US4835086A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polysulfone barrier layer for bi-level photoresists
Assignee: Hoechst Celanese Chemical Co
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Filing: 1988-02-12
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Granted: 1989-05-30
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Expires: 2008-02-12
Abstract
Abstract A photosensitive article which comprises a substrate, a first light sensitive layer on the substrate, a polysulfone layer and a second light sensitive layer. The first light sensitive layer preferably comprises a depolymerizable polymethyl methacrylate polymer and the second light sensitive layer preferably comprises on o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin.
Inventors
- 👤 Sangya Jain
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
225 words
A photoresist article which comprises (i) a substrate; and (ii) a radiation sensitive layer on said substrate, said radiation sensitive layer comprising a composition selected from the group consisting of (a) a radiation depolymerizable polymer; and (b) a photosensitive o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin wherein said diazide is present in sufficient amount to render said radiation sensitive layer light sensitive and to provide image differentiation upon imagewise exposure and development of the layer and said resin is present in sufficient amount to bind said layer into a uniform film; and (iii) a transparent polysulfone polymer layer directly on said radiation sensitive layer, said polysulfone polymer having the formula: ##STR3## wherein n ranges from about 50 and 80; and (iv) a light sensitive layer on said polysulfone layer, said light sensitive layer comprising a photosensitive o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin wherein said diazide is present in sufficient amount to render said light sensitive layer light sensitive and to provide image differentiation upon imagewise exposure and development of the light sensitive layer and said resin is present in sufficient amount to bind said light sensitive layer into a uniform film; said light sensitive layer being sensitive to a portion of the spectrum at which said radiation sensitive layer is not sensitive.
Claim 2
Dependent Claim
225 words
A photoresist article which comprises (i) a substrate; and (ii) a radiation sensitive layer on said substrate, said radiation sensitive layer comprising a composition selected from the group consisting of (a) a radiation depolymerizable polymer; and (b) a photosensitive o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin wherein said diazide is present in sufficient amount to render said radiation sensitive layer light sensitive and to provide image differentiation upon imagewise exposure and development of the layer and said resin is present in sufficient amount to bind said layer into a uniform film; and (iii) a transparent polysulfone polymer layer directly on said radiation sensitive layer, said polysulfone polymer having the formula: ##STR3## wherein n ranges from about 50 and 80; and (iv) a light sensitive layer on said polysulfone layer, said light sensitive layer comprising a photosensitive o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin wherein said diazide is present in sufficient amount to render said light sensitive layer light sensitive and to provide image differentiation upon imagewise exposure and development of the light sensitive layer and said resin is present in sufficient amount to bind said light sensitive layer into a uniform film; said light sensitive layer being sensitive to a portion of the spectrum at which said radiation sensitive layer is not sensitive.
Claim 3
Dependent Claim
43 words
The article of claim 1 wherein said substrate comprises one or more components selected from the group consisting of silicon, aluminum, polymeric resins, silicon dioxide, doped silicon dioxide, silicon nitride, tantalum, copper, polysilicon, ceramics and aluminum/copper mixtures, gallium arsenide and Group III/V compounds.
Claim 4
Dependent Claim
27 words
The article of claim 1 wherein the radiation sensitive layer comprises a radiation depolymerizable polymer which is a C 1 to C 4 alkyl methacrylate containing material.
Claim 5
Dependent Claim
13 words
The article of claim 1 wherein the radiation depolymerizable polymer is polymethyl methacrylate.
Claim 6
Dependent Claim
25 words
The article of claim 1 wherein the radiation sensitive layer comprises and o-quinone diazide in admixture with an aqueous alkali soluble, water insoluble binder resin.
Claim 7
Dependent Claim
34 words
The article of claim 5 wherein the radiation sensitive layer comprises a cresol formaldehyde novolak resin, and wherein said diazide is a naphthoquinone-(1,2)-diazide-4 or 5-sulfonyl chloride condensed with a hydroxy benzophenone or hydroxy alkylphenone.
Claim 8
Dependent Claim
22 words
The article of claim 1 wherein said polysulfone has a molecular weight in the range of from about 9,000 to about 13,000.
Claim 9
Dependent Claim
28 words
The article of claim 1 wherein the light sensitive layer comprises a cresol formaldehyde novolak resin, said diazide is a naphthoquinone-(1,2)-diazide-4 or 5-sulfonyl chloride condensed with a trihydroxybenzophenone.
Claim 10
Dependent Claim
33 words
The article of claim 1 wherein said light sensitive layer further comprises one or more additives selected from the group consisting of colorants, anti-striation agents, plasticizers, adhesion promoters, speed enhancers, solvents and surfactants.
Claim 11
Independent Claim
339 words
A method for producing an image which comprises forming a photoresist article which comprises (i) a substrate; and (ii) a radiation sensitive layer directly on said substrate, said radiation sensitive layer comprising a composition selected from the group consisting of (a) a radiation depolymerizable polymer; and (b) a photosensitive o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin wherein said diazide is present in sufficient amount to render said radiation sensitive layer light sensitive and to provide image differentiation upon imagewise exposure and development of the radiation sensitive layer and said resin is present in sufficient amount to bind said radiation sensitive layer into a uniform film; and (iii) a transparent polysulfone polymer layer directly on said radiation sensitive layer, said polysulfone polymer having the formula: ##STR4## wherein n ranges from about 50 and 80; and (iv) a light sensitive layer directly on said polysulfone layer, said light sensitive layer comprising a photosensitive o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin wherein said diazide is present in sufficient amount to render said light sensitive layer light sensitive and to provide image differentiation upon imagewise exposure and development of the light sensitive layer and said resin is present in sufficient amount to bind said light sensitive layer into a uniform film; said light sensitive layer being sensitive to a portion of the spectrum at which said radiation sensitive layer is not sensitive; and then imagewise exposing the light sensitive layer to imaging energy, removing the non-image areas of said light sensitive layer with an aqueous alkaline developer, removing only the portions of the polysulfone layer underlying said non-image areas with a solvent which does not remove substantial portions of the radiation or light sensitive layers, imagewise exposing the radiation sensitive layer to sufficient imaging energy to which the image areas of the light sensitive layer are substantially non-transmitting, and then removing the image areas of the light sensitive layer, the polysulfone layer and the non-image portions of the radiation sensitive layer.
Claim 12
Independent Claim
339 words
A method for producing an image which comprises forming a photoresist article which comprises (i) a substrate; and (ii) a radiation sensitive layer directly on said substrate, said radiation sensitive layer comprising a composition selected from the group consisting of (a) a radiation depolymerizable polymer; and (b) a photosensitive o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin wherein said diazide is present in sufficient amount to render said radiation sensitive layer light sensitive and to provide image differentiation upon imagewise exposure and development of the radiation sensitive layer and said resin is present in sufficient amount to bind said radiation sensitive layer into a uniform film; and (iii) a transparent polysulfone polymer layer directly on said radiation sensitive layer, said polysulfone polymer having the formula: ##STR4## wherein n ranges from about 50 and 80; and (iv) a light sensitive layer directly on said polysulfone layer, said light sensitive layer comprising a photosensitive o-quinone diazide in admixture with a water insoluble, aqueous alkaline soluble binder resin wherein said diazide is present in sufficient amount to render said light sensitive layer light sensitive and to provide image differentiation upon imagewise exposure and development of the light sensitive layer and said resin is present in sufficient amount to bind said light sensitive layer into a uniform film; said light sensitive layer being sensitive to a portion of the spectrum at which said radiation sensitive layer is not sensitive; and then imagewise exposing the light sensitive layer to imaging energy, removing the non-image areas of said light sensitive layer with an aqueous alkaline developer, removing only the portions of the polysulfone layer underlying said non-image areas with a solvent which does not remove substantial portions of the radiation or light sensitive layers, imagewise exposing the radiation sensitive layer to sufficient imaging energy to which the image areas of the light sensitive layer are substantially non-transmitting, and then removing the image areas of the light sensitive layer, the polysulfone layer and the non-image portions of the radiation sensitive layer.
Claim 13
Dependent Claim
10 words
The method of claim 10 wherein said solvent comprises chlorobenzene.
Claim 14
Dependent Claim
22 words
The method of claim 10 wherein the exposure of the radiation sensitive layer is conducted with x-ray, electron beam or ultraviolet radiation.
Claim 15
Dependent Claim
21 words
The method of claim 12 wherein said ultraviolet radiation is at a wavelength of from about 220 to about 260 nm.
Claim 16
Dependent Claim
43 words
The method of claim 10 wherein said substrate comprises one or more components selected from the group consisting of silicon, aluminum, polymeric resins, silicon dioxide, doped silicon dioxide, silicon nitride, tantalum, copper, polysilicon, ceramics and aluminum/copper mixtures, gallium arsenide and Group III/V compounds.
Claim 17
Dependent Claim
27 words
The method of claim 10 wherein the radiation sensitive layer comprises a radiation depolymerizable polymer which is a C 1 to C 4 alkyl methacrylate containing material.
Claim 18
Dependent Claim
13 words
The method of claim 10 wherein the radiation depolymerizable polymer is polymethyl methacrylate.
Claim 19
Dependent Claim
25 words
The method of claim 10 wherein the radiation sensitive layer comprises an o-quinone diazide in admixture with an aqueous alkali soluble, water insoluble binder resin.
Claim 20
Dependent Claim
34 words
The method of claim 17 wherein the radiation sensitive layer comprises a cresol formaldehyde novolak resin, and wherein said diazide is a naphthoquinine-(1,2)-diazide-4 or 5-sulfonyl chloride condensed with a hydroxy benzophenone or hydroxy alkylphenone.
Claim 21
Dependent Claim
22 words
The method of claim 10 wherein said polysulfone has a molecular weight in the range of from about 9,000 to about 13,000.
Claim 22
Dependent Claim
28 words
The method of claim 10 wherein the light sensitive layer comprises a cresol formaldehyde novolak resin, said diazide is a naphthoquinone-(1,2)-diazide-4 or 5-sulfonyl chloride condensed with a trihydroxybenzophenone.
Claim 23
Dependent Claim
33 words
The method of claim 10 wherein said light sensitive layer further comprises one or more additives selected from the group consisting of colorants, anti-striation agents, plasticizers, adhesion promoters, speed enhancers, solvents and surfactants.
References Cited (Backward Citations)
US4217407A
Cited
US4011351A
Cited
US4024305A
Cited
US4087569A
Cited
US4211834A
Cited
US4156745A
Cited
US4289845A
Cited
US4272561A
Cited
EP0031463A2
Cited
US4396458A
Cited
US4599243A
Cited
US4456675A
Cited
US4745042A
Cited
US4519872A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-29 | 1992-11-28 | 1993-05-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-29 | 1996-11-28 | 1997-05-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-29 | 2000-11-28 | 2001-05-30 | $7700.00 | Window Closed / Lapsed |