Patent US3193365A successfully refreshed from Google Patents.
Patent US1573665A successfully refreshed from Google Patents.
Patent DE961552C successfully refreshed from Google Patents.
US4425075A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer aligners
Assignee: Lam Research Corp
•
Filing: 1981-04-20
•
Granted: 1984-01-10
•
Expires: 2001-04-20
Abstract
Abstract An apparatus for prealigning a silicon wafer prior to transfer to a work station. The wafer is spun on an aligning platform by means of air jets emanating from holes disposed in the surface of the platform while simultaneously being stopped by means of a vacuum source communicating with the surface of the platform. Sensor means detect when the wafer is centered within a first predetermined tolerance to turn off the air jets and vacuum to stop the wafer. Control means responsive to the sensor means then center the wafer to within a second predetermined tolerance. The wafer is then transported to the work station for processing.
Inventors
- 👤 Peter W. Quinn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:01
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; H10P72/3602
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
274 words
An apparatus for aligning a wafer, comprising, a platform for receiving the wafer, a plurality of air jet orifices disposed through the surface of said platform oriented to spin the wafer, a source of air, first valve means for connecting said source of air to said orifices, at least two pulsating vacuum orifices disposed through the surface of said platform for periodically stopping the wafer during its spin, a source of vacuum, second valve means for connecting said source of vacuum to said vacuum orifices, control means causing said pulsating vacuum orifices to pulsate at a first rate and at a second rate faster than said first rate when the wafer reaches a predetermined position in its spin, solar cell means disposed in said platform providing signals representative of the position of the wafer on said platform in the α, y and θ directions, oscillator means connected to said solar cell means and with said second valve means for connecting and disconnecting said source of vacuum to said vacuum orifices at said first rate and at said second rate when said wafer reaches said predetermined position, first means included within said control means connected to said first and second valve means for disconnecting said source of air and said source of vacuum from said air jet orifices and vacuum orifices, respectively, when the wafer is positioned to within a first predetermined tolerance, mechanical means connected to said control means for moving the wafer in the α, Y and θ directions until the signals from said solar cell means equal a predetermined value indicative that the wafer is centered to within a second predetermined tolerance.
Claim 2
Independent Claim
274 words
An apparatus for aligning a wafer, comprising, a platform for receiving the wafer, a plurality of air jet orifices disposed through the surface of said platform oriented to spin the wafer, a source of air, first valve means for connecting said source of air to said orifices, at least two pulsating vacuum orifices disposed through the surface of said platform for periodically stopping the wafer during its spin, a source of vacuum, second valve means for connecting said source of vacuum to said vacuum orifices, control means causing said pulsating vacuum orifices to pulsate at a first rate and at a second rate faster than said first rate when the wafer reaches a predetermined position in its spin, solar cell means disposed in said platform providing signals representative of the position of the wafer on said platform in the α, y and θ directions, oscillator means connected to said solar cell means and with said second valve means for connecting and disconnecting said source of vacuum to said vacuum orifices at said first rate and at said second rate when said wafer reaches said predetermined position, first means included within said control means connected to said first and second valve means for disconnecting said source of air and said source of vacuum from said air jet orifices and vacuum orifices, respectively, when the wafer is positioned to within a first predetermined tolerance, mechanical means connected to said control means for moving the wafer in the α, Y and θ directions until the signals from said solar cell means equal a predetermined value indicative that the wafer is centered to within a second predetermined tolerance.
Claim 3
Dependent Claim
46 words
An apparatus according to claim 1 wherein said solar cell means comprises, first, second and third solar cells for sensing position of the wafer in the x and y directions, and fourth and fifth solar cells for sensing position of the main flat of the wafer.
Claim 4
Dependent Claim
66 words
An apparatus according to claim 2 further comprising, stepping motor means connected between said control means and said mechanical means for moving the wafer in the x, y and θ directions until the outputs from said first, second, third, fourth and fifth solar cells are equal to or less than a predetermined voltage indicative that the wafer has been positioned to within said second predetermined tolerance.
Claim 5
Dependent Claim
98 words
An apparatus according to claim 3 wherein said mechanical means comprises, at least three vacuum fingers disposed within slots in said platform, third valve means connected to said control for raising said vacuum fingers above the surface of said platform after the wafer has been positioned to within said first predetermined tolerance and lowering said vacuum fingers after the wafer has been positioned to within said second predetermined tolerance, fourth valve means connected to said control means for connecting vacuum to said vacuum fingers for securing the wafer thereto when said vacuum fingers are in the raised position.
References Cited (Backward Citations)
US3930684A
Cited
US3890508A
Cited
US3982627A
Cited
US4165132A
Cited
US4219110A
Cited
US4242038A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-09 | 1987-07-11 | 1988-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-09 | 1991-07-11 | 1992-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-09 | 1995-07-11 | 1996-01-10 | $7700.00 | Window Closed / Lapsed |