US4531060A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Positioning method
Assignee: Nikon Corp
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Filing: 1982-09-23
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Granted: 1985-07-23
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Expires: 2002-09-23
Abstract
Abstract A method for positioning an object with patterns being formed thereon, employs a first device for extracting first information relative to patterns in a first region on the object, a second device for extracting second information relative to patterns from a second region including the first region on the object, an operating circuit to calculate a degree of coincidence between the first information and the second information, and a detecting circuit for detecting a position of the first region in the second region, whereby the position of the object can be reproduced with high reproducibility in accordance with the position as detected.
Inventors
- 👤 Kyoichi Suwa
- 👤 Kazuo Kuramochi
- 👤 Kiwao Nakazawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 22:22
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
163 words
A method for positioning an object, on which predetermined patterns are formed and which is mounted on a stage, comprising the steps of: (a) converting said patterns into electrical signals corresponding to their positions on said object; (b) extracting from the electrical signals first information composed of electrical signals as distributed in correspondence to the patterns contained in a first region on said object which is mounted on said stage in advance; (c) extracting from the electrical signals second information composed of electrical signals distributed in correspondence to the patterns contained in a second region inclusive of said first region on said object which is newly mounted on said stage; (d) comparing said first and second information, and searching for an electrical signal in said second information having a distribution characteristic that is most similar to that of an electrical signal in said first information; and (e) detecting a position of the newly mounted object as a result of said comparing and searching.
Claim 2
Independent Claim
163 words
A method for positioning an object, on which predetermined patterns are formed and which is mounted on a stage, comprising the steps of: (a) converting said patterns into electrical signals corresponding to their positions on said object; (b) extracting from the electrical signals first information composed of electrical signals as distributed in correspondence to the patterns contained in a first region on said object which is mounted on said stage in advance; (c) extracting from the electrical signals second information composed of electrical signals distributed in correspondence to the patterns contained in a second region inclusive of said first region on said object which is newly mounted on said stage; (d) comparing said first and second information, and searching for an electrical signal in said second information having a distribution characteristic that is most similar to that of an electrical signal in said first information; and (e) detecting a position of the newly mounted object as a result of said comparing and searching.
Claim 3
Dependent Claim
60 words
The method as set forth in claim 1, wherein the step of extracting said first information includes the step of holding electrical signals in first memory having a capacity corresponding to said first region, and the step of extracting said second information includes the step of holding electrical signals in second memory having a capacity corresponding to said second region.
Claim 4
Dependent Claim
72 words
The method as set forth in claim 2, wherein said comparing and searching step is further defined as sequentially taking out an electrical signal from said second memory in a predetermined quantity the same as the capacity of said first memory and holding the electrical signal as taken out in third memory, and sequentially comparing the electrical signal held in said third memory with the electrical signal held in said first memory.
Claim 5
Dependent Claim
54 words
The method as set forth in claim 3, wherein each of said first memory and said third memory has a predetermined number of memory cells, and said sequentially comparing step is further defined as comparing said electrical signals of said first memory with said electrical signals of said third memory, at every corresponding cell.
Claim 6
Dependent Claim
52 words
The method as set forth in claim 4, wherein said sequentially comparing step is further defined as calculating a total sum of the absolute value of a difference between the electrical signal from each memory cell in said first memory and the electrical signal from each memory cell in said third memory.
Claim 7
Dependent Claim
60 words
The method as set forth in claim 2, wherein said comparing and searching step is further defined as sequentially taking out an electrical signal from said second memory in a quantity twice as large as the capacity of the first memory and sequentially comparing alternate portions of the taken out signal with the electrical signal held in said first memory.
Claim 8
Dependent Claim
34 words
A method as set forth in claim 1, wherein said converting step is further defined as scanning said patterns on said object by a light beam and receiving scattered light from the scanned patterns.
Claim 9
Independent Claim
188 words
A method for positioning an object, on which predetermined patterns composed of a plurality of rectangular units sectioned by boundary lines are formed, comprising the steps of: (a) providing an elongated light spot having a length sufficient to scan a corresponding dimension of said rectangular units, scanning said patterns on said object by said light beam spot, with the length of the spot substantially parallel with said boundary lines and with a scanning direction substantially orthogonal to said length, and producing electrical signals corresponding to scattered light intensity from the scanned patterns; (b) retaining first information composed of said electrical signals obtained by said scanning of a first region on said object which is mounted on said stage in advance; (c) retaining second information composed of said electrical signals obtained by said scanning of a second region inclusive of said first region on said object which is newly mounted on said stage; (d) comparing said first and second information, and searching for an electrical signal in said second information having a distribution characteristic that is most similar to that of an electrical signal in said first information; and
Claim 10
Independent Claim
188 words
A method for positioning an object, on which predetermined patterns composed of a plurality of rectangular units sectioned by boundary lines are formed, comprising the steps of: (a) providing an elongated light spot having a length sufficient to scan a corresponding dimension of said rectangular units, scanning said patterns on said object by said light beam spot, with the length of the spot substantially parallel with said boundary lines and with a scanning direction substantially orthogonal to said length, and producing electrical signals corresponding to scattered light intensity from the scanned patterns; (b) retaining first information composed of said electrical signals obtained by said scanning of a first region on said object which is mounted on said stage in advance; (c) retaining second information composed of said electrical signals obtained by said scanning of a second region inclusive of said first region on said object which is newly mounted on said stage; (d) comparing said first and second information, and searching for an electrical signal in said second information having a distribution characteristic that is most similar to that of an electrical signal in said first information; and
Claim 11
Dependent Claim
17 words
(e) detecting a position of the newly mounted object as a result of said comparing and searching.
Claim 12
Dependent Claim
17 words
(e) detecting a position of the newly mounted object as a result of said comparing and searching.
Claim 13
Dependent Claim
54 words
The method as set forth in claim 8, wherein the step of retaining said first information includes holding electrical signals in first memory having a capacity corresponding to said first region, and the step of retaining said second information includes holding electrical signals in second memory having a capacity corresponding to said second region.
Claim 14
Dependent Claim
72 words
The method as set forth in claim 9, wherein said comparing and searching step is further defined as sequentially taking out an electrical signal from said second memory in a predetermined quantity the same as the capacity of said first memory and holding the electrical signal as taken out in third memory, and sequentially comparing the electrical signal held in said third memory with the electrical signal held in said first memory.
Claim 15
Dependent Claim
53 words
The method as set forth in claim 10, wherein each of said first memory and said third memory has a predetermined number of memory cells, and said sequentially comparing step is defined as comparing said electrical signals of said first memory with said electrical signals of said third memory, at every corresponding cell.
Claim 16
Dependent Claim
52 words
The method as set forth in claim 11, wherein said sequentially comparing step is further defined as calculating a total sum of the absolute value of a difference between the electrical signal from each memory cell in said first memory and the electrical signal from each memory cell in said third memory.
Claim 17
Dependent Claim
60 words
The method as set forth in claim 9, wherein said comparing and searching step is further defined as sequentially taking out an electrical signal from said second memory in a quantity twice as large as the capacity of the first memory and sequentially comparing alternate portions of the taken out signal with the electrical signal held in said first memory.
Claim 18
Dependent Claim
54 words
The method as set forth in claim 8, wherein said scanning step is further defined as oscillating said light beam on said object at a predetermined cycle, and producing said electrical signals corresponding to positions to be irradiated by said light beam during movement of said oscillated light beam at a substantially constant speed.
Claim 19
Dependent Claim
42 words
The method as set forth in claim 8, wherein said scanning step is further defined as oscillating said light beam on said object at a predetermined cycle, and producing said electrical signals when said light beam is at the center of oscillation.
Claim 20
Independent Claim
214 words
A method for positioning an object, on which predetermined patterns composed of a plurality of rectangular units sectioned by boundary lines are formed, comprising the steps of: (a) providing an elongated light beam spot having a length substantially equal to the length of one side of said rectangular units, scanning said patterns on said object by said light beam spot, with the length of the spot substantially parallel with said boundary lines and with a scanning direction substantially orthogonal to said length, and producing electrical signals corresponding to scattered light intensity from the scanned patterns; (b) extracting from the electrical signals first information composed of electrical signals obtained by said scanning of a first region on said object which is mounted on said stage in advance; (c) extracting from the electrical signals second information composed of electrical signals obtained by said scanning of a second region inclusive of said first region on said object which is newly mounted on said stage; (d) comparing said first and second information, and searching for an electrical signal in said second information having a distribution characteristic that is most similar to that of an electrical signal in said first information; and (e) detecting a position of the newly mounted object as a result of said comparing and searching.
Claim 21
Independent Claim
214 words
A method for positioning an object, on which predetermined patterns composed of a plurality of rectangular units sectioned by boundary lines are formed, comprising the steps of: (a) providing an elongated light beam spot having a length substantially equal to the length of one side of said rectangular units, scanning said patterns on said object by said light beam spot, with the length of the spot substantially parallel with said boundary lines and with a scanning direction substantially orthogonal to said length, and producing electrical signals corresponding to scattered light intensity from the scanned patterns; (b) extracting from the electrical signals first information composed of electrical signals obtained by said scanning of a first region on said object which is mounted on said stage in advance; (c) extracting from the electrical signals second information composed of electrical signals obtained by said scanning of a second region inclusive of said first region on said object which is newly mounted on said stage; (d) comparing said first and second information, and searching for an electrical signal in said second information having a distribution characteristic that is most similar to that of an electrical signal in said first information; and (e) detecting a position of the newly mounted object as a result of said comparing and searching.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-07-22 | 1989-01-21 | 1989-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-07-22 | 1993-01-21 | 1993-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-07-22 | 1997-01-21 | 1997-07-23 | $7700.00 | Window Closed / Lapsed |