Patent US4849730A successfully refreshed from Google Patents.
US4849730A
Expired / Lapsed
US
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Force detecting device
Assignee: Ricoh Co Ltd
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Filing: 1987-02-17
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Granted: 1989-07-18
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Expires: 2007-02-17
Abstract
Abstract A force detecting device includes an insulative strain element, strain sensors, and leads. The insulative strain element is electrically insulative at least at its surface. The strain sensors are formed of a piezoresistive thin film and deposited as a piezoresistive thin film pattern on the surface of the insulative strain element integrally therewith. The leads are formed of a highly conductive thin film and deposited as a highly conductive thin film pattern on the surface of the insulative strain element integrally therewith.
Inventors
- 👤 Kouji Izumi
- 👤 Masanori Itagaki
- 👤 Eiichi Ohta
- 👤 Hiroyuki Okamoto
- 👤 Masumitsu Ino
- 👤 Hirotoshi Equchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 09:20
CPC Classifications
G; G01; G01L; G01L1/00; G01L1/18; G01L1/20; G01L1/22; G01L1/2287; G01L1/2293; G01L5/00; G01L5/16; G01L5/161; G01L5/162
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
61 words
A force detecting device comprising: an insulative strain element having a metallic structural body and a surface with an insulation on the surface; strain sensors and leads disposed as thin film patterns on said insulative strain element integrally therewith; and said strain sensors being formed of a piezoresistive thin film and said leads being formed of a highly conductive thin film.
Claim 2
Dependent Claim
61 words
A force detecting device comprising: an insulative strain element having a metallic structural body and a surface with an insulation on the surface; strain sensors and leads disposed as thin film patterns on said insulative strain element integrally therewith; and said strain sensors being formed of a piezoresistive thin film and said leads being formed of a highly conductive thin film.
Claim 3
Dependent Claim
25 words
A force detecting device according to claim 1, wherein said insulation comprises an electrically insulating material coated on the surface of said metallic structural body.
Claim 4
Dependent Claim
15 words
A force detecting device according to claim 1, wherein said insulation comprises an electric insulation.
Claim 5
Dependent Claim
34 words
A force detecting device according to claim 1, wherein said piezoresistive thin film is made of a material selected from the group consisting of a-Si, μc-Si, poly-Si, a-Ge, μc-Ge, and an amorphous silicon alloy.
Claim 6
Dependent Claim
31 words
A force detecting device according to claim 1, wherein said highly conductive thin film is made of a material selected from the group consisting of aluminum, chrome, and a nickel-chrome alloy.
Claim 7
Dependent Claim
55 words
A force detecting device comprising: an insulative strain element which is made of a ceramic insulative material; strain sensors and leads disposed as thin film patterns on said insulative strain element integrally therewith; and said strain sensors being formed of a piezoresistive thin film and said leads being formed of a highly conductive thin film.
Claim 8
Dependent Claim
55 words
A force detecting device comprising: an insulative strain element which is made of a ceramic insulative material; strain sensors and leads disposed as thin film patterns on said insulative strain element integrally therewith; and said strain sensors being formed of a piezoresistive thin film and said leads being formed of a highly conductive thin film.
Claim 9
Dependent Claim
34 words
A force detecting device according to claim 6, wherein said piezoresistive thin film is made of a material selected from the group consisting of a-Si, μc-Si, poly-Si, a-Ge, μc-Ge, and an amorphous silicon alloy.
Claim 10
Dependent Claim
31 words
A force detecting device according to claim 6, wherein said highly conductive thin film is made of a material selected from the group consisting of aluminum, chromium, and a nickel-chromium alloy.
References Cited (Backward Citations)
US4689600A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-17 | 1993-01-16 | 1993-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-17 | 1997-01-16 | 1997-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-17 | 2001-01-16 | 2001-07-18 | $7700.00 | Window Closed / Lapsed |