Patent US4838289A successfully refreshed from Google Patents.
US4838289A
Expired / Lapsed
US
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Apparatus and method for edge cleaning
Assignee: Texas Instruments Inc
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Filing: 1988-04-25
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Granted: 1989-06-13
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Expires: 2008-04-25
Abstract
Abstract Apparatus and method for cleaning material at the outer edge of an object by applying a solvent for the material to a flat surface adjacent the edge and moving the solvent onto the edge by centrifugal force.
Inventors
- 👤 Rickie A. Kottman
- 👤 Robert E. Terrill
- 👤 Ann E. Wise
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:50
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/162; G03F7/26; G03F7/30; G03F7/3021; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
104 words
Apparatus for removing a deposit of material from an outer convex edge of an object having a substantially flat surface adjacent said edge, comprising: (a) a nozzle with an outlet end located in proximity to said surface near said edge; (b) a solvent at said outlet end of said nozzle in the form of a convex shaped reservoir created by surface tension forces of said solvent sufficiently close to said substantially flat surface to enable solvent transfer thereto; and (c) a chuck for engaging and spinning said object to bring the transferred solvent into contact with said edge to thereby remove said material deposit.
Claim 2
Dependent Claim
104 words
Apparatus for removing a deposit of material from an outer convex edge of an object having a substantially flat surface adjacent said edge, comprising: (a) a nozzle with an outlet end located in proximity to said surface near said edge; (b) a solvent at said outlet end of said nozzle in the form of a convex shaped reservoir created by surface tension forces of said solvent sufficiently close to said substantially flat surface to enable solvent transfer thereto; and (c) a chuck for engaging and spinning said object to bring the transferred solvent into contact with said edge to thereby remove said material deposit.
Claim 3
Dependent Claim
14 words
The apparatus of claim 1, wherein said substantially flat surface is a bottom surface.
Claim 4
Dependent Claim
21 words
The apparatus of claim 1, further comprising: means for supplying said solvent under pressure sufficient to form said convex shaped reservoir.
Claim 5
Dependent Claim
29 words
The apparatus of claim 3, wherein said pressure is sufficient to supply said solvent to said convex shaped reservoir at a rate of approximately 100 cubic centimeters per minute.
Claim 6
Dependent Claim
17 words
The apparatus of claim 1, wherein said outlet end is located approximately 0.010 inches from said surface.
Claim 7
Dependent Claim
14 words
The apparatus of claim 1, wherein said nozzle includes a slot for solvent delivery.
Claim 8
Dependent Claim
22 words
The apparatus of claim 6, further comprising: a spillway adjacent said slot to prevent excess fluid from building up above said slot.
Claim 9
Dependent Claim
13 words
The apparatus of claim 1, wherein said object is a monocrystalline semiconductor wafer.
Claim 10
Dependent Claim
15 words
The apparatus of claim 1, wherein said material removed from said object is a resist.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-12 | 1992-12-12 | 1993-06-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-12 | 1996-12-12 | 1997-06-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-12 | 2000-12-12 | 2001-06-13 | $7700.00 | Window Closed / Lapsed |