US4849323A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pattern forming method using contrast enhanced material
Assignee: Panasonic Holdings Corp
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Filing: 1987-08-10
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Granted: 1989-07-18
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Expires: 2007-08-10
Abstract
Abstract Disclosed is a pattern forming method using contrast enhanced material for enhancing the resolution and contrast when forming patterns in fabrication of semiconductors or the like. This pattern forming method comprises a step of applying a contrast enhanced material for pattern forming on a photoresist, a step of exposing and a step of developing. The contrast enhanced material is a water-soluble material using a novel diazo compound so that the coefficient A of the contrast may be 10 or more, and when it is combined with g-line exposure to be used in pattern formation, a pattern of 0.5 μm or less may be formed. The diazo compound may be represented, for example, by ##STR1##
Inventors
- 👤 Masayuki Endo
- 👤 Masaru Sasago
- 👤 Kazufumi Ogawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 16:51
CPC Classifications
G; G03; G03C; G03C1/00; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
153 words
A pattern forming method comprising: a step of applying on a photoresist applied on a substrate, a contrast enhanced film for pattern forming which is capable of being entirely dissolved in a water-based solvent whether exposed to light or not, said contrast enhanced film containing either a photoreactive reagent represented by the formula: ##STR9## wherein R 4 and R 5 are methyl or ethyl and X 31 0 is an anion capable of forming a diazonium salt; water-soluble polymer and water, or containing a water soluble polymer which is hydrogen bonded to the photoreactive reagent and water-soluble polymer and water; ##STR10## a step of selectively exposing said photoresist and contrast enhanced film to light of about 436 nm; and a step of removing said contrast enhanced film and developing said photoresist so that the exposed portion of said photoresist is removed and the unexposed portion of said photoresist remains to form a pattern.
Claim 2
Dependent Claim
153 words
A pattern forming method comprising: a step of applying on a photoresist applied on a substrate, a contrast enhanced film for pattern forming which is capable of being entirely dissolved in a water-based solvent whether exposed to light or not, said contrast enhanced film containing either a photoreactive reagent represented by the formula: ##STR9## wherein R 4 and R 5 are methyl or ethyl and X 31 0 is an anion capable of forming a diazonium salt; water-soluble polymer and water, or containing a water soluble polymer which is hydrogen bonded to the photoreactive reagent and water-soluble polymer and water; ##STR10## a step of selectively exposing said photoresist and contrast enhanced film to light of about 436 nm; and a step of removing said contrast enhanced film and developing said photoresist so that the exposed portion of said photoresist is removed and the unexposed portion of said photoresist remains to form a pattern.
Claim 3
Dependent Claim
35 words
A pattern forming method as set forth in claim 1, wherein said water-soluble polymer is a mixture of a water-soluble organic matter inferior in gas permeability and a water-soluble organic matter superior in gas permeability.
Claim 4
Dependent Claim
39 words
A pattern forming method as set forth in claim 1, wherein said water-soluble polymer is a water-soluble organic matter selected from any one of or combining some of pullulan, polyvinyl alcohol, polyvinyl pyrrolidone, polyethylene glycol, polyethylene oxide, and cellulose.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-17 | 1993-01-16 | 1993-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-17 | 1997-01-16 | 1997-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-17 | 2001-01-16 | 2001-07-18 | $7700.00 | Window Closed / Lapsed |