Patent US4831267A successfully refreshed from Google Patents.
US4831267A
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Detector for charged particles
Assignee: Siemens AG
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Filing: 1988-01-22
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Granted: 1989-05-16
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Expires: 2008-01-22
Abstract
Abstract A detector for charged particles includes three grid electrodes arranged approximately parallel to the surface of a specimen and separated from one another by insulating spacers, as well as a charged particle sensitive part nearly completely covering the specimen. The particle sensitive part includes a plurality of rod shaped scintillators or light conductors lying at a high potential for post acceleration of secondary particles and lying in a plane approximately parallel to the surface of the specimen.
Inventors
- 👤 Matthias Brunner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 15:54
CPC Classifications
G; G01; G01T; G01T1/00; G01T1/16; G01T1/28; H; H01; H01J; H01J37/00; H01J37/02; H01J37/244; H01J2237/00; H01J2237/244; H01J2237/2443; H01J2237/2445; H01J2237/2446; H01J2237/2448; H01J2237/245; H01J2237/24507; H01J2237/24571; H01J2237/24578
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
97 words
A detector, comprising: a plurality of particle sensitive regions arranged in a plane lying approximately parallel to a surface of a specimen, said plurality of particle sensitive regions having an extent in a direction in a straight line in said plane approximately corresponding to dimensions of said specimen in said direction, said plurality of particle sensitive regions being rod shaped and being arranged parallel to one another, said plurality of particle sensitive regions being scintillators; and at least one means for forwarding signals generated by incident charged particles or radiation in ones of said particle sensitive regions.
Claim 2
Dependent Claim
97 words
A detector, comprising: a plurality of particle sensitive regions arranged in a plane lying approximately parallel to a surface of a specimen, said plurality of particle sensitive regions having an extent in a direction in a straight line in said plane approximately corresponding to dimensions of said specimen in said direction, said plurality of particle sensitive regions being rod shaped and being arranged parallel to one another, said plurality of particle sensitive regions being scintillators; and at least one means for forwarding signals generated by incident charged particles or radiation in ones of said particle sensitive regions.
Claim 3
Dependent Claim
23 words
A detector as claimed in claim 1, wherein ones of said plurality of particle sensitive regions extend only over sub-regions of said plane.
Claim 4
Dependent Claim
24 words
A detector as claimed in claim 1, wherein ones of said plurality of particle sensitive regions are scintillators each having a rod-shaped light conductor.
Claim 5
Dependent Claim
30 words
A detector as claimed in claim 1, further comprising: a first electrode disposed approximately parallel to the surface of the specimen and immediately under said plurality of particle sensitive regions.
Claim 6
Dependent Claim
21 words
A detector as claimed in claim 4, further comprising means for maintaining said first electrode at no greater than ground potential.
Claim 7
Dependent Claim
29 words
A detector as claimed in claim 1, further comprising: an electrode disposed approximately parallel to the surface of the specimen and immediately above said plurality of particle sensitive regions.
Claim 8
Dependent Claim
31 words
A detector as claimed in claim 6, further comprising: a pole piece of an imaging lens of a beam generating system; and said electrode being disposed immediately under said pole piece.
Claim 9
Dependent Claim
31 words
A detector as claimed in claim 1, furter comprising: a first grid electrode; another electrode disposed approximately parallel to the surface of the specimen and immediately under said first grid electrode.
Claim 10
Dependent Claim
80 words
A detector as claimed in claim 6, wherein said electrode is a second electrode, and further comprising: a first electrode disposed approximately parallel to the surface of the specimen and immediately under said plurality of particle sensitive regions; a third electrode disposed approximately parallel to the surface of the specimen and immediately under said first electrode; and means for maintaining voltages at said second and third electrodes of plurality such that particles to be documented by said detector are decelerated.
Claim 11
Dependent Claim
52 words
A detector as claimed in claim 1, wherein said at least one means for forwarding is a first light conductor, and further comprising: a second light conductor of cross section smaller than said first light conductor, said second light conductor connecting said first light conductor to said plurality of particle sensitive regions.
Claim 12
Dependent Claim
17 words
A detector as claimed in claim 10, wherein said first light conductor is a light conductor block.
Claim 13
Dependent Claim
53 words
A detector as claimed in claim 9, wherein a first distance between said first electrode and said third electrode and a second distance beween said second electrode and said plane of said particle sensitive regions is greater than a third distance between said first electrode and said plane of said particle sensitive regions.
Claim 14
Dependent Claim
36 words
A detector as claimed in claim 9, wherein said first electrode and said second electrode and said third electrode are each of an extent sufficient to at least nearly completely cover the surface of the specimen.
Claim 15
Dependent Claim
29 words
A detector as claimed in claim 9, wherein each of said first electrode and said second electrode and said third electrode are in the form of a grid electrode.
Claim 16
Dependent Claim
40 words
A detector as claimed in claim 14, wherein neighboring ones of said particle sensitive regions have a mutual spacing corresponding to a spacing of webs of said first grid electrode and said second grid electrode and said third grid electrode.
Claim 17
Dependent Claim
102 words
A detector comprising: a plurality of particle sensitive regions arranged in a plane lying approximately parallel to a surface of a specimen, said plurality of particle sensitive regions having an extent in a direction in a straight line in said plane approximately corresponding to dimensions of said specimen in said direction, said plurality of particle sensitive regions being rod shaped and being arranged parallel to one another, said plurality of particle sensitive regions being light conductors coated with a scintillator; and at least one mean for forwarding signals generated by incident charged particles or radiation in ones of said particle sensitive regions.
Claim 18
Dependent Claim
102 words
A detector comprising: a plurality of particle sensitive regions arranged in a plane lying approximately parallel to a surface of a specimen, said plurality of particle sensitive regions having an extent in a direction in a straight line in said plane approximately corresponding to dimensions of said specimen in said direction, said plurality of particle sensitive regions being rod shaped and being arranged parallel to one another, said plurality of particle sensitive regions being light conductors coated with a scintillator; and at least one mean for forwarding signals generated by incident charged particles or radiation in ones of said particle sensitive regions.
References Cited (Backward Citations)
US4246479A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-15 | 1992-11-14 | 1993-05-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-15 | 1996-11-14 | 1997-05-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-15 | 2000-11-14 | 2001-05-16 | $7700.00 | Window Closed / Lapsed |