Patent US4842827A successfully refreshed from Google Patents.
US4842827A
Expired / Lapsed
US
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Vacuum vapor transport control
Assignee: Versum Materials US LLC
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Filing: 1986-12-30
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Granted: 1989-06-27
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Expires: 2006-12-30
Abstract
Abstract A vacuum vapor transport control system and method for controlling the rate of vapor flow from a reagent reservoir into a vacuum system through an orifice calibrated as to size or flow rate using a high purity fixed gas and vapor provided from multiple reservoirs or mixed vapor provided from a single reservoir.
Inventors
- 👤 Hans-Juergen Graf
- 👤 Robert E. Fletcher
- 👤 Peter T. Randtke
- 👤 Bruce E. Rhine
- 👤 J. R. Monkowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:16
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; B; B01; B01J; B01J3/00; B01J3/02; B01J4/00; B01J4/008; G; G05; G05D; G05D7/00; G05D7/01
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
117 words
A method of introducing reagent into a vacuum chemical vapor reaction chamber comprising the steps of: (a) controlling the temperature of the reagent in a reagent vapor generator to thereby generate reagent vapor at a pressure, which pressure is proportional to and a predetermined function of the vapor pressure of the reagent at the temperature at which the reagent is controlled; (b) flowing the reagent vapor from the reagent vapor generator through a critical orifice into the vacuum chemical reaction chamber; and (c) controllably varying the rate of flow into the vacuum chemical reaction chamber by controllably varying the temperature of the reagent in the reagent vapor generator thereby controllably varying the vapor pressure of the reagent.
Claim 2
Independent Claim
117 words
A method of introducing reagent into a vacuum chemical vapor reaction chamber comprising the steps of: (a) controlling the temperature of the reagent in a reagent vapor generator to thereby generate reagent vapor at a pressure, which pressure is proportional to and a predetermined function of the vapor pressure of the reagent at the temperature at which the reagent is controlled; (b) flowing the reagent vapor from the reagent vapor generator through a critical orifice into the vacuum chemical reaction chamber; and (c) controllably varying the rate of flow into the vacuum chemical reaction chamber by controllably varying the temperature of the reagent in the reagent vapor generator thereby controllably varying the vapor pressure of the reagent.
Claim 3
Dependent Claim
29 words
The method of claim 1 further comprising controlling the rate of flow of the reagent into the vacuum chemical reaction chamber by controlling the size of the critical orifice.
Claim 4
Dependent Claim
18 words
The method of claim 2 wherein the reagent vapor pressure is maintained at from 0.1 to 100 torr.
Claim 5
Dependent Claim
18 words
The method of claim 2 wherein the reagent vapor pressure is maintained at from 0.1 to 10 torr.
Claim 6
Independent Claim
204 words
A system for introducing reagent into a vacuum chemical reaction chamber comprising: (a) a vacuum chemical reaction chamber; (b) means for generating a vapor of a reagent to be introduced into said vacuum chemical reaction chamber; (c) an orifice having an inlet side and an outlet side, the inlet side of the orifice being in fluid communication with the means for generating a vapor of a reagent; (d) conduit means in fluid communication with the orifice for flowing reagent vapor through the orifice to the vacuum chemical reaction chamber; (e) means for maintaining the pressure on the inlet side of the orifice at a pressure of from about 0.1 to about 100 torr at least twice the pressure of the vacuum chemical reaction chamber, to thereby operate the orifice as a critical or sonic orifice wherein the flow rate through the orifice is independent of the pressure on either the inlet side or the outlet side of the orifice and therefor independent of pressure changes in the vacuum chemical reaction chamber, the flow through the orifice being solely a function of the vapor pressure of the reagent in the means for generating a vapor of a reagent and the size of the sonic orifice.
Claim 7
Independent Claim
204 words
A system for introducing reagent into a vacuum chemical reaction chamber comprising: (a) a vacuum chemical reaction chamber; (b) means for generating a vapor of a reagent to be introduced into said vacuum chemical reaction chamber; (c) an orifice having an inlet side and an outlet side, the inlet side of the orifice being in fluid communication with the means for generating a vapor of a reagent; (d) conduit means in fluid communication with the orifice for flowing reagent vapor through the orifice to the vacuum chemical reaction chamber; (e) means for maintaining the pressure on the inlet side of the orifice at a pressure of from about 0.1 to about 100 torr at least twice the pressure of the vacuum chemical reaction chamber, to thereby operate the orifice as a critical or sonic orifice wherein the flow rate through the orifice is independent of the pressure on either the inlet side or the outlet side of the orifice and therefor independent of pressure changes in the vacuum chemical reaction chamber, the flow through the orifice being solely a function of the vapor pressure of the reagent in the means for generating a vapor of a reagent and the size of the sonic orifice.
Claim 8
Dependent Claim
28 words
The system of claim 5 further comprising calibrating means comprising a source of inert fixed gas and means for regulating the mass flow of gas through the orifice.
Claim 9
Dependent Claim
50 words
The system of claim 5 wherein the means for generating reagent vapor comprises an evaporation chamber, a heater for the evaporation chamber, means for pumping liquid reagent of constant composition into the evaporation chamber, and means for passing vapor from the evaporation chamber to the inlet side of the orifice.
Claim 10
Dependent Claim
45 words
The system of claim 5 wherein the means for generating a reagent vapor comprises a quartz or borosilicate glass vessel defining an outer reservoir and two inner reservoirs in the outer reservoir, each reservoir having means defining a fill opening and a vapor removal opening.
Claim 11
Dependent Claim
39 words
The system of claim 8 wherein the means defining vapor removal opening is closed during shipment by a breakseal comprising a thin edge at the end of the vapor removal opening and a disk fused to said thin edge.
Claim 12
Dependent Claim
137 words
A vapor generating and vacuum chemical reaction means comprising a liquid reagent evaporation chamber, means for heating the liquid contents of the evaporation chamber, means for flowing liquid reagent of constant composition into the evaporation chamber, a vacuum chemical reaction chamber, and means for passing vapor of the same composition as the inflowing reagent from the evaporation chamber to the vacuum chemical reaction chamber, said vapor passing means comprising an orifice and conduit means connecting the evaporation chamber and the vacuum chemical reaction chamber in fluid communication with each other through the orifice, the vapor generating and vacuum chemical reactions means being so constructed that the rate of flow of vapor through the vapor passing means is solely a function of the vapor pressure of the reagent in the evaporation chamber and the size of the orifice.
Claim 13
Dependent Claim
137 words
A vapor generating and vacuum chemical reaction means comprising a liquid reagent evaporation chamber, means for heating the liquid contents of the evaporation chamber, means for flowing liquid reagent of constant composition into the evaporation chamber, a vacuum chemical reaction chamber, and means for passing vapor of the same composition as the inflowing reagent from the evaporation chamber to the vacuum chemical reaction chamber, said vapor passing means comprising an orifice and conduit means connecting the evaporation chamber and the vacuum chemical reaction chamber in fluid communication with each other through the orifice, the vapor generating and vacuum chemical reactions means being so constructed that the rate of flow of vapor through the vapor passing means is solely a function of the vapor pressure of the reagent in the evaporation chamber and the size of the orifice.
References Cited (Backward Citations)
US4444734A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-26 | 1992-12-26 | 1993-06-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-26 | 1996-12-26 | 1997-06-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-26 | 2000-12-26 | 2001-06-27 | $7700.00 | Window Closed / Lapsed |