US4846626A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer handling system
Assignee: ASML Holding NV
•
Filing: 1987-02-09
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Granted: 1989-07-11
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Expires: 2007-02-09
Abstract
Abstract Apparatus is set forth for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and Θ from a desired orientation is determined. Rotation of the wafer is stopped when its angular position reaches a desired orientation. The wafer chuck of the transport stage is then displaced to compensate for any deviation of the wafer in the X and Y directions from a desired rectilinear orientation. This permits the wafer stage to present the wafer to the exposure station of a lithographic system aligned in the X, Y and θ directions.
Inventors
- 👤 Orest Engelbrecht
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 16:06
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/57; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136; Y10S414/137; Y10S414/138
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
126 words
Apparatus for determining the position of a semiconductor wafer disc which comprises: a support member; a pair of leaf flexures capable of bending substantially along one axis only, each having a first and a second end, cantilevered from said support member by their first ends and lying in parallel planes substantially parallel to the plane of the wafer; wafer securing means carried by the second ends of said leaf flexures; means for selectively moving said wafer securing means to displace said wafer securing means perpendicular to the plane of the wafer resulting in said pair of leaf flexures being biased; means for rotating said wafer securing means; and means for sensing displacement of the edge of a wafer held by the securing means during rotation thereof.
Claim 2
Dependent Claim
126 words
Apparatus for determining the position of a semiconductor wafer disc which comprises: a support member; a pair of leaf flexures capable of bending substantially along one axis only, each having a first and a second end, cantilevered from said support member by their first ends and lying in parallel planes substantially parallel to the plane of the wafer; wafer securing means carried by the second ends of said leaf flexures; means for selectively moving said wafer securing means to displace said wafer securing means perpendicular to the plane of the wafer resulting in said pair of leaf flexures being biased; means for rotating said wafer securing means; and means for sensing displacement of the edge of a wafer held by the securing means during rotation thereof.
Claim 3
Dependent Claim
22 words
The apparatus of claim 1 wherein said wafer securing means comprises a spinner including a vacuum chamber engageable with a wafer disc.
Claim 4
Dependent Claim
48 words
The apparatus of claim 1 wherein said displacement sensing means comprises: means for illuminating the wafer edge from one side of a wafer held by the securing means; and means on the other side of said wafer responsive to light passing said edge to generate an output signal.
Claim 5
Dependent Claim
14 words
The apparatus of claim 3 wherein said illuminating means comprises a collimated light source.
Claim 6
Dependent Claim
18 words
The apparatus of claim 4 wherein said light responsive means comprises a linear array of light detecting elements.
Claim 7
Dependent Claim
26 words
The apparatus of claim 1 further comprising means associated with said displacement sensing means, for calculating the displacement of said wafer in X, Y, and θ.
Claim 8
Dependent Claim
42 words
The apparatus of claim 6 additionally comprising: a wafer-receiving chuck; means for pre-positioning said chuck in response to the calculated displacement of said wafer to compensate for such displacement; and means for transferring said wafer from the securing means to the chuck.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-10 | 1993-01-09 | 1993-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-10 | 1997-01-09 | 1997-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-10 | 2001-01-09 | 2001-07-11 | $7700.00 | Window Closed / Lapsed |