US4826733A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sin-containing coatings for electronic devices
Assignee: Dow Silicones Corp
•
Filing: 1986-12-03
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Granted: 1989-05-02
•
Expires: 2006-12-03
Abstract
Abstract A method of forming at low temperatures silicon- and nitrogen-containing ceramic or ceramic-like coatings for the protection of electronic devices. The coatings are produced by the ceramification at temperatures of, or below, 400 degrees Centigrade of preceramic silicon nitrogen-containing polymer coatings deposited from a solvent solution. The coatings are useful for planarizing the surfaces of electronic devices and for passivation.
Inventors
- 👤 Loren A. Haluska
- 👤 Keith W. Michael
- 👤 Sarah S. Snow
- 👤 Leo Tarhay
- 👤 Ronald H. Baney
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 02:20
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/6903; H10P14/6905; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682; H10P14/6342; H10P14/6687; H10P14/6689; H10P14/692; H10P14/6921; H10P14/6922; H10P14/694; H10P14/6943; H10P14/69433; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31663
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
97 words
A method of forming silicon nitrogen-containing coatings on an electronic device, which method comprises coating an electronic device with a ceramic or ceramic-like coating by means of diluting a silicon and nitrogen-containing preceramic polymer in a solvent, coating an electronic device with said preceramic polymer solution, drying the preceramic polymer solution so as to evaporate the solvent and thereby deposit a preceramic coating on the electronic device, and heating the coated device to a temperature in the range of 200° to 400° C. in the absence of air to produce the ceramic or ceramic-like coated electronic device.
Claim 2
Independent Claim
97 words
A method of forming silicon nitrogen-containing coatings on an electronic device, which method comprises coating an electronic device with a ceramic or ceramic-like coating by means of diluting a silicon and nitrogen-containing preceramic polymer in a solvent, coating an electronic device with said preceramic polymer solution, drying the preceramic polymer solution so as to evaporate the solvent and thereby deposit a preceramic coating on the electronic device, and heating the coated device to a temperature in the range of 200° to 400° C. in the absence of air to produce the ceramic or ceramic-like coated electronic device.
Claim 3
Dependent Claim
39 words
A method as claimed in claim 1 wherein the preceramic silicon nitrogen-containing polymer deposited onto the electronic device is ceramified by heated the preceramic polymer coated device to a temperature in the range of 300 to 400 degrees Centrigrade.
Claim 4
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 2.
Claim 5
Dependent Claim
10 words
An electronic device coated by the method of claim 2.
Claim 6
Dependent Claim
28 words
A method as claimed in claim 1 wherein the preceramic silicon nitrogen-containing polymer deposited on the electronic device is ceramified by heating by means of a laser beam.
Claim 7
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 5.
Claim 8
Dependent Claim
10 words
An electronic device coated by the method of claim 5.
Claim 9
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 1.
Claim 10
Dependent Claim
21 words
A device comprising a structure having therein a coating prepared by the method of claim 1 as an interlevel dielectric insulator.
Claim 11
Dependent Claim
10 words
An electronic device coated by the method of claim 1.
Claim 12
Independent Claim
154 words
A method of forming a silicon-containing coating on an electronic device coated with a ceramic or ceramic-like silicon nitrogen-containing coating, which method comprises: (A) coating an electronic device with a ceramic or ceramic-like coating by means of diluting a silicon and nitrogen-containing preceramic polymer in a solvent, coating an electronic device with said preceramic polymer solution, drying the preceramic polymer solution so as to evaporate the solvent and thereby deposit a preceramic coating on the electronic device, heating the coated device in the absence of air to produce the ceramic or ceramic-like coating, and (B) applying to the ceramic or ceramic-like coated device a silicon-containing coating by means of decomposing in a reaction chamber a silane, polysilane, halosilane, halodisilane, polyhalosilane or mixtures thereof in the vapor phase, in the presence of the ceramic or ceramic-like coated device, whereby a silicon nitrogen-containing ceramic or ceramic-like coated electronic device with a silicon-containing coating thereon is obtained.
Claim 13
Independent Claim
154 words
A method of forming a silicon-containing coating on an electronic device coated with a ceramic or ceramic-like silicon nitrogen-containing coating, which method comprises: (A) coating an electronic device with a ceramic or ceramic-like coating by means of diluting a silicon and nitrogen-containing preceramic polymer in a solvent, coating an electronic device with said preceramic polymer solution, drying the preceramic polymer solution so as to evaporate the solvent and thereby deposit a preceramic coating on the electronic device, heating the coated device in the absence of air to produce the ceramic or ceramic-like coating, and (B) applying to the ceramic or ceramic-like coated device a silicon-containing coating by means of decomposing in a reaction chamber a silane, polysilane, halosilane, halodisilane, polyhalosilane or mixtures thereof in the vapor phase, in the presence of the ceramic or ceramic-like coated device, whereby a silicon nitrogen-containing ceramic or ceramic-like coated electronic device with a silicon-containing coating thereon is obtained.
Claim 14
Dependent Claim
29 words
A method as claimed in claim 11 wherein the silicon-containing coating is deposited onto the ceramic or ceramic-like coated device at a temperature between 200 and 400 degrees Centrigrade.
Claim 15
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 12.
Claim 16
Dependent Claim
10 words
An electronic device coated by the method of claim 12.
Claim 17
Dependent Claim
26 words
A method as claimed in claim 11 wherein the silicon-containing coating is deposited onto the ceramic or ceramic-like coated device by plasma enhanced chemical vapor deposition.
Claim 18
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 15.
Claim 19
Dependent Claim
10 words
An electronic device coated by the method of claim 15.
Claim 20
Dependent Claim
16 words
An article comprisng a structure having thereon a coating prepared by the method of claim 11.
Claim 21
Dependent Claim
10 words
An electronic device coated by the method of claim 11.
Claim 22
Independent Claim
168 words
A method of forming a silicon nitrogen-containing coating on an electronic device coated with a ceramic or ceramic-like silicon nitrogen-containing coating, which method comprises: (A) coating an electronic device with a ceramic or ceramic-like coating by means of diluting a silicon and nitrogen-containing preceramic polymer in a solvent, coating an electronic device with said preceramic polymer solution, drying the preceramic polymer solution so as to evaporate the solvent and thereby deposit a preceramic coating on the device, heating the coated device in the absence of air to produce the ceramic or ceramic-like coating thereon, and (B) applying to the ceramic or ceramic-like coated device a silicon nitrogen-containing coating by means of decomposing in a reaction chamber a silane, polysilane, halosilane, halodisilane, polyhalosilane or mixtures thereof, and ammonia, in the vapor phase, at a temperature between 200 and 400 degrees Centrigrade, in the presence of the ceramic or ceramic-like coated device, whereby a silicon nitrogen-containing ceramic or ceramic-like coated electronic device with a silicon nitrogen-containing coating thereon is obtained.
Claim 23
Independent Claim
168 words
A method of forming a silicon nitrogen-containing coating on an electronic device coated with a ceramic or ceramic-like silicon nitrogen-containing coating, which method comprises: (A) coating an electronic device with a ceramic or ceramic-like coating by means of diluting a silicon and nitrogen-containing preceramic polymer in a solvent, coating an electronic device with said preceramic polymer solution, drying the preceramic polymer solution so as to evaporate the solvent and thereby deposit a preceramic coating on the device, heating the coated device in the absence of air to produce the ceramic or ceramic-like coating thereon, and (B) applying to the ceramic or ceramic-like coated device a silicon nitrogen-containing coating by means of decomposing in a reaction chamber a silane, polysilane, halosilane, halodisilane, polyhalosilane or mixtures thereof, and ammonia, in the vapor phase, at a temperature between 200 and 400 degrees Centrigrade, in the presence of the ceramic or ceramic-like coated device, whereby a silicon nitrogen-containing ceramic or ceramic-like coated electronic device with a silicon nitrogen-containing coating thereon is obtained.
Claim 24
Dependent Claim
30 words
A method as claimed in claim 20 wherein the silicon nitrogen-containing coating is deposited onto the ceramic or ceramic-like coated device at a temperature between 200 and 400 degrees Centrigrade.
Claim 25
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 21.
Claim 26
Dependent Claim
10 words
An electronic device coated by the method of claim 21.
Claim 27
Dependent Claim
27 words
A method as claimed in claim 20 wherein the silicon nitrogen-containing coating is deposited onto the ceramic or ceramic-like coated device by plasma enhanced chemical vapor deposition.
Claim 28
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 24.
Claim 29
Dependent Claim
10 words
An electronic device coated by the method of claim 24.
Claim 30
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 20.
Claim 31
Dependent Claim
10 words
An electronic device coated by the method of claim 20.
Claim 32
Independent Claim
177 words
A method of forming a silicon carbon-containing coating on an electronic device coated with a ceramic or ceramic-like silicon nitrogen-containing coating, which method comprises: (A) coating an electronic device with a ceramic or ceramic-like coating by means of diluting a silicon and nitrogen-containing preceramic polymer in a solvent, coating an electronic device with said preceramic polymer solution, drying the preceramic polymer solution so as to evaporate the solvent and thereby deposit a preceramic coating on the electronic device, heating the coated device in the absence of air to produce the ceramic or ceramic-like coating thereon, and (B) applying to the ceramic or ceramic-like coated device a silicon carbon-containing coating by means of decomposiing in a reaction chamber a silane, polysilane, halosilane, halodisilane, polyhalosilane or mixtures thereof, and a material selected from the group consisting of alkanes of one to six carbon atoms, alkylsilanes, and alkylhalosilanes, in the vapor phase, in the presence of the ceramic or ceramic-like coated device, whereby a silicon nitrogen-containing ceramic or ceramic-like coated electronic device with a silicon carbon-containing coating thereon is obtained.
Claim 33
Independent Claim
177 words
A method of forming a silicon carbon-containing coating on an electronic device coated with a ceramic or ceramic-like silicon nitrogen-containing coating, which method comprises: (A) coating an electronic device with a ceramic or ceramic-like coating by means of diluting a silicon and nitrogen-containing preceramic polymer in a solvent, coating an electronic device with said preceramic polymer solution, drying the preceramic polymer solution so as to evaporate the solvent and thereby deposit a preceramic coating on the electronic device, heating the coated device in the absence of air to produce the ceramic or ceramic-like coating thereon, and (B) applying to the ceramic or ceramic-like coated device a silicon carbon-containing coating by means of decomposiing in a reaction chamber a silane, polysilane, halosilane, halodisilane, polyhalosilane or mixtures thereof, and a material selected from the group consisting of alkanes of one to six carbon atoms, alkylsilanes, and alkylhalosilanes, in the vapor phase, in the presence of the ceramic or ceramic-like coated device, whereby a silicon nitrogen-containing ceramic or ceramic-like coated electronic device with a silicon carbon-containing coating thereon is obtained.
Claim 34
Dependent Claim
30 words
A method as claimed in claim 29 wherein the silicon carbon-containing coating is deposited onto the ceramic or ceramic-like coated device at a temperature between 200 and 400 degrees Centrigrade.
Claim 35
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 30.
Claim 36
Dependent Claim
10 words
An electronic device coated by the method of claim 30.
Claim 37
Dependent Claim
27 words
A method as claimed in claim 29 wherein the silicon carbon-containing coating is deposited onto the ceramic or ceramic-like coated device by plasma enhanced chemical vapor deposition.
Claim 38
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 33.
Claim 39
Dependent Claim
10 words
An electronic device coated by the method of claim 33.
Claim 40
Dependent Claim
16 words
An article comprising a structure having thereon a coating prepared by the method of claim 29.
Claim 41
Dependent Claim
10 words
An electronic device coated by the method of claim 29.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-01 | 1992-10-31 | 1993-05-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-01 | 1996-10-31 | 1997-05-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-01 | 2000-10-31 | 2001-05-02 | $7700.00 | Window Closed / Lapsed |