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US4849088A
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US
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Cathode arc discharge evaporating device
Assignee: HAUZER HOLDING BV A CORP OF NETHERLANDS
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Filing: 1988-03-14
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Granted: 1989-07-18
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Expires: 2008-03-14
Abstract
Abstract Cathode arc discharge evaporating device having a body of revolution as cathode. The target surface is arranged at the outside surface of the body of revolution. To control movement of the arc spot a magnetic field generating device is provided inside the body of revolution, which may be moveable with respect to the cathode.
Inventors
- 👤 Hans Veltrop
- 👤 Harald Wesemeyer
- 👤 Boudewijn J. A. M. Buil
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:54
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
74 words
Cathode arc evaporating device, comprising an evaporation surface of the material to be evaporated formed as a surface of a hollow body of revolution, means for supporting said evaporation surface for rotation about an axis, and at least one arc spot steering magnetic field generating device supported within said evaporation surface for movement in a direction parallel to the axis of rotation of said evaporation surface for avoiding non-uniform erosion of said evaporation surface.
Claim 2
Dependent Claim
74 words
Cathode arc evaporating device, comprising an evaporation surface of the material to be evaporated formed as a surface of a hollow body of revolution, means for supporting said evaporation surface for rotation about an axis, and at least one arc spot steering magnetic field generating device supported within said evaporation surface for movement in a direction parallel to the axis of rotation of said evaporation surface for avoiding non-uniform erosion of said evaporation surface.
Claim 3
Dependent Claim
17 words
Device according to claim 1, wherein the magnetic field generating device comprises an assembly of permanent magnets.
Claim 4
Dependent Claim
17 words
Device according to claim 1, wherein the magnetic field generating device comprises an assembly of electro magnets.
Claim 5
Dependent Claim
18 words
Device according to claim 1, wherein dark screen means are provided on one side of the evaporation surface.
Claim 6
Dependent Claim
23 words
Device according to claim 1, wherein means are provided to translate the body of revolution with regard to the magnetic field generating device.
Claim 7
Dependent Claim
27 words
Device according to claim 1, wherein the magnetic field generating device is rotatable in a plane substantially perpendicular to the rotational axis of the body of revolution.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-17 | 1993-01-16 | 1993-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-17 | 1997-01-16 | 1997-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-17 | 2001-01-16 | 2001-07-18 | $7700.00 | Window Closed / Lapsed |