Moving state detection apparatus

Claim 2

A rotating state detection apparatus comprising: a diffraction grating formed at a predetermined pitch on a peripheral portion of a rotating object and disposed in a plane parallel with a plane of rotation of said object; means for applying a light beam to said diffraction grating to create a diffracted light beam and producing a nondiffracted reference light beam which is capable of interfering with said diffracted light beam; optical means for superposing said diffracted light beam and said reference light beam to produce interference fringes; and light-receiving means for receiving the superposed light beams from said optical means, the rotating state of the rotating object being detected based on an output signal of said light-receiving means.

Claim 3

A moving state detection apparauts comprising: light source means for supplying a coherent light beam; beam splitting means for splitting said light beam into a plurality of light beams, a first light beam obtained by said splitting means being directed to a diffraction grating formed on an object, a second light beam obtained by said splitting means being directed to as location other than said diffraction grating, said diffraction grating being formed along a plane parallel with a plane in which said object moves relative to said first light beam; optical means for superposing a diffracted light beam created from said first light beam which is incident on said diffraction grating and said second light beam to produce interference fringes; and light-receiving means for receiving the superposed light beams from said optical means to photoelectrically convert said interference fringes, the moving state of said object relative to said first light beam being detected based on an output of said light-receiving means.

Claim 4

A moving state detection apparauts comprising: light source means for supplying a coherent light beam; beam splitting means for splitting said light beam into a plurality of light beams, a first light beam obtained by said splitting means being directed to a diffraction grating formed on an object, a second light beam obtained by said splitting means being directed to as location other than said diffraction grating, said diffraction grating being formed along a plane parallel with a plane in which said object moves relative to said first light beam; optical means for superposing a diffracted light beam created from said first light beam which is incident on said diffraction grating and said second light beam to produce interference fringes; and light-receiving means for receiving the superposed light beams from said optical means to photoelectrically convert said interference fringes, the moving state of said object relative to said first light beam being detected based on an output of said light-receiving means.

Claim 5

An apparatus according to claim 2, wherein said first light beam is converted into a linear light beam by an optical member and is directed to said diffraction grating.

Claim 6

An apparatus according to claim 3, wherein said optical member comprises a cylindrical lens.

Claim 7

An apparatus according to claim 2, wherein said light splitting means comprises adjustment means for arbitrarily changing a split ratio of the first and second light beams.

Claim 8

An apparatus according to claim 2, wherein said light splitting means consists of a rotatable λ/2 plate and a polarizing beam splitter for splitting a linear polarized light beam passed through said λ/2 plate.

Claim 9

An apparatus according to claim 6, wherein said second optical means comprises a polarizing plate.

Claim 10

An apparatus according to claim 2, wherein said first light beam is inclined by an angle which is substantially equal to a diffraction angle of said diffracted light beam, with respect to said diffraction grating.

Claim 11

A moving state detection method comprising the steps of: preparing first and second light beams which are capable of interfering with each other; forming a diffraction grating on an object movable relative to said first light beam and disposed in a plane parallel with a plane in which said object moves relative to said first light beam; producing a diffracted light beam by causing said first light beam to be incident on said diffraction grating; producing a non-diffracted reference light beam from said second light beam; producing interference fringes by superposing said diffracted light beam and said reference light beam; and detecting the moving state of said object relative to said first light beam by photoelectrically converting said interference fringes.

Claim 12

A moving state detection method comprising the steps of: preparing first and second light beams which are capable of interfering with each other; forming a diffraction grating on an object movable relative to said first light beam and disposed in a plane parallel with a plane in which said object moves relative to said first light beam; producing a diffracted light beam by causing said first light beam to be incident on said diffraction grating; producing a non-diffracted reference light beam from said second light beam; producing interference fringes by superposing said diffracted light beam and said reference light beam; and detecting the moving state of said object relative to said first light beam by photoelectrically converting said interference fringes.

Claim 13

A method according to claim 9, wherein said object is a rotating object and said diffraction grating is formed in a plane parallel with a plane of rotation of said object.

Claim 14

A method according to claim 10, further comprising a step of converting said first light beam into a linear light beam and causing said first light beam to be incident on said diffraction grating in such a manner that a longitudinal direction of said linear light beam is substantially coincident with a direction in which said diffraction grating is arranged.

Claim 15

A method according to claim 9, wherein intensities of said first and second light beams are so set that constrast of said interference fringes is at a maximum.

Claim 16

An optical optical encoder comprising: a laser emitting a light beam; a diffraction grating formed on an object, said diffraction grating being arranged in a plane substantially parallel with a plane in which said object moves relative to the light beam; a beam splitter for splitting a light beam from said laser into first and second light beams to direct said first light beam to said diffraction grating and to direct said second light beam in a direction different from that of said first light beam and away from said diffraction grating; reflecting means for reflecting said non-diffracted second light beam to direct said non-diffracted second light beam back to said beam splitter; and means for photoelectrically converting interference fringes produced by said first light beam diffracted by said diffraction grating and said non-diffracted second light beam reflected by said reflecting means, said first and second light beams being superposed by said beam splitter and being received by said photoelectrical converting means, wherein a moving state of said object is detected based on an output signal of said photoelectrical converting means.

Claim 17

An optical optical encoder comprising: a laser emitting a light beam; a diffraction grating formed on an object, said diffraction grating being arranged in a plane substantially parallel with a plane in which said object moves relative to the light beam; a beam splitter for splitting a light beam from said laser into first and second light beams to direct said first light beam to said diffraction grating and to direct said second light beam in a direction different from that of said first light beam and away from said diffraction grating; reflecting means for reflecting said non-diffracted second light beam to direct said non-diffracted second light beam back to said beam splitter; and means for photoelectrically converting interference fringes produced by said first light beam diffracted by said diffraction grating and said non-diffracted second light beam reflected by said reflecting means, said first and second light beams being superposed by said beam splitter and being received by said photoelectrical converting means, wherein a moving state of said object is detected based on an output signal of said photoelectrical converting means.

Claim 18

An optical encoder comprising: a semiconductor laser; optical means for directing a light beam having an elliptical cross-section from said laser to form a beam spot on a diffraction grating formed on an object, said diffraction grating being arranged in a plane substantially parallel with a plane in which said object moves relative to the light beam incident on said diffraction grating, and said optical means setting a direction of the major axis of said elliptical beam spot for reducing influence from a grating pitch error of said diffraction grating in the optical encoder, photoelectrical converting means for receiving an interference fringe formed by the light beam emitting from said diffraction grating, wherein a moving state of said object is detected based on an output signal of said photoelectrical converting means.

Claim 19

An optical encoder comprising: a semiconductor laser; optical means for directing a light beam having an elliptical cross-section from said laser to form a beam spot on a diffraction grating formed on an object, said diffraction grating being arranged in a plane substantially parallel with a plane in which said object moves relative to the light beam incident on said diffraction grating, and said optical means setting a direction of the major axis of said elliptical beam spot for reducing influence from a grating pitch error of said diffraction grating in the optical encoder, photoelectrical converting means for receiving an interference fringe formed by the light beam emitting from said diffraction grating, wherein a moving state of said object is detected based on an output signal of said photoelectrical converting means.

Claim 20

An optical encoder according to claim 14, wherein when said diffraction grating comprises a radial diffraction grating formed along a direction parallel with the rotational direction of the rotating object, said optical means directs the major axis of said elliptical beam spot to be substantially perpendicular to the radial direction of said diffraction grating.