Patent US4839196A successfully refreshed from Google Patents.
US4839196A
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US
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Photochemical film-forming method
Assignee: Mitsubishi Electric Corp
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Filing: 1987-12-14
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Granted: 1989-06-13
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Expires: 2007-12-14
Abstract
Abstract An apparatus for photochemically forming a film on a substrate using a photo-induced chemical vapor deposition method comprises an optical lens through which a light beam is radiated to a reactive atmosphere gas to deposit and grow a film uniform in thickness on a substrate.
Inventors
- 👤 Hiromi Itoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:52
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/483
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
140 words
A method for forming a film of uniform thickness on a main surface of a substrate, comprising: (a) providing a substrate having a main surface in a reactive gas atmosphere; and (b) radiating a light beam through a light beam focusing means to the reactive gas atmosphere and along the length of but not intersecting the main surface of the substrate, the light beam photochemically dissociating the reactive gas to form a reaction product which is deposited on the main surface of the substrate, and the focal point of the focusing means being positioned adjacent the main surface of the substrate where the intensity of the light beam would otherwise be at a minimum owing to a decrease in intensity of the light beam along its direction of irradiation if the light beam were not radiated through any focusing means.
Claim 2
Independent Claim
140 words
A method for forming a film of uniform thickness on a main surface of a substrate, comprising: (a) providing a substrate having a main surface in a reactive gas atmosphere; and (b) radiating a light beam through a light beam focusing means to the reactive gas atmosphere and along the length of but not intersecting the main surface of the substrate, the light beam photochemically dissociating the reactive gas to form a reaction product which is deposited on the main surface of the substrate, and the focal point of the focusing means being positioned adjacent the main surface of the substrate where the intensity of the light beam would otherwise be at a minimum owing to a decrease in intensity of the light beam along its direction of irradiation if the light beam were not radiated through any focusing means.
Claim 3
Dependent Claim
17 words
A method as defined by claim 1, wherein the light beam focusing means comprises an optical lens.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-12 | 1992-12-12 | 1993-06-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-12 | 1996-12-12 | 1997-06-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-12 | 2000-12-12 | 2001-06-13 | $7700.00 | Window Closed / Lapsed |