US4845373A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Automatic alignment apparatus having low and high resolution optics for coarse and fine adjusting
Assignee: KLA Corp
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Filing: 1986-08-25
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Granted: 1989-07-04
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Expires: 2006-08-25
Abstract
Abstract An optico-mechanical alignment apparatus having at least two optical paths, one with low resolution and one with high resolution providing an image to video image generator. The image forms a first data set that is compared to a second data set representative of the preferred alignment of an object to be aligned by a comparison means that can automatically move a stage mounting the object to be aligned in the X, Y and Z directions and rotate it in the X Y plane. The object is coarsely aligned with the low resolution optics and then finely aligned with the high resolution optics.
Inventors
- 👤 John Jamieson
- 👤 May M. Hsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:45
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
153 words
A alignment apparatus comprising. A stage for mounting an object to be aligned, said stage automatically translatable in the X, Y and Z directions and automatically rotatable in the X, Y plane; a first optical path having an illumination source and focusing means having low resolution forming a first optical image; a second optical path having an illumination source and focusing means having high resolution forming a second optical image; means of selecting one of said first or said second optical paths; optical detector means capable of converting the selected optical image into a first data of digital pixel elements; data base means having stored thereon second data representative of preferred alignment of the object to be aligned mounted on said stage; comparison means for comparing said first data and second data; and alignment correction means activated by said comparison means to move said movable stage, thereby aligning said object to be aligned.
Claim 2
Dependent Claim
153 words
A alignment apparatus comprising. A stage for mounting an object to be aligned, said stage automatically translatable in the X, Y and Z directions and automatically rotatable in the X, Y plane; a first optical path having an illumination source and focusing means having low resolution forming a first optical image; a second optical path having an illumination source and focusing means having high resolution forming a second optical image; means of selecting one of said first or said second optical paths; optical detector means capable of converting the selected optical image into a first data of digital pixel elements; data base means having stored thereon second data representative of preferred alignment of the object to be aligned mounted on said stage; comparison means for comparing said first data and second data; and alignment correction means activated by said comparison means to move said movable stage, thereby aligning said object to be aligned.
Claim 3
Dependent Claim
16 words
The apparatus of claim 1 wherein said object to be aligned is an patterned silicon wafer.
Claim 4
Dependent Claim
26 words
The apparatus of claim 2 wherein the patterned silicon wafer has a plurality of dice etched upon its surface and flat portion upon its peripheral edge.
Claim 5
Dependent Claim
37 words
The apparatus of claim 3 wherein said stage is movable a precise predetermined distance thereby providing at least two different areas scanned and at least two sets of first data for said first and second optical paths.
Claim 6
Dependent Claim
38 words
The alignment apparatus of claim 1 wherein said selection means selects at first optical path thereby coarsely aligning the object to be aligned and then selects said second optical path thereby finely aligning the object to be aligned.
Claim 7
Dependent Claim
65 words
The apparatus of claim 4 including a third optical path having an illumination source and focusing means having a low resolution forming a third image and a fourth optical path having an illumination source and focusing means having high resolution forming a fourth image, said first and said third focusing means being substantially identical and said second and said fourth focusing means being substantially identical.
Claim 8
Dependent Claim
50 words
The apparatus of claim 1 wherein said selection means selects said first optical path then said third optical path thereby coarsely aligning the object to be aligned, then said selector means selects said second optical path and then said fourth optical path thereby finely aligning the object to be aligned.
Claim 9
Dependent Claim
101 words
The alignment apparatus of claim 3 or claim 6 wherein said movable stage includes a mounting for said wafer having an outer circular ring member inclined inwardly over the edge of said wafer, said incline reflectively polished and an inner coaxial cone member having its inclined surface parallel to said inclined surface of said ring member having its outer surface, reflecting polished, said outer ring and said cone being of such orientation that the peripheral edge of said wafer is reflected up from said cone allowing determination of the location of said wafer flat with one optical image of the cone.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-03 | 1993-01-02 | 1993-07-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-03 | 1997-01-02 | 1997-07-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-03 | 2001-01-02 | 2001-07-04 | $7700.00 | Window Closed / Lapsed |