2 -e.sub.2 /(t+c.sub.2) where d 2 and c 2 are constants and e 2 is a non-zero constant; and means for applying said second scan voltage to a second pair of electrodes for deflecting said ion beam, the electric field generated by said first pair of electrodes being perpendicular to the electric field generated by said second pair of electrodes.
Claim 8
Dependent Claim
15 words
An apparatus as in claim 1 wherein said means for deriving comprises an analog divider.
Claim 9
Independent Claim
58 words
A method for scanning an ion beam comprising: generating a voltage signal having a triangle wave form; deriving from said voltage signal a scan voltage signal having a form v(t)=-d-e/(t+c), where d and c are constants and e is a non-zero constant; and supplying said scan voltage to a first pair of electrodes for deflecting said ion beam.
Claim 10
Independent Claim
58 words
A method for scanning an ion beam comprising: generating a voltage signal having a triangle wave form; deriving from said voltage signal a scan voltage signal having a form v(t)=-d-e/(t+c), where d and c are constants and e is a non-zero constant; and supplying said scan voltage to a first pair of electrodes for deflecting said ion beam.
Claim 11
Independent Claim
84 words
A method for scanning an ion beam comprising: generating a voltage signal s(t) having a triangle wave form; deriving from said voltage signal a scan voltage signal which is a polynomial of degree N in s(t) of the form a 0 +a 1 s(t)+ . . . +a N (s(t) N ); adjusting said coefficients of said polynomial in order to approximate a function of the form v(t)=-d-e/(t+c); and applying said scan voltage to a first pair of electrodes for deflecting said ion beam.
Claim 12
Independent Claim
84 words
A method for scanning an ion beam comprising: generating a voltage signal s(t) having a triangle wave form; deriving from said voltage signal a scan voltage signal which is a polynomial of degree N in s(t) of the form a 0 +a 1 s(t)+ . . . +a N (s(t) N ); adjusting said coefficients of said polynomial in order to approximate a function of the form v(t)=-d-e/(t+c); and applying said scan voltage to a first pair of electrodes for deflecting said ion beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1992-07-24 | 1993-01-23 | 1993-07-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-24 | 1997-01-23 | 1997-07-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-24 | 2001-01-23 | 2001-07-25 | $7700.00 | Window Closed / Lapsed |