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US4849629A Expired / Lapsed US ⏱️ 0.0 years remaining

Charged particle analyzer

Assignee: Shimadzu Corp
•
Filing: 1987-11-13
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Granted: 1989-07-18
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Expires: 2007-11-13
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Abstract

Abstract A charged particle analyzer comprises a spherical grid, a spherical electrode, a screen plate, and a detector. The spherical electrode is outside of the spherical grid and is concentric with the spherical grid. The screen plate has an entry window and an exit opening, which are symmetrical with the center of the sphere of the spherical grid. A sample is disposed at the entry window of the screen plate. The detector is positioned behind the exit opening to detect charged particles emitted from the sample. The charged particles having the same energy can travel through the exit opening of the screen plate, and their amount or their angular distribution is measured.

Inventors

  • 👤 Hiroshi Daimon
  • 👤 Shozo Ino

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 05:06
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J49/488

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 68 words
A charged particle analyzer comprising: spherical grid means; spherical electrode means, said spherical electrode means being concentric with said spherical grid means; a screen plate disposed at said spherical grid means and having a window for entry of charged particles and an exit opening for said charged particles to detector means; and detector means disposed adjacent said exit opening of said screen plate for detecting the charged particles.
Claim 2
Dependent Claim 68 words
A charged particle analyzer comprising: spherical grid means; spherical electrode means, said spherical electrode means being concentric with said spherical grid means; a screen plate disposed at said spherical grid means and having a window for entry of charged particles and an exit opening for said charged particles to detector means; and detector means disposed adjacent said exit opening of said screen plate for detecting the charged particles.
Claim 3
Dependent Claim 35 words
The analyzer as set forth in claim 1, wherein the entry window and the exit opening of said screen plate is symmetrical with respect to the center of the sphere of said spherical grid means.
Claim 4
Dependent Claim 16 words
The analyzer as set forth in claim 1, wherein said detector means is of two-dimensional type.
Claim 5
Dependent Claim 21 words
The analyzer as set forth in claim 1, wherein a sample is positioned at the entry window of said screen plate.
Claim 6
Dependent Claim 45 words
The analyzer as set forth in claim 1, wherein the charged particles traveling to said exit opening travel in elliptical orbits and are emitted from the entry window at specific angles and are introduced back into said exit opening at the same said specific angles.
Claim 7
Dependent Claim 26 words
The analzyer as set forth in claim 1, wherein the radius of said spherical electrode means is approximately double the radius of said spherical grid means.
Claim 8
Dependent Claim 24 words
The analyzer as set forth in claim 1, further comprising guard ring means provided between said spherical grid means and said spherical electrode means.
Claim 9
Dependent Claim 32 words
The analyzer as set forth in claim 7, further comprising power supply means, connected to said spherical electrode means, for controlling the value of the energy of which charged particles are detected.
Claim 10
Dependent Claim 39 words
The analyzer as set forth in claim 1, wherein both said spherical electrode means and said spherical grid means are provided with hole means through which an excitation ray is incident upon the entry window of said screen plate.
Claim 11
Dependent Claim 16 words
The analyzer as set forth in claim 1, wherein said detector means is a fluorescent screen.
Claim 12
Dependent Claim 23 words
The analyzer as set forth in claim 1, further comprising high pass filter means disposed under the exit opening of said screen plate.
Claim 13
Dependent Claim 34 words
The analyzer as set forth in claim 1, wherein the solid angle of said spherical grid means is not 2 π steradian, for instance, smaller than 2 π steradian or about 4 π steradian.

References Cited (Backward Citations)

SU475686A1 Cited
JPS52488A Cited
US4255656A Cited
JPS5878362A Cited
US4546254A Cited
US4633084A Cited
US4728790A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-07-17 1993-01-16 1993-07-18 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-07-17 1997-01-16 1997-07-18 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-07-17 2001-01-16 2001-07-18 $7700.00 Window Closed / Lapsed

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