Patent US151591A successfully refreshed from Google Patents.
Patent US4847476A successfully refreshed from Google Patents.
US4847476A
Expired / Lapsed
US
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Ion source device
Assignee: Hitachi Ltd
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Filing: 1986-12-17
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Granted: 1989-07-11
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Expires: 2006-12-17
Abstract
Abstract An ion source device comprises a plasma generating vessel for generating plasma therein, a plurality of magnets arranged on an outer periphery of the plasma generating vessel to establish a cusp field in the plasma generating vessel, means for supplying a power to generate the plasma in the plasma generating vessel, and an anode electrode arranged on an inner wall of the plasma generating vessel and adapted to be heated by electrons emitted from the plasma and maintain the heat.
Inventors
- 👤 Tadashi Sato
- 👤 Yasunori Ohno
- 👤 Tomoe Kurosawa
- 👤 Nobuya Sekimoto
- 👤 Yoshimi Hakamata
- 👤 Yukio Kurosawa
- 👤 Kunio Hirasawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:38
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J27/14
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
119 words
An ion source device comprising: a plasma generating vessel for generating plasma therein; a plurality of magnets arranged around an outer periphery of said plasma generating vessel to establish a plurality of magnetic cusp fields in said plasma generating vessel; means for supplying a power to generate the plasma in said plasma generating vessel; and a plurality of spaced anode electrodes spaced from one another, electrically conductively connected to said plasma generating vessel, and arranged on an inner surface of said plasma generating vessel at least at positions facing said plurality of magnets so that said spaced anode electrodes are heated by electrons emitted from the plasma to maintain the heat thereof at a temperature sufficient to prevent deposits.
Claim 2
Dependent Claim
119 words
An ion source device comprising: a plasma generating vessel for generating plasma therein; a plurality of magnets arranged around an outer periphery of said plasma generating vessel to establish a plurality of magnetic cusp fields in said plasma generating vessel; means for supplying a power to generate the plasma in said plasma generating vessel; and a plurality of spaced anode electrodes spaced from one another, electrically conductively connected to said plasma generating vessel, and arranged on an inner surface of said plasma generating vessel at least at positions facing said plurality of magnets so that said spaced anode electrodes are heated by electrons emitted from the plasma to maintain the heat thereof at a temperature sufficient to prevent deposits.
Claim 3
Dependent Claim
15 words
An ion source device according to claim 1 wherein said anode electrodes comprise linear areas.
Claim 4
Dependent Claim
15 words
An ion source device according to claim 2 wherein said linear areas are projecting wires.
Claim 5
Dependent Claim
14 words
An ion source device according to claim 2 wherein said linear areas are wires.
Claim 6
Dependent Claim
17 words
An ion source device according to claim 2 wherein said linear areas are made of magnetic material.
Claim 7
Dependent Claim
22 words
An ion source device according to claim 1 further comprising a member for supporting said anode electrode to said plasma generating vessel.
Claim 8
Dependent Claim
19 words
An ion source device according to claim 6 wherein said member is made of an essentially thermally insulative material.
Claim 9
Dependent Claim
18 words
An ion source device according to claim 6 wherein said member is made of an electrically conductive material.
Claim 10
Dependent Claim
17 words
An ion source device according to claim 6 wherein said member is made of a magnetic material.
Claim 11
Dependent Claim
20 words
An ion source device according to claim 1 wherein said anode electrodes are made of a relatively low conductivity material.
Claim 12
Dependent Claim
34 words
An ion source device according to claim 1 wherein said anode electrodes are made of a material which reacts with a material produced in the plasma to produce a compound which is readily vaporized.
Claim 13
Dependent Claim
13 words
An ion source device according to claim 11 wherein said material is molybdenum.
Claim 14
Dependent Claim
13 words
An ion source device according to claim 11 wherein said material is tungsten.
Claim 15
Dependent Claim
16 words
An ion source device according to claim 1 wherein the electrons are generated by electrodeless discharge.
Claim 16
Dependent Claim
20 words
An ion source device according to claim 1 further comprising a cathode for emitting electrons into said plasma generating vessel.
Claim 17
Dependent Claim
14 words
An ion source device according to claim 15 wherein said cathode is a filament.
Claim 18
Dependent Claim
27 words
An ion source device according to claim 1 further comprising a take-out electrode for taking out an ion beam from the plasma for irradiation to a workpiece.
Claim 19
Dependent Claim
17 words
An ion source device according to claim 1 wherein said plasma is irradiated directly to a workpiece.
Claim 20
Dependent Claim
151 words
An ion source device to comprising: a plasma generating vessel for generating plasma therein; a plurality of magnets arranged around an outer periphery of said plasma generating vessel to establish a plurality of magnetic cusp fields in said plasma generating vessel; means for supplying a power to generate the plasma in said plasma generating vessel; a plurality of spaced anode electrodes spaced from one another and arranged on an inner surface of said plasma generating vessel at least at positions facing said plurality of magnets so that said spaced anode electrodes are heated by electrons emitted from the plasma to maintain the heat thereof at a temperature sufficient to prevent deposits; and a member for supporting said anode electrodes to said plasma generating vessel, said member including an insulator for insulating said plasma generating vessel from said anode electrodes and a power supply for supplying a voltage to said anode electrodes.
Claim 21
Dependent Claim
151 words
An ion source device to comprising: a plasma generating vessel for generating plasma therein; a plurality of magnets arranged around an outer periphery of said plasma generating vessel to establish a plurality of magnetic cusp fields in said plasma generating vessel; means for supplying a power to generate the plasma in said plasma generating vessel; a plurality of spaced anode electrodes spaced from one another and arranged on an inner surface of said plasma generating vessel at least at positions facing said plurality of magnets so that said spaced anode electrodes are heated by electrons emitted from the plasma to maintain the heat thereof at a temperature sufficient to prevent deposits; and a member for supporting said anode electrodes to said plasma generating vessel, said member including an insulator for insulating said plasma generating vessel from said anode electrodes and a power supply for supplying a voltage to said anode electrodes.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-10 | 1993-01-09 | 1993-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-10 | 1997-01-09 | 1997-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-10 | 2001-01-09 | 2001-07-11 | $7700.00 | Window Closed / Lapsed |