Dual mode vibration isolator

Claim 2

A dual mode vibration isolator for actively isolating vibrations between a first and a second body while permitting movement of the first body in six-degrees-of-freedom with respect to the second body, comprising: a mounting member positioned between said first and second bodies to provide a stable mechanical interface between the bodies; first, active isolating means mounted on said mounting member between said first body and said mounting member for reducing the transmission of vibrations between said first body and said mounting member; second, active isolating means mounted on said mounting member between said second body and said mounting member for reducing the transmission of vibrations between said second body and said mounting member; and pivoting means, associated with both the first and second isolating means, for applying a torque to the first body so that the first body is able to pivot, upon activation of the pivoting means, in six-degrees-of-freedom with respect to the second body.

Claim 3

The apparatus of claim 1, wherein said first isolating means includes a plurality of magnetic actuators magnetically supporting said first body relative to said mounting member.

Claim 4

A dual mode vibration isolator for isolating vibrations between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; first isolating means mounted on said mounting member between said first body and said mounting member for reducing the transmissin of vibrations between said first and said second bodies, wherein said first isolating means includes a plurality of magnetic actuators magnetically supporting said first body relative to said mounting member without physical contact; and second, active isolating means mounted on said mounting member between said second body and said mounting member for reducing the transmission of vibrations between said first and second bodies.

Claim 5

A dual mode vibration isolator for isolating vibrations between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; first isolating means mounted on said mounting member between said first body and said mounting member for reducing the transmissin of vibrations between said first and said second bodies, wherein said first isolating means includes a plurality of magnetic actuators magnetically supporting said first body relative to said mounting member without physical contact; and second, active isolating means mounted on said mounting member between said second body and said mounting member for reducing the transmission of vibrations between said first and second bodies.

Claim 6

The isolator of claim 3, wherein said first isolating means includes means for detecting motion of said first body relative to said mounting member, and said isolator further comprises means responsive to said detecting means for controlling said first and second isolating means to move the mounting member in correlation to the detected motion of the first body.

Claim 7

The apparatus of claim 4, wherein said second isolating means includes a plurality of linear actuators each pivotally connected to said second body and said mounting member.

Claim 8

The apparatus of claim 4, wherein: each of said magnetic actuators includes an armature magnetically suspended between a corresponding pair of stators; and said detecting means detects the position of each of said armatures relative to said corresponding pair of stators.

Claim 9

The apparatus of claim 3 wherein the mounting member includes three mounting pads equally spaced from each other to define vertices of an equilateral triangle, wherein the first isolating means includes three pairs of magnetic actuators, each of said pairs of magnetic actuators being mounted on one of said mounting pads, and wherein the second isolating means includes three pairs of linear actuators supporting said mounting member relative to said second body, each of said pairs of linear actuators being connected to one of said mounting pads.

Claim 10

The apparatus of claim 7 wherein each of said linear actuators has a longitudinal axis; each of said magnetic actuators has a pair of parallel magnetic axes and includes a pair of stator cores, each of said stator cores having a pair of magnetic coils wound about said magnetic axes; and said magnetic axes of each of said magnetic actuators are parallel with said longitudinal axis of one of said linear actuators mounted at a common one of said mounting pads.

Claim 11

The apparatus of claim 3 wherein each magnetic actuator has an armature fixed to said first body and a stator fixed to said mounting member, each of said stators including a pair of spaced-apart stator cores having wound thereon at least one magnetic coil generating oppositely directed magnetic fields therebetween and each of said armatures being suspended in a prescribed position between said stator cores of said corresponding stator by said magnetic fields, said magnetic support means also including gap sensor means for detecting variation of said armatures from said prescribed positions relative to said stator cores; wherein the second isolating means include actuator means operative when activated to move said mounting member relative to said second body; the apparatus further comprising system control means responsive to said gap sensor means for activating said actuator means to move said mounting member relative to said second body and restore said armatures to said prescribed positions relative to said stator cores; and local control means at each of said stators for adjusting said magnetic fields of said stator to permit said stator to vibrate relative to said corresponding armature without transmitting vibration to said corresponding armature.

Claim 12

The apparatus of claim 9, wherein each of said local control means includes flux sensor means for detecting a change in magnetic flux when said armature and said stator cores move relative to one another.

Claim 13

The apparatus of claim 10, wherein each of said local control means includes a flux feedback loop responsive to said flux sensor means, said flux feedback loop adjusting said magnetic fields of said stator to oppose said detected magnetic flux change.

Claim 14

The apparatus of claim 11, wherein said system control means includes a followup isolation loop responsive to said gap sensor means for restoring said mounting member to said prescribed position when said gap sensor means detects variations of said mounting member from said prescribed position.

Claim 15

The apparatus of claim 12, wherein said flux feedback loops operate at a first frequency and said followup isolation loop operates at a second frequency lower than said first frequency.

Claim 16

A dual mode vibration isolator for isolating vibrations between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; magnetic isolating means mounted on said mounting member between said first body and said mounting for supporting the first body magnetically with respect to the mounting member without physical contact and for reducing the transmission of vibrations between said first body and said mounting member; active means, mounted on said mounting member between said second body and said mounting member, for reducing the transmission of vibrations between said second body and said mounting member and for repositioning said mounting member and said first body in six-degrees-of-freedom relative to said second body.

Claim 17

A dual mode vibration isolator for isolating vibrations between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; magnetic isolating means mounted on said mounting member between said first body and said mounting for supporting the first body magnetically with respect to the mounting member without physical contact and for reducing the transmission of vibrations between said first body and said mounting member; active means, mounted on said mounting member between said second body and said mounting member, for reducing the transmission of vibrations between said second body and said mounting member and for repositioning said mounting member and said first body in six-degrees-of-freedom relative to said second body.

Claim 18

The apparatus of claim 14, wherein said reducing/repositioning means includes a plurality of linear actuators each pivotally connected to said second body and said mounting member, and further comprising motion detection means associated with the first body and the magnetic isolating means for detecting motion of the first body relative to the mounting member and a controller, connected to the motion detection means and responsive to the detection of motion of the first body, for commanding the linear actuators to move the mounting member in correlation to the detected motion.

Claim 19

The apparatus of claim 14, wherein the mounting member provides a stable mechanical interface between the bodies and reducing/repositioning means including a plurality of linear actuators supporting said mounting member relative to said second body, wherein the linear actuators include active means for moving the mounting member in six-degrees-of-freedom in correlation with motion of the first body to reduce contact between the first body and mounting member that might otherwise occur.

Claim 20

The apparatus of claim 16, wherein said reducing/repositioning means including six linear actuators, each of said linear actuators having one end pivotally connected to said second body and another end pivotally connected to said mounting member.

Claim 21

The apparatus of claim 14 wherein the magnetic isolating means includes a plurality of magnetic actuators each having a corresponding armature fixed to said first body and a corresponding stator fixed to said mounting member, each of said stators including a pair of spaced-apart stator cores having wound thereon a pair of magnetic coils generating oppositely directed magnetic fields therebetween and each of said armatures being suspended between said stator cores of said corresponding stator by said magnetic fields, each of said magnetic actuators also including gap sensor means for detecting variation of said corresponding armature from a prescribed position between said stator cores of said corresponding stator; wherein the reducing/repositioning means includes a plurality of linear actuators each having one end pivotally connected to said second body and another end pivotally connected to said mounting member, each of said linear actuators including positioning means operative when activated to selectively vary the length of said individual linear actuator; and further comprising system control means responsive to said gap sensor means for activating said positioning means to adjust the lengths of said linear actuators to move said mounting member relative to said second body and to restore each of said armatures to said prescribed position.

Claim 22

The apparatus of claim 18 wherein said plurality of linear actuators includes a plurality of pairs of nonparallel linear actuators.

Claim 23

The apparatus of claim 18 wherein each of said linear actuators has a longitudinal axis; each of said magnetic coils of each of said stators is wound about a magnetic axis and said magnetic axes of said magnetic coils are located in a common plane; and said magnetic axes of each of said magnetic actuators are parallel with said longitudinal axis of one of said linear actuators.

Claim 24

The apparatus of claim 18 wherein said plurality of magnetic actuators includes a plurality of pairs of magnetic actuators, one of each pair of magnetic actuators having said stator cores aligned axially with respect to said mounting member and the other of each pair of magnetic actuators having said stator cores aligned tangentially with respect to said mounting member.

Claim 25

The apparatus of claim 18 further comprising: local control means at each of said stators for adjusting said magnetic fields of said stator to permit said stator to vibrate relative to said corresponding armature without transmitting vibration to said corresponding armature.

Claim 26

The apparatus of claim 22 wherein each of said local control means includes flux sensor means for detecting a change in magnetic flux when said armature and said stator cores move relative to one another.

Claim 27

The apparatus of claim 23 wherein each of said local control means includes a flux feedback loop adjusting said magnetic fields of said stator to oppose said detected mangetic flux change.

Claim 28

The apparatus of claim 24 wherein said system control means includes a followup isolation loop responsive to said gap sensor means for restoring said mounting member to said prescribed position when said gap sensor means detects variations of said mounting member from said prescribed position.

Claim 29

The apparatus of claim 25 wherein said flux feedback loop operates at a first frequency and said followup isolation loop operates at a second frequency lower than said first frequency.

Claim 30

A dual mode vibration isolator for isolating vibration between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; first isolating means mounted on said mounting member between said first body and said mounting member for reducing the transmission of vibrations between said first and second bodies, said first isolation means including a plurality of magnetic actuators magnetically supporting said first body relative to said mounting member; and second isolating means mounted on said mounting member between said second body and said mounting member for reducing the transmission of vibrations between said first and second bodies and for repositioning said mounting member and said first body relative to said second body, said second isolation means including six linear actuators supporting said mounting member relative to said second body, each of said linear actuators having one end pivotally connected to said second body and another end pivotally connected to said mounting member, wherein the ends of said linear actuators that are connected to said mounting member lie in a single plane, and said second isolating means further includes means for varying the lengths of said linear actuators to pivot said mounting member and said first body about a pivot point lying in said plane through an arc.

Claim 31

A dual mode vibration isolator for isolating vibration between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; first isolating means mounted on said mounting member between said first body and said mounting member for reducing the transmission of vibrations between said first and second bodies, said first isolation means including a plurality of magnetic actuators magnetically supporting said first body relative to said mounting member; and second isolating means mounted on said mounting member between said second body and said mounting member for reducing the transmission of vibrations between said first and second bodies and for repositioning said mounting member and said first body relative to said second body, said second isolation means including six linear actuators supporting said mounting member relative to said second body, each of said linear actuators having one end pivotally connected to said second body and another end pivotally connected to said mounting member, wherein the ends of said linear actuators that are connected to said mounting member lie in a single plane, and said second isolating means further includes means for varying the lengths of said linear actuators to pivot said mounting member and said first body about a pivot point lying in said plane through an arc.

Claim 32

The apparatus of claim 27, wherein each of said magnetic actuators includes an armature of a preselected thickness fixed to one of said first body or said mounting member and a stator fixed to the other of said first body or said mounting member, each of said stators including a pair of stator cores having opposed pole faces facing each other, each of said armatures being magnetically suspended between said opposed pole faces of said corresponding stator, said opposed pole faces of each of said stators being spaced apart by a preselected distance approximately 9.0 mm greater than said preselected thickness of said armature.

Claim 33

The apparatus of claim 28, wherein each of said stators generates a magnetic field exerting a force of up to about 3200 N on said corresponding armature when said second isolating means repositions said mounting member and said first body.

Claim 34

The apparatus of claim 27 wherein the linear actuators are grouped in three pairs with the ends of each linear actuator on the second body being spaced apart farther than the corresponding ends of each pair on the mounting member, and wherein the first isolating means includes (i) three pairs of magnetic actuators each having a corresponding armature fixed to said first body and a corresponding stator fixed to said mounting member, each of said stators including a pair of spaced-apart stator cores each having wound thereon a pair of magnetic coils generating oppositely directed magnetic fields therebetween and each of said armatures being suspended between said stator cores of said corresponding stator by said magnetic fields, one of each pair of magnetic actuators having said stator cores aligned axially with respect to said mounting member and the other of each pair of magnetic actuators having said stator cores aligned tangentially with respect to said mounting member each of said magnetic actuators and (ii) gap sensor means for detecting variation of said corresponding armature from a prescribed position between said stator cores of said corresponding stator, and further comprising system control means responsive to said gap sensor means for activating said varying means to adjust the lengths of said linear actuators to move said mounting member relative to said first body and to restore each of said armatures to said predetermined position between said stator cores of said corresponding stator.

Claim 35

A dual mode vibration isolator, comprising: a mounting member positioned between a first and a second body to provide a stable mechanical interface between the bodies; means for magnetically supporting without physical contact said first body relative to said mounting member, said magnetic support means including gap sensor means for detecting deviation of said mounting member from a prescribed null position relative to said first body by detecting a change in the gap of the magnetic support means; actuator means connected between said second body and said mounting member operative when activated to move said mounting member relative to said second body; and system control means responsive to said gap sensor means for activating said actuator means to restore said mounting member to said prescribed null position relative to said first body so that the mounting member chases the sensed motion of the first body.

Claim 36

A dual mode vibration isolator, comprising: a mounting member positioned between a first and a second body to provide a stable mechanical interface between the bodies; means for magnetically supporting without physical contact said first body relative to said mounting member, said magnetic support means including gap sensor means for detecting deviation of said mounting member from a prescribed null position relative to said first body by detecting a change in the gap of the magnetic support means; actuator means connected between said second body and said mounting member operative when activated to move said mounting member relative to said second body; and system control means responsive to said gap sensor means for activating said actuator means to restore said mounting member to said prescribed null position relative to said first body so that the mounting member chases the sensed motion of the first body.

Claim 37

The isolator of claim 31, wherein said actuator means includes a plurality of linear actuators each connected between said second body and said mounting member, each of said linear actuators including positioning means for selectively varying the length of said individual linear actuator when activated by said system control means.

Claim 38

A dual mode vibration isolator for reducing transmission of vibrations between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; means for magnetically supporting said first body relative to said mounting member, said magnetic support means including gap sensor means for detecting variation of said mounting member from a prescribed position relative to said first body; actuator means connected between said second body and said mounting member operative when activated to move said mounting member relative to said second body, wherein said actuator means includes a plurality of linear actuators each connected between said second body and said mounting member, each of said linear actuators including positioning means for selectively varying the length of said individual linear actuator when activated by a system control means, and wherein each of said linear actuators includes one end pivotally connected to said second body and another end pivotally connected to said mounting member; and system control means responsive to said gap sensor means for activating said actuator means to return said mounting member to said prescribed position relative to said first body.

Claim 39

A dual mode vibration isolator for reducing transmission of vibrations between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; means for magnetically supporting said first body relative to said mounting member, said magnetic support means including gap sensor means for detecting variation of said mounting member from a prescribed position relative to said first body; actuator means connected between said second body and said mounting member operative when activated to move said mounting member relative to said second body, wherein said actuator means includes a plurality of linear actuators each connected between said second body and said mounting member, each of said linear actuators including positioning means for selectively varying the length of said individual linear actuator when activated by a system control means, and wherein each of said linear actuators includes one end pivotally connected to said second body and another end pivotally connected to said mounting member; and system control means responsive to said gap sensor means for activating said actuator means to return said mounting member to said prescribed position relative to said first body.

Claim 40

The apparatus of claim 33, wherein said ends of said linear actuators are connected to said second body and said mounting member by spherical bearings.

Claim 41

The apparatus of claim 33, wherein said magnetic support means includes a plurality of magnetic actuators each having an armature fixed to one of said first body or said mounting member and a stator fixed to the other of said first body or said mounting member, each of said stators including a pair of spaced-apart stator cores having wound thereon at least one magnetic coil generating oppositely directed magnetic fields therebetween and each of said armatures being suspended between said stator cores of said corresponding stator by said magnetic fields.

Claim 42

The apparatus of claim 35, wherein said gap sensor means includes an inductive transducer mounted on each of said stators.

Claim 47

A dual mode vibration isolator for reducing transmission of vibrations between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; means for magnetically supporting said first body relative to said mounting member, said magnetic support means including gap sensor means for detecting variation of said mounting member from a prescribed position relative to said first body, wherein said magnetic support means includes a plurality of magnetic actuators each having an armature fixed to one of said first body or said mounting member and a stator fixed to the other of said first body or said mounting member, each of said stators including a pair of spaced-apart stator cores having wound thereon at least one magnetic coil generating oppositely directed magnetic fields there between and each of said armatures being suspended between said stator cores of said corresponding stator by said magnetic fields; actuator means connected between said second body and said mounting member operative when activated to move said mounting member relative to said second body; and system control means responsive to said gap sensor means for activating said actuator means to move said mounting member to said prescribed position relative to said first body.

Claim 48

A dual mode vibration isolator for reducing transmission of vibrations between a first body and a second body, comprising: a mounting member positioned between said first and second bodies; means for magnetically supporting said first body relative to said mounting member, said magnetic support means including gap sensor means for detecting variation of said mounting member from a prescribed position relative to said first body, wherein said magnetic support means includes a plurality of magnetic actuators each having an armature fixed to one of said first body or said mounting member and a stator fixed to the other of said first body or said mounting member, each of said stators including a pair of spaced-apart stator cores having wound thereon at least one magnetic coil generating oppositely directed magnetic fields there between and each of said armatures being suspended between said stator cores of said corresponding stator by said magnetic fields; actuator means connected between said second body and said mounting member operative when activated to move said mounting member relative to said second body; and system control means responsive to said gap sensor means for activating said actuator means to move said mounting member to said prescribed position relative to said first body.

Claim 49

The apparatus of claim 39 wherein said actuator means includes a plurality of linear actuators each connected between said second body and said mounting member, each of said linear actuators including positioning means for selectively varying the length of said individual linear actuator when activated by said system control means.

Claim 50

The apparatus of claim 40 wherein each of said linear actuators includes one end pivotally connected to said second body and another end pivotally connected to said mounting member.

Claim 51

The apparatus of claim 39, wherein said gap sensor means includes an inductive transducer mounted on each of said stators.

Claim 52

A dual mode vibration isolator for reducing transmission of vibrations between a first body and second body, comprising: a mounting member positioned between said first and second bodies, said mounting members including three mounting pads equally spaced from one another and defining vertices of an equilateral triangle; three pairs of linear actuators, each pair of linear actuators connecting said second body to one of said mounting pads of said mounting members, each of said linear actuators having one end pivotally connected to said second body and another end pivotally connected to said respective mounting pad, each of said linear actuators including a longitudinal axis passing between said ends and positioning means operative when activated to selectively vary the length of said individual linear actuator for moving said mounting member relative to said second body; three pairs of magnetic actuators, each one of each pair of magnetic actuators having a corresponding armature fixed to said first body and a corresponding stator fixed to one of said mounting pads of said mounting member for mangnetically supporting said first body relative to said mounting member without physical contact, each of said stators including a pair of spaced-apart stator cores having wound thereon a pair of magnetic coils generating oppositely directed magnetic fields therebetween and each of said armatures being suspended between said stator cores of said corresponding stator by said magnetic fields, each of said magnetic coils being wound about a magnetic axis and said magnetic axes of each of said magnetic actuators being parallel and lying in a common plane, said magnetic axes of each of said magnetic actuators being parallel with said longitudinal axis of one of said linear actuators mounted at a common one of said mounting pads, each of said magnetic actuators also including gap sensor means for detecting variation of said armature from a prescribed position between said stator cores of said corresponding stator; local control means for adjusting said magnetic fields of each of said stators to permit said stator to vibrate relative to said corresponding armature without transmitting vibration to said corresponding armature; and system control means responsive to said gap sensor means for activating said positioning means to adjust the lengths of said linear actuators to move said mounting member relative to said second body and to restore each of said armatures to said predetermined position between said stator cores of said corresponding stator.

Claim 53

A dual mode vibration isolator for reducing transmission of vibrations between a first body and second body, comprising: a mounting member positioned between said first and second bodies, said mounting members including three mounting pads equally spaced from one another and defining vertices of an equilateral triangle; three pairs of linear actuators, each pair of linear actuators connecting said second body to one of said mounting pads of said mounting members, each of said linear actuators having one end pivotally connected to said second body and another end pivotally connected to said respective mounting pad, each of said linear actuators including a longitudinal axis passing between said ends and positioning means operative when activated to selectively vary the length of said individual linear actuator for moving said mounting member relative to said second body; three pairs of magnetic actuators, each one of each pair of magnetic actuators having a corresponding armature fixed to said first body and a corresponding stator fixed to one of said mounting pads of said mounting member for mangnetically supporting said first body relative to said mounting member without physical contact, each of said stators including a pair of spaced-apart stator cores having wound thereon a pair of magnetic coils generating oppositely directed magnetic fields therebetween and each of said armatures being suspended between said stator cores of said corresponding stator by said magnetic fields, each of said magnetic coils being wound about a magnetic axis and said magnetic axes of each of said magnetic actuators being parallel and lying in a common plane, said magnetic axes of each of said magnetic actuators being parallel with said longitudinal axis of one of said linear actuators mounted at a common one of said mounting pads, each of said magnetic actuators also including gap sensor means for detecting variation of said armature from a prescribed position between said stator cores of said corresponding stator; local control means for adjusting said magnetic fields of each of said stators to permit said stator to vibrate relative to said corresponding armature without transmitting vibration to said corresponding armature; and system control means responsive to said gap sensor means for activating said positioning means to adjust the lengths of said linear actuators to move said mounting member relative to said second body and to restore each of said armatures to said predetermined position between said stator cores of said corresponding stator.

Claim 54

The isolator of claim 43 wherein the mounting member is a triangular platform formed from three tubular connectors.

Claim 57

The method of claim 45, wherein said magnetic field adjusting step is performed periodically at a first frequency and said length adjusting step is performed periodically at a second frequency, said first frequency being higher than said second frequency.

Claim 58

The method of claim 46, further comprising adjusting the magnetic fields in each magnetic actuator periodically at a third frequency to position the first body with respect to the second body, said third frequency being lower than said second frequency.

Claim 59

A dual mode vibration isolator for reducing transmission of vibration from a first body to a second body while permitting dynamic repositioning of the first body relative to the second body in six degrees of freedom, comprising: a mounting member having two opposed sides providing a stable mechanical interface between the first and second bodies; means fixed to one side of the mounting member for supporting the first body relative to the mounting member without physical contact, the means defining at least one gap between the first body and the mounting member; means fixed to the other side of the mounting member for connecting the mounting member compliantly to the second body, the connecting means including positioning means for actively moving the mounting member in six degrees of freedom relative to the second body; means for detecting vibration of the first body relative to the mounting member; and system control means associated with the positioning means and responsive to the detecting means for moving the mounting member in six degrees of freedom in correlation to the detected vibration for maintaining the gap between the first body and the mounting member.

Claim 60

A dual mode vibration isolator for reducing transmission of vibration from a first body to a second body while permitting dynamic repositioning of the first body relative to the second body in six degrees of freedom, comprising: a mounting member having two opposed sides providing a stable mechanical interface between the first and second bodies; means fixed to one side of the mounting member for supporting the first body relative to the mounting member without physical contact, the means defining at least one gap between the first body and the mounting member; means fixed to the other side of the mounting member for connecting the mounting member compliantly to the second body, the connecting means including positioning means for actively moving the mounting member in six degrees of freedom relative to the second body; means for detecting vibration of the first body relative to the mounting member; and system control means associated with the positioning means and responsive to the detecting means for moving the mounting member in six degrees of freedom in correlation to the detected vibration for maintaining the gap between the first body and the mounting member.

Claim 61

The isolator of claim 48 wherein the supporting means includes a plurality of magnetic actuators.

Claim 62

The isolator of claim 49 further comprising local controllers associated with each magnetic actuator for permitting vibration of a stator of the magnetic actuator relative to an armature without transmitting the vibration to the armature.

Claim 63

The isolator of claim 50 wherein each local controller includes flux sensors for detecting a change in magnetic flux in the magnetic actuator when the stator vibrates.

Claim 64

The isolator of claim 50 wherein the connecting means includes a plurality of pairs of linear actuators pivotally connected to both the mounting member and the second body.

Claim 65

The isolator of claim 52 wherein movement of the linear actuators for repositioning applies a torque between the first and second bodies of at least about 27,000N-m while transmission of vibration between the first and second body is reduced by about 80 dB over a frequency range from about 1-2000 Hz.

Claim 66

The isolator of claim 52 further comprising feedback control means associated with the system control means for providing feedback control to both the positioning means and local controllers to ensure that the mounting member moves in correlation with the relative motion of the first body.

Claim 67

A dual mode vibration isolator, comprising: a mounting member having a top, a bottom, and a periphery, the member providing a mechanical interface between a first and a second body; active isolating means connected between the first body and the top of the mounting member for isolating the first body from relative vibrations of the mounting member while permitting movement of the first body in six degrees of freedom relative to the mounting member; active mechanical isolating means dispersed around the periphery of the bottom of the mounting member and connecting the mounting member to the second body, the active mechanical means reducing transmission of vibrations from the second body to the mounting member while permitting the relative motion of the mounting member with respect to the second body in six degrees of freedom; and motion sensing means for detecting relative motion between the first body and mounting member and for controlling both isolating means, as necessary, to avoid transmission of vibrations between the first and second bodies.

Claim 68

A dual mode vibration isolator, comprising: a mounting member having a top, a bottom, and a periphery, the member providing a mechanical interface between a first and a second body; active isolating means connected between the first body and the top of the mounting member for isolating the first body from relative vibrations of the mounting member while permitting movement of the first body in six degrees of freedom relative to the mounting member; active mechanical isolating means dispersed around the periphery of the bottom of the mounting member and connecting the mounting member to the second body, the active mechanical means reducing transmission of vibrations from the second body to the mounting member while permitting the relative motion of the mounting member with respect to the second body in six degrees of freedom; and motion sensing means for detecting relative motion between the first body and mounting member and for controlling both isolating means, as necessary, to avoid transmission of vibrations between the first and second bodies.