US4849069A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing filaments
Assignee: Hamilton Standard Controls Inc
•
Filing: 1987-12-09
•
Granted: 1989-07-18
•
Expires: 2007-12-09
Abstract
Abstract A method of producing filaments of sub-micron cross-sectional dimensions including the steps of obtaining a substrate having a base and a delineating layer on the base and a step in a surface of the delineating layer, providing a layer of a material from which the filament is to be formed on the surface which replicates the step in the surface, anisotropically etching the layer of filament material in the direction of the surface so as to leave a filament of the material adjacent the step, and removing the delineating layer to wholly or partially separate the filament from the substrate.
Inventors
- 👤 Alan G. R. Evans
- 👤 Mohammed M. Farooqui
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:44
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/02; G; G03; G03F; G03F7/00; H; H10; H10P; H10P76/00; H10P76/40; H10P76/408; H10P76/4085; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
100 words
A method of producing filaments comprising the steps of: (a) obtaining a substrate having a base and a delineating layer on said base and a step in a surface of the delineating layer; (b) providing a layer of a material from which the filament is to be formed on said surface which replicates the step in said surface; (c) anisotropically removing said layer of filament material in the direction of said surface so as to leave a filament of said material adjacent said step; and (d) removing said delineating layer to wholly or partially separate said filament from the substrate.
Claim 2
Independent Claim
100 words
A method of producing filaments comprising the steps of: (a) obtaining a substrate having a base and a delineating layer on said base and a step in a surface of the delineating layer; (b) providing a layer of a material from which the filament is to be formed on said surface which replicates the step in said surface; (c) anisotropically removing said layer of filament material in the direction of said surface so as to leave a filament of said material adjacent said step; and (d) removing said delineating layer to wholly or partially separate said filament from the substrate.
Claim 3
Dependent Claim
17 words
A method according to claim 1, wherein said delineating layer is deposited or grown on said base.
Claim 4
Dependent Claim
18 words
A method according to claim 2, wherein said delineating layer is grown thermally or is chemically isotropically deposited.
Claim 5
Dependent Claim
21 words
A method according to claim 3, wherein said delineating layer is selectively deposited or grown so as to produce said step.
Claim 6
Dependent Claim
22 words
A method according to claim 4, wherein the layer from which the filament is to be formed is removed by anisotropic etching.
Claim 7
Dependent Claim
13 words
A method according to claim 5, wherein said anisotropic etching comprises plasma etching.
Claim 8
Dependent Claim
15 words
A method according to claim 1, wherein said step is formed by etching or erosion.
Claim 9
Dependent Claim
27 words
A method according to claim 7, wherein said etching or erosion comprises selective etching, masked chemical etching, erosion by ion bombardment, plasma etching or reactive ion etching.
Claim 10
Dependent Claim
37 words
A method according to claim 1, wherein said delineating layer is so removed from said substrate as to leave said filament connected to the substrate at one or more selected positions along the length of the filament.
Claim 11
Dependent Claim
20 words
A method according to claim 9, wherein the filament is left connected to the substrate at one or both ends.
Claim 12
Dependent Claim
34 words
A method according to claim 10, wherein the delineating layer is formed from a material which is etchable or removable differentially with respect to the material from which the filament is to be formed.
Claim 13
Dependent Claim
29 words
A method according to claim 11, wherein the substrate is formed from silicon and silicon dioxide and the material from which said filament is to be formed is polysilicon.
Claim 14
Dependent Claim
23 words
A method according to claim 12, wherein the base of the substrate is of silicon and the delineating layer is of silicon dioxide.
Claim 15
Dependent Claim
25 words
A method according to claim 13, wherein the height of said step is chosen according to the required thickness of the filament to be produced.
Claim 16
Dependent Claim
33 words
A method according to claim 14, wherein the thickness of the layer from which the filament is to be formed is chosen according to the required width of the filament to be produced.
Claim 17
Dependent Claim
24 words
A method according to claim 15, which comprises treating the material of the filament to impart predetermined electrical or mechanical properties to the filament.
Claim 18
Dependent Claim
27 words
A method according to claim 16, wherein the electrical conductivity of the filament is adjusted to a predetermined value by dopant diffusion, ion implantation or thermal treatment.
Claim 19
Dependent Claim
22 words
A method according to claim 1, wherein the layer from which the filament is to be formed is removed by anisotropic etching.
Claim 20
Dependent Claim
35 words
A method according to claim 1, wherein the base of the substrate is of silicon, the delineating layer is of silicon dioxide and the material from which said filament is to be formed is polysilicon.
Claim 21
Dependent Claim
25 words
A method according to claim 1 wherein the height of said step is chosen according to the required thickness of the filament to be produced.
Claim 22
Dependent Claim
33 words
A method according to claim 1, wherein the thickness of the layer from which the filament is to be formed is chosen according to the required width of the filament to be produced.
Claim 23
Dependent Claim
27 words
A method according to claim 1, wherein the electrical conductivity of the filament is adjusted to a predetermined value by dopant diffusion, ion implantation or thermal treatment.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-17 | 1993-01-16 | 1993-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-17 | 1997-01-16 | 1997-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-17 | 2001-01-16 | 2001-07-18 | $7700.00 | Window Closed / Lapsed |