US4841624A
Expired / Lapsed
US
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Method of producing a thin film magnetic head
Assignee: Hitachi Ltd
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Filing: 1988-01-11
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Granted: 1989-06-27
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Expires: 2008-01-11
Abstract
Abstract A method of producing a thin film magnetic head by successively depositing on a substrate a first magnetic material, a gap material, an electrically conductive material consisting of a coil, an insulating film, a second magnetic material and a protecting film, wherein the improvement comprises a step for forming a recessed portion in the insulating film at a portion corresponding to a gap portion on the air bearing surface side, the bottom surface of said recessed portion serving as an exposed portion on the upper surface of the gap material and the side surfaces of said recessed portion being tapered, a step for forming a recessed portion in the gap material by etching using the insulating film with the recessed portion as a mask and making the thickness thereof equal to the gap length, and a step for depositing a second magnetic material on the whole surface, so that the recessed portion formed in the gap material will have a rectangular shape with its one side being equal to a gap depth and its another side being equal to a track width. Unlike the conventional art, no thick photoresist film is used in a step for determining the gap depth and the track width, making it possible to obtain a thin film magnetic head having a small gap depth and a narrow track width maintaining high precision.
Inventors
- 👤 Eisei Togawa
- 👤 Saburo Suzuki
- 👤 Kenji Sugimoto
- 👤 Shunichiro Kuwatsuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:52
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/31; G11B5/3163; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/4902; Y10T29/49021; Y10T29/49032; Y10T29/49036; Y10T29/49043; Y10T29/49044; Y10T29/4906; Y10T29/49064
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
234 words
In a method of producing a thin film magnetic head having an air bearing surface by successively depositing on a substrate a first magnetic material, a gap material, an electrically conductive material consisting of a coil, in insulating film, a second magnetic material and a protecting film, the improvement which comprises: (i) a step following the depositing of said insulating film of forming a recessed portion in said insulating film in a region where there exists no conductive material on the air bearing surface side of the coil, said recessed portion having tapered side surfaces and a rectangular shape in cross section that is in parallel with said gap material layer, and of exposing the upper surface of said gap material to form a bottom surface corresponding to a position for forming the gap of said head; (ii) a step of removing said gap material by etching using said insulating film with said recessed portion as a mask, and making the thickness of the rectangular portion of said gap material corresponding to said recessed portion equal to a predetermined gap length; (iii) a step of removing unnecessary portions of said gap material and of said insulating film; and said step of depositing said second magnetic material being after said step (iii) has been finished and including depositing said second magnetic material onto the gap material to form a gap of the predetermined gap length.
Claim 2
Dependent Claim
234 words
In a method of producing a thin film magnetic head having an air bearing surface by successively depositing on a substrate a first magnetic material, a gap material, an electrically conductive material consisting of a coil, in insulating film, a second magnetic material and a protecting film, the improvement which comprises: (i) a step following the depositing of said insulating film of forming a recessed portion in said insulating film in a region where there exists no conductive material on the air bearing surface side of the coil, said recessed portion having tapered side surfaces and a rectangular shape in cross section that is in parallel with said gap material layer, and of exposing the upper surface of said gap material to form a bottom surface corresponding to a position for forming the gap of said head; (ii) a step of removing said gap material by etching using said insulating film with said recessed portion as a mask, and making the thickness of the rectangular portion of said gap material corresponding to said recessed portion equal to a predetermined gap length; (iii) a step of removing unnecessary portions of said gap material and of said insulating film; and said step of depositing said second magnetic material being after said step (iii) has been finished and including depositing said second magnetic material onto the gap material to form a gap of the predetermined gap length.
Claim 3
Dependent Claim
63 words
A method of producing a thin film magnetic head according to claim 1, wherein said step (ii) further includes removing thoroughly said gap material on the bottom of said recessed portion by etching using said insulating film having said recessed portion as a mask, and thereafter depositing in said recessed portion a gap material to a thickness equal to a predetermined gap length.
Claim 4
Dependent Claim
44 words
A method of producing a thin film magnetic head according to claim 1, wherein said removing of said gap material in said step (ii) includes forming side surfaces that are tapered at an angle nearly equal to the tapered angle of said insulating material.
Claim 5
Dependent Claim
57 words
A method of producing a thin film magnetic head according to claim 1, wherein said step (ii) includes forming a bottom surface whose side perpendicular to the air bearing surface has a length equal to a maximum gap depth and whose side in parallel with the air bearing surface has a length equal to the track width.
Claim 6
Dependent Claim
44 words
A method of producing a thin film magnetic head according to claim 4, further including after depositing said protection film, machining the head from the air bearing surface side until a predetermined gap depth is obtained, in order to form the air bearing surface.
Claim 7
Independent Claim
180 words
A method of making a thin film magnetic head having an air bearing surface on a substrate, comprising the steps of: forming a first magnetic film on the substrate; forming a gap film of gap material on the first magnetic film; forming a conductor coil on the gap film; forming an insulating film on said gap film covering said conductor coil; forming a recessed portion in said insulating film in a region remote from said conductor coil on the air bearing surface side of the magnetic head, including forming said recessed portion with a rectangular shape in cross section; removing the gap material underlying said recessed portion of said gap film by etching with said recessed portion of said insulating film used as a mask, and controlling the removing to leave a thickness of said gap film that corresponds to a predetermined gap length; forming a second magnetic film over said insulating layer and the gap film exposed by said removing to form a gap of the predetermined gap length; and forming a protecting film over said second magnetic film.
Claim 8
Independent Claim
180 words
A method of making a thin film magnetic head having an air bearing surface on a substrate, comprising the steps of: forming a first magnetic film on the substrate; forming a gap film of gap material on the first magnetic film; forming a conductor coil on the gap film; forming an insulating film on said gap film covering said conductor coil; forming a recessed portion in said insulating film in a region remote from said conductor coil on the air bearing surface side of the magnetic head, including forming said recessed portion with a rectangular shape in cross section; removing the gap material underlying said recessed portion of said gap film by etching with said recessed portion of said insulating film used as a mask, and controlling the removing to leave a thickness of said gap film that corresponds to a predetermined gap length; forming a second magnetic film over said insulating layer and the gap film exposed by said removing to form a gap of the predetermined gap length; and forming a protecting film over said second magnetic film.
Claim 9
Dependent Claim
41 words
The method according to claim 6, wherein said step of forming a recessed portion includes forming a side in parallel with the air bearing surface of the thin film head with a length equivalent to the track width of said head.
Claim 10
Dependent Claim
39 words
The method according to claim 6, further comprising the step of machining said head from the air bearing surface side a predetermined depth into said recessed portion corresponding with a desired gap depth to form the air bearing surface.
Claim 11
Dependent Claim
57 words
The method according to claim 6, further comprising said step of removing said gap film including removing entirely said gap film underlying said recessed portion using said insulating film as a mask, and thereafter depositing a gap material in said recessed portion to form a thickness of gap material that corresponds to a gap of predetermined length.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-26 | 1992-12-26 | 1993-06-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-26 | 1996-12-26 | 1997-06-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-26 | 2000-12-26 | 2001-06-27 | $7700.00 | Window Closed / Lapsed |