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US4832810A
Expired / Lapsed
US
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Co-based alloy sputter target and process of manufacturing the same
Assignee: Ulvac Inc
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Filing: 1987-07-07
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Granted: 1989-05-23
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Expires: 2007-07-07
Abstract
Abstract A Co-based alloy sputter target comprising a f.c.c. phase and a h.c.p. phase, wherein the value of th ratio of X-ray diffraction peak intensity, I fcc (200) /I hcp (101), is smaller than the value of the same ratio in a Co-based alloy obtained by cooling a Co-based alloy having a f.c.c. single phase to room temperature from the high temperature at which it is in a melted state. The target is manufactured by subjecting to cold-working treatment a Co-based alloy obtained by cooling a Co-based alloy material having a f.c.c. single phase from its melting temperature.
Inventors
- 👤 Kyuzo Nakamura
- 👤 Yoshifumi Ota
- 👤 Taiki Yamada
- 👤 Michio Ishikawa
- 👤 Noriaki Tani
- 👤 Yasushi Higuchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:35
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; C22; C22F; C22F1/00; C22F1/10
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
123 words
A magnetron sputter target obtained by forming a modified Co-based alloy into a magnetron sputter target shape, said modified Co-based alloy being a Co-based alloy which comprises a face centered cubic phase and a hexagonal close packed phase, wherein the value of the ratio of the intensity of the X-ray diffraction peak for the (200) face of the face centered cubic phase to the intensity of the X-ray diffraction peak for the (101) face of the hexagonal close packed phase, I fcc (200) /I hcp (101), is smaller than the value of the same ratio in an unmodified Co-based alloy which is obtained by cooling to room temperature a Co-based alloy material having a face centered cubic single phase from its melting temperature.
Claim 2
Dependent Claim
123 words
A magnetron sputter target obtained by forming a modified Co-based alloy into a magnetron sputter target shape, said modified Co-based alloy being a Co-based alloy which comprises a face centered cubic phase and a hexagonal close packed phase, wherein the value of the ratio of the intensity of the X-ray diffraction peak for the (200) face of the face centered cubic phase to the intensity of the X-ray diffraction peak for the (101) face of the hexagonal close packed phase, I fcc (200) /I hcp (101), is smaller than the value of the same ratio in an unmodified Co-based alloy which is obtained by cooling to room temperature a Co-based alloy material having a face centered cubic single phase from its melting temperature.
Claim 3
Dependent Claim
46 words
A magnetron sputter target as in claim 1, wherein the difference between the value of the ratio I fcc (200) /I hcp (101) in said unmodified Co-based alloy and the value of the same ratio in said modified Co-based alloy is in the range of 1.30-1.61.
Claim 4
Dependent Claim
144 words
A magnetron sputter target obtained by forming a modified Co-based alloy into a magnetron sputter target shape, said modified Co-based alloy being a Co-based alloy which comprises a face centered cubic phase and a hexagonal close packed phase, wherein the value of the ratio of the intensity of the X-ray diffraction peak for the (200) face of the face centered cubic phase to the intensity of the X-ray diffraction peak for the (101) face of the hexagonal close packed phase, I fcc (200) /I hcp (101), is smaller than the value of the same ratio in an unmodified Co-based alloy which is obtained by cooling to room temperature a Co-based alloy material having a face centered cubic single phase from its melting temperature, and wherein the magnetic permeability of said modified Co-based alloy is smaller than the magnetic permeability of said unmodified Co-based alloy.
Claim 5
Dependent Claim
144 words
A magnetron sputter target obtained by forming a modified Co-based alloy into a magnetron sputter target shape, said modified Co-based alloy being a Co-based alloy which comprises a face centered cubic phase and a hexagonal close packed phase, wherein the value of the ratio of the intensity of the X-ray diffraction peak for the (200) face of the face centered cubic phase to the intensity of the X-ray diffraction peak for the (101) face of the hexagonal close packed phase, I fcc (200) /I hcp (101), is smaller than the value of the same ratio in an unmodified Co-based alloy which is obtained by cooling to room temperature a Co-based alloy material having a face centered cubic single phase from its melting temperature, and wherein the magnetic permeability of said modified Co-based alloy is smaller than the magnetic permeability of said unmodified Co-based alloy.
Claim 6
Dependent Claim
46 words
A magnetron sputter target as in claim 3, wherein the difference between the value of the ratio I fcc (200) /I hcp (101) in said unmodified Co-based alloy and the value of the same ratio in said modified Co-based alloy is in the range of 1.30-1.61.
Claim 7
Independent Claim
127 words
A method for depositing a metallic film on a substrate, comprising the step of conducting magnetron sputtering with a magnetron sputtering target which consists essentially of a modified Co-based alloy comprising a face centered cubic phase and a hexagonal close packed phase, wherein the value of the ratio of the intensity of the X-ray diffraction peak for the (200) face of the face centered cubic phase to the intensity of the X-ray diffraction peak for the (101) face of the hexagonal close packed phase, I fcc (200) /I hcp (101), is smaller than the value of the same ratio in an unmodified Co-based alloy which is obtained by cooling to room temperature a Co-based alloy material having a face centered cubic single phase from its melting temperature.
Claim 8
Independent Claim
127 words
A method for depositing a metallic film on a substrate, comprising the step of conducting magnetron sputtering with a magnetron sputtering target which consists essentially of a modified Co-based alloy comprising a face centered cubic phase and a hexagonal close packed phase, wherein the value of the ratio of the intensity of the X-ray diffraction peak for the (200) face of the face centered cubic phase to the intensity of the X-ray diffraction peak for the (101) face of the hexagonal close packed phase, I fcc (200) /I hcp (101), is smaller than the value of the same ratio in an unmodified Co-based alloy which is obtained by cooling to room temperature a Co-based alloy material having a face centered cubic single phase from its melting temperature.
Claim 9
Dependent Claim
44 words
A method as in claim 5, wherein the difference between the value of the ratio I fcc (200) /I hcp (101) in said unmodified Co-based alloy and the value of the same ratio in said modified Co-based alloy is in the range of 1.30-1.61.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-22 | 1992-11-21 | 1993-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-22 | 1996-11-21 | 1997-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-22 | 2000-11-21 | 2001-05-23 | $7700.00 | Window Closed / Lapsed |