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US4834796A
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Electroless copper plating solution and process for electrolessly plating copper
Assignee: Denso Corp
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Filing: 1987-11-05
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Granted: 1989-05-30
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Expires: 2007-11-05
Abstract
Abstract A practically fast electroless copper deposition is obtained by using a trialkanolmonoamine as a complexing agent for copper ion and as an accelerator, by adding it in an excess amount of 1.2 to 30 times the mole concentration of the copper ion. An optimum increased deposition rate of 100 μm/hr is obtained even if additives such as potassium ferrocyanide, 2,2'-bipyridyl, polyethylenegrycol and an anionic surfactant are added.
Inventors
- 👤 Koji Kondo
- 👤 Katuhiko Murakawa
- 👤 Kaoru Nomoto
- 👤 Futoshi Ishikawa
- 👤 Nobumasa Isida
- 👤 Junji Isikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 14:57
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/16; C23C18/31; C23C18/38; C23C18/40
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
94 words
An electroless copper plating solution comprising a copper salt, a reducing agent, a pH-adjustor and trialanolmonoamine or a salt thereof in an excess amount such that it acts as a complexing agent for copper ion and as an accelerator, said trialkanolmonoamine or a salt thereof being present in an amount such that a copper deposition rate is substantially increased in comparison with a copper deposition rate obtained when the trialkanolmonoamine or a salt thereof is present in an amount sufficient to completely complex the copper ion but not enough to act as an accelerator.
Claim 2
Dependent Claim
94 words
An electroless copper plating solution comprising a copper salt, a reducing agent, a pH-adjustor and trialanolmonoamine or a salt thereof in an excess amount such that it acts as a complexing agent for copper ion and as an accelerator, said trialkanolmonoamine or a salt thereof being present in an amount such that a copper deposition rate is substantially increased in comparison with a copper deposition rate obtained when the trialkanolmonoamine or a salt thereof is present in an amount sufficient to completely complex the copper ion but not enough to act as an accelerator.
Claim 3
Dependent Claim
29 words
A solution according to claim 1, wherein said trialkanolmonoamine is triethanolamine and is present in an amount of 1.2 to 30 times the mole concentration of the copper ion.
Claim 4
Dependent Claim
26 words
A solution according to claim 2, wherein said triethanolamine is present in an amount of 1.3 to 20 times the mole concentration of the copper ion.
Claim 5
Dependent Claim
26 words
A solution according to claim 3, wherein said triethanolamine is present in an amount of 1.5 to 20 times the mole concentration of the copper ion.
Claim 6
Dependent Claim
17 words
A solution according to claim 1, further containing an additive for improving properties of a deposited layer.
Claim 7
Dependent Claim
27 words
A solution according to claim 5, wherein said additive is selected from a group consisting of potassium ferrocyanide, 2,2-dipyridyl, polyetyleneglycol, an anionic surfactant and a mixture thereof.
Claim 8
Dependent Claim
13 words
A solution according to claim 6, wherein said anionic surfactant is an alkylsulphonate.
Claim 9
Dependent Claim
29 words
A solution according to claim 1, wherein said trialkanolmonoamine is triisopropanolamine and is present in an amount of 1.2 to 30 times the mole concentration of the copper ion.
Claim 10
Dependent Claim
26 words
A solution according to claim 8, wherein said triisopropanolamine is present in an amount of 1.2 to 10 times the mole concentration of the copper ion.
Claim 11
Dependent Claim
26 words
A solution according to claim 9, wherein said triisopropanolamine is present in an amount of 1.2 to 5 times the mole concentration of the copper ion.
Claim 12
Dependent Claim
30 words
A solution according to claim 1, having a pH of 12.0 to 13.4, a temperature of 0° C. to 80° C., and a oxygen concentration of 0.5 to 5.4 ppm.
Claim 13
Dependent Claim
31 words
A solution according to claim 11, having a pH from 12.4 to 13.0, and a temperature from 0° C. to 70° C., said oxygen concentration being from 1.5 to 4.0 ppm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-29 | 1992-11-28 | 1993-05-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-29 | 1996-11-28 | 1997-05-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-29 | 2000-11-28 | 2001-05-30 | $7700.00 | Window Closed / Lapsed |