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US4841148A Expired / Lapsed US ⏱️ 0.0 years remaining

Variable temperature scanning tunneling microscope

Assignee: University of Illinois System
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Filing: 1988-03-21
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Granted: 1989-06-20
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Expires: 2008-03-21
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Abstract

Abstract A thermally compensated tube scanner scanning tunneling microscope utilizes two concentric piezoelectric tubes, one for scanning and one for coarse translation as well as fine adjustment of sample position while in tunneling range. There are no mechanical components such as springs, levers, gears, or stepper motors which are known to result in considerable vibration sensitivity and thermal drift. Consequently, the standard mode of atomic resolution operation for the device is without vibration isolation and with a thermal drift of less than 1 angstrom per hour.

Inventors

  • 👤 Joseph W. Lyding

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 13:42
CPC Classifications
G; G01; G01Q; G01Q10/00; G01Q10/04; G01Q10/02; G01Q60/00; G01Q60/10; G01Q60/16; G01Q70/00; G01Q70/02; G01Q70/04; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/871; Y10S977/872

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 191 words
A scanning, tunneling microscope comprising: a base; an inner and an outer piezoelectric tube concentrically connected to said base, said tubes having substantially the same length and the same composition; a tunneling probe having a tip, said probe being coaxially connected to an end of said inner piezoelectric tube opposite said base; a temperature compensating annular collar coaxially connected to an end of said outer piezoelectric tube opposite said base, said collar having a length and composition to compensate for thermal changes in the length of said probe; a sample holder tube axially connected to said collar; a pair of spaced rails extending longitudinally within said holder tube and attached thereto; a holder for holding a sample to be examined, said holder resting on and movable along the length of said rails; conductor means for applying selected voltages to said outer piezoelectric tube to cause inertial movement of said sample along said rails to a distance within tunneling range from said tip of said probe; and conductor means for applying selected voltages to said inner piezoelectric tube to cause said probe to scan a portion of a surface of said sample.
Claim 2
Dependent Claim 191 words
A scanning, tunneling microscope comprising: a base; an inner and an outer piezoelectric tube concentrically connected to said base, said tubes having substantially the same length and the same composition; a tunneling probe having a tip, said probe being coaxially connected to an end of said inner piezoelectric tube opposite said base; a temperature compensating annular collar coaxially connected to an end of said outer piezoelectric tube opposite said base, said collar having a length and composition to compensate for thermal changes in the length of said probe; a sample holder tube axially connected to said collar; a pair of spaced rails extending longitudinally within said holder tube and attached thereto; a holder for holding a sample to be examined, said holder resting on and movable along the length of said rails; conductor means for applying selected voltages to said outer piezoelectric tube to cause inertial movement of said sample along said rails to a distance within tunneling range from said tip of said probe; and conductor means for applying selected voltages to said inner piezoelectric tube to cause said probe to scan a portion of a surface of said sample.
Claim 3
Dependent Claim 23 words
A tunneling microscope in accordance with claim 1 wherein said sample holder is provided with spaced notches adapted to engage said spaced rails.
Claim 4
Dependent Claim 21 words
A tunneling microscope in accordance with claim 2 wherein one of said rails is at a greater elevation than the other.
Claim 5
Dependent Claim 25 words
A tunneling microscope in accordance with claim 2 wherein said sample holder tube, said sample holder, and said rails are all made of fused silica.
Claim 6
Dependent Claim 19 words
A tunneling microscope in accordance with claim 1 wherein said base and said annular collar are made of beryllium-copper.
Claim 7
Dependent Claim 34 words
A tunneling microscope in accordance with claim 1 further including a temperature control shroud comprising a removable thermally insulated hollow cylinder adapted to envelop said microscope, said cylinder being provided with temperature control means.

References Cited (Backward Citations)

US4343993A Cited
US4668865A Cited
US4665313A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-06-19 1992-12-19 1993-06-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-06-19 1996-12-19 1997-06-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-06-19 2000-12-19 2001-06-20 $7700.00 Window Closed / Lapsed

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