Patent US4833899A successfully refreshed from Google Patents.
US4833899A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cryopump with vibration isolation
Assignee: Azenta Inc
•
Filing: 1986-11-14
•
Granted: 1989-05-30
•
Expires: 2006-11-14
Abstract
Abstract A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows covered with vibration damping material and separated by an intermediate mass. The damping material fills the spaces between corrugations of the bellows and is bonded to the bellows.
Inventors
- 👤 Halil Tugal
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 05:56
CPC Classifications
F; F04; F04B; F04B37/00; F04B37/06; F04B37/08; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 59
Claim 1
Independent Claim
56 words
A vibration isolator comprising: a cylindrical bellows having circumferential corrugations; and vibration damping material, the dynamic shear modulus of which is substantially less than the dynamic shear modulus of the material of the bellows, filling spaces between the corrugations of the bellows to prevent collapse of the bellows and to dampen vibrations transmitted through the bellows.
Claim 2
Dependent Claim
56 words
A vibration isolator comprising: a cylindrical bellows having circumferential corrugations; and vibration damping material, the dynamic shear modulus of which is substantially less than the dynamic shear modulus of the material of the bellows, filling spaces between the corrugations of the bellows to prevent collapse of the bellows and to dampen vibrations transmitted through the bellows.
Claim 3
Dependent Claim
28 words
A vibration isolator as claimed in claim 1 further comprising a second bellows isolator joined in series with the first isolator and separated by an intermediate weighted mass.
Claim 4
Dependent Claim
16 words
A vibration isolator as claimed in claim 2 wherein the intermediate weighted mass comprises adjoining flanges.
Claim 5
Dependent Claim
16 words
A vibration isolator as claimed in claim 1 wherein the bellows is a formed convoluted bellows.
Claim 6
Dependent Claim
15 words
A vibration isolator as claimed in claim 1 wherein the bellows is a welded bellows.
Claim 7
Dependent Claim
23 words
A vibration isolator as claimed in claim 1 wherein the vibration damping material is secured to the bellows continuously along the interface therebetween.
Claim 8
Dependent Claim
47 words
A vibration isolator as claimed in claim 1 wherein the dynamic shear modulus of the damping material is less than 10 7 dynes/cm 2 and the dynamic shear modulus of the material of the bellows is at least in the order of 10 11 dynes/cm 2 .
Claim 9
Dependent Claim
17 words
A vibration isolator as claimed in claim 7 wherein the bellows is formed of gas impermeable metal.
Claim 10
Dependent Claim
66 words
A vibration isolator for surrounding a volume and limiting the transmission of vibration across the volume comprising: a cylindrical bellows surrounding the volume, the cylindrical bellows having circumferential corrugations spaced axially along an axis of the bellows, the corrugations acting as an axial spring in response to axial vibrations; and damping material secured to the corrugations of the bellows for absorbing vibrations transmitted along the bellows.
Claim 11
Dependent Claim
66 words
A vibration isolator for surrounding a volume and limiting the transmission of vibration across the volume comprising: a cylindrical bellows surrounding the volume, the cylindrical bellows having circumferential corrugations spaced axially along an axis of the bellows, the corrugations acting as an axial spring in response to axial vibrations; and damping material secured to the corrugations of the bellows for absorbing vibrations transmitted along the bellows.
Claim 12
Dependent Claim
31 words
A vibration isolator as claimed in claim 9 wherein the damping material surrounds the bellows such that the corrugations are filled with the damping material to prevent collapse of the bellows.
Claim 13
Dependent Claim
28 words
A vibration isolator as claimed in claim 9 further comprising a second bellows isolator joined in series with the first isolator and separated by an intermediate weighted mass.
Claim 14
Dependent Claim
16 words
A vibration isolator as claimed in claim 11 wherein the intermediate weighted mass comprises adjoining flanges.
Claim 15
Dependent Claim
36 words
A vibration isolator comprising: a pair of bellows positioned end-to-end; an intermediate mass joining the bellows; and, damping material secured to corrugations of at least one of the bellows for absorbing vibrations transmitted along the bellows.
Claim 16
Dependent Claim
36 words
A vibration isolator comprising: a pair of bellows positioned end-to-end; an intermediate mass joining the bellows; and, damping material secured to corrugations of at least one of the bellows for absorbing vibrations transmitted along the bellows.
Claim 17
Dependent Claim
16 words
A vibration isolator as claimed in claim 13 wherein the intermediate weighted mass comprises adjoining flanges.
Claim 18
Dependent Claim
70 words
A vibration isolator surrounding a volume for limiting the transmission of vibration across the volume comprising: a cylindrical bellows assembly surrounding the volume, the assembly having circumferential corrugations spaced along an axis of the assembly, the corrugations acting as an axial spring in response to axial vibrations; and an intermediate weighted mass fixed to the cylindrical bellows assembly between opposite ends thereof for attenuating vibration traveling along the bellows assembly.
Claim 19
Dependent Claim
70 words
A vibration isolator surrounding a volume for limiting the transmission of vibration across the volume comprising: a cylindrical bellows assembly surrounding the volume, the assembly having circumferential corrugations spaced along an axis of the assembly, the corrugations acting as an axial spring in response to axial vibrations; and an intermediate weighted mass fixed to the cylindrical bellows assembly between opposite ends thereof for attenuating vibration traveling along the bellows assembly.
Claim 20
Dependent Claim
21 words
A vibration isolator as claimed in claim 15 wherein the intermediate weighted mass joins two bellows of the cylindrical bellows assembly.
Claim 21
Dependent Claim
18 words
A vibration isolator as claimed in claim 16 wherein the intermediate weighted mass is two flanges coupled together.
Claim 22
Dependent Claim
21 words
A vibration isolator as claimed in claim 15 further comprising a damping material surrounding the bellows and the intermediate weighted mass.
Claim 23
Dependent Claim
18 words
A vibration isolator as claimed in claim 18 wherein the damping material fills the corrugations of the bellows.
Claim 24
Dependent Claim
76 words
A cryopump adapted to be mounted to a chamber to be evacuated, the cryopump comprising cryopanels, a refrigerator for cooling the cryopanels to cryogenic temperatures at which gases condense on the cryopanels, and a vibration isolator between the refrigerator and the chamber, the vibration isolator comprising a first and second bellows separated by a weighted intermediate mass for mechanically isolating the refrigerator from the chamber while maintaining a gas seal between the chamber and the refrigerator.
Claim 25
Dependent Claim
76 words
A cryopump adapted to be mounted to a chamber to be evacuated, the cryopump comprising cryopanels, a refrigerator for cooling the cryopanels to cryogenic temperatures at which gases condense on the cryopanels, and a vibration isolator between the refrigerator and the chamber, the vibration isolator comprising a first and second bellows separated by a weighted intermediate mass for mechanically isolating the refrigerator from the chamber while maintaining a gas seal between the chamber and the refrigerator.
Claim 26
Dependent Claim
31 words
A cryopump as claimed in claim 20 further comprising vibration damping material which fills spaces between corrugations of at least one of the bellows to damp vibration transmitted through the bellows.
Claim 27
Dependent Claim
18 words
A cryopump as claimed in claim 20 wherein the isolator forms a vacuum vessel housing about the cryopanel.
Claim 28
Dependent Claim
31 words
A cryopump as claimed in claim 20 wherein the first bellows forms a vacuum housing about the cryopanels and the second bellows is mounted between the refrigerator and the vacuum housing.
Claim 29
Dependent Claim
16 words
A cryopump as claimed in claim 20 wherein the bellows is formed of gas impermeable metal.
Claim 30
Dependent Claim
15 words
A cryopump as claimed in claim 20 wherein the bellows is a formed convoluted bellows.
Claim 31
Dependent Claim
14 words
A cryopump as claimed in claim 20 wherein the bellows is a welded bellows.
Claim 32
Dependent Claim
22 words
A cryopump as claimed in claim 21 wherein the vibration damping material is bonded to the bellows continuously along the interface therebetween.
Claim 33
Dependent Claim
95 words
A cryopump adapted to be mounted to a chamber to be evacuated, the cryopump comprising cryopanels, a refrigerator for cooling the cryopanels to cryogenic temperatures at which gases condense on the cryopanels and a vibration isolator between the refrigerator and the chamber, the vibration isolator comprising a bellows for mechanically isolating the refrigerator from the chamber while maintaining a gas seal between the chamber and refrigerator, the bellows being covered with vibration damping material which fills spaces between corrugations of the bellows to prevent collapse of the bellows and damp vibration transmitted through the bellows.
Claim 34
Dependent Claim
95 words
A cryopump adapted to be mounted to a chamber to be evacuated, the cryopump comprising cryopanels, a refrigerator for cooling the cryopanels to cryogenic temperatures at which gases condense on the cryopanels and a vibration isolator between the refrigerator and the chamber, the vibration isolator comprising a bellows for mechanically isolating the refrigerator from the chamber while maintaining a gas seal between the chamber and refrigerator, the bellows being covered with vibration damping material which fills spaces between corrugations of the bellows to prevent collapse of the bellows and damp vibration transmitted through the bellows.
Claim 35
Dependent Claim
17 words
A cryopump as claimed in claim 28 wherein the bellows forms a vacuum vessel surrounding the cryopanels.
Claim 36
Dependent Claim
48 words
A cryopump as claimed in claim 29 further comprising a second bellows of lesser diameter than the bellows forming the vacuum vessel surrounding a portion of the refrigerator and coupled between the bellows forming the vacuum vessel and the refrigerator, the second bellows being free of damping material.
Claim 37
Dependent Claim
16 words
A cryopump as claimed in claim 30 further comprising a weighted mass coupled between the bellows.
Claim 38
Dependent Claim
28 words
A cryopump as claimed in claim 29 further comprising a second bellows vibration isolator joined in series with the first bellows and separated by a weighted intermediate mass.
Claim 39
Dependent Claim
30 words
A cryopump as claimed in claim 32 wherein the second bellows is mounted between the vacuum vessel and the refrigerator and is of a lesser diameter than the first bellows.
Claim 40
Dependent Claim
46 words
A cryopump as claimed in claim 28 wherein the dynamic shear modulus of the damping material is less than 10 7 dynes/cm 2 and the dynamic shear modulus of the material of the bellows is at least in the order of 10 11 dynes/cm 2 .
Claim 41
Dependent Claim
16 words
A cryopump as claimed in claim 34 wherein the bellows is formed of gas impermeable metal.
Claim 42
Dependent Claim
27 words
A cryopump as claimed in claim 28 in which the bellows extends between end flanges, spaces being provided between the end flanges and the vibration damping material.
Claim 43
Dependent Claim
22 words
A cryopump as claimed in claim 28 wherein the vibration damping material is bonded to the bellows continuously along the interface therebetween.
Claim 44
Dependent Claim
84 words
A cryopump adapted to be mounted to a chamber to be evacuated, the cryopump comprising: cryopanels; a refrigerator for cooling the cryopanels to cryogenic temperatures at which gases condense on the cryopanels; a first vibration isolator forming a vacuum housing about the cryopanels having bellows covered with vibration damping material which fills spaces between corrugations of the bellows to prevent collapse of the bellows and damp vibration transmitted through the bellows; and, a second vibration isolator mounted between the first isolator and the refrigerator.
Claim 45
Dependent Claim
84 words
A cryopump adapted to be mounted to a chamber to be evacuated, the cryopump comprising: cryopanels; a refrigerator for cooling the cryopanels to cryogenic temperatures at which gases condense on the cryopanels; a first vibration isolator forming a vacuum housing about the cryopanels having bellows covered with vibration damping material which fills spaces between corrugations of the bellows to prevent collapse of the bellows and damp vibration transmitted through the bellows; and, a second vibration isolator mounted between the first isolator and the refrigerator.
Claim 46
Dependent Claim
21 words
A cryopump as claimed in claim 38 further comprising an intermediate mass mounted between the first isolator and the second isolator.
Claim 47
Dependent Claim
140 words
A cryopump adapted to be mounted to a chamber to be evacuated, the cryopump comprising cryopanels, a refrigerator for cooling the cryopanels to cryogenic temperatures at which gas is condensed on the cryopanels, and a vibration isolator between the refrigerator and the chamber, the vibration isolator comprising a cylindrical bellows having circumferential corrugations for mechanically isolating the refrigerator from the chamber while maintaining a gas seal between the chamber and refrigerator, the bellows being covered with vibration damping material which fills the space between corrugations of the bellows to prevent collapse of the bellows and the damping of vibrations transmitted through the isolator, the dynamic shear modulus of the material forming the bellows being greater than about 10 11 dynes/cm 2 and the dynamic shear modulus of the vibration damping material being less than about 10 7 dynes/cm 2 .
Claim 48
Dependent Claim
140 words
A cryopump adapted to be mounted to a chamber to be evacuated, the cryopump comprising cryopanels, a refrigerator for cooling the cryopanels to cryogenic temperatures at which gas is condensed on the cryopanels, and a vibration isolator between the refrigerator and the chamber, the vibration isolator comprising a cylindrical bellows having circumferential corrugations for mechanically isolating the refrigerator from the chamber while maintaining a gas seal between the chamber and refrigerator, the bellows being covered with vibration damping material which fills the space between corrugations of the bellows to prevent collapse of the bellows and the damping of vibrations transmitted through the isolator, the dynamic shear modulus of the material forming the bellows being greater than about 10 11 dynes/cm 2 and the dynamic shear modulus of the vibration damping material being less than about 10 7 dynes/cm 2 .
Claim 49
Dependent Claim
27 words
A cryopump adapted to be mounted to a chamber to be evacuated as claimed in claim 40 wherein the isolator forms a vacuum vessel surrounding the cryopanels.
Claim 50
Dependent Claim
36 words
A cryopump adapted to be mounted to a chamber to be evacuated as claimed in claim 40 wherein the bellows forms a vacuum vessel surrounding the cryopanels and is joined in series with a second bellows.
Claim 51
Dependent Claim
27 words
A cryopump adapted to be mounted to a chamber to be evacuated as claimed in claim 42 wherein the second bellows is not covered by damping material.
Claim 52
Dependent Claim
34 words
A cryopump adapted to be mounted to chamber to be evacuated as claimed in claim 42 further comprising a weighted intermediate mass mounted between the bellows forming the vacuum vessel and the second bellows.
Claim 53
Independent Claim
54 words
A method of vibration isolating a vacuum pump comprising positioning a vibration damper between the vacuum pump and a work chamber, the vibration isolator comprising a bellows having circumferential corrugations and vibration damping material filling spaces between corrugations of the bellows to prevent collapse of the bellows and damp vibrations transmitted through the bellows.
Claim 54
Independent Claim
54 words
A method of vibration isolating a vacuum pump comprising positioning a vibration damper between the vacuum pump and a work chamber, the vibration isolator comprising a bellows having circumferential corrugations and vibration damping material filling spaces between corrugations of the bellows to prevent collapse of the bellows and damp vibrations transmitted through the bellows.
Claim 55
Dependent Claim
46 words
A method as claimed in claim 45 wherein the dynamic shear modulus of the damping material is less than 10 7 dynes/cm 2 and the dynamic shear modulus of the material of the bellows is at least in the order of 10 11 dynes/cm 2 .
Claim 56
Independent Claim
42 words
A method for making a vibration isolator comprising the steps of: forming a cylindrical bellows having circumferential corrugations; and filling spaces between the corrugations of the bellows with a vibration damping material to prevent collapse of the bellows and to dampen vibrations.
Claim 57
Independent Claim
42 words
A method for making a vibration isolator comprising the steps of: forming a cylindrical bellows having circumferential corrugations; and filling spaces between the corrugations of the bellows with a vibration damping material to prevent collapse of the bellows and to dampen vibrations.
Claim 58
Dependent Claim
28 words
A method for making a vibration isolator as claimed in claim 47 further comprising the step of attaching a second bellows isolator in series with the first isolator.
Claim 59
Dependent Claim
28 words
A method for making a vibration isolator as claimed in claim 48 further comprising the step of separating the first and second bellows by an intermediate weighted mass.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-29 | 1992-11-28 | 1993-05-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-29 | 1996-11-28 | 1997-05-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-29 | 2000-11-28 | 2001-05-30 | $7700.00 | Window Closed / Lapsed |