Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope

Claim 2

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube, said housing having upper and lower pumping ports therein axially distanced from one another; (b) at least two annular diaphragms of nonmagnetic material and a final magnetic annular diaphragm attached to said housing at different axial locations and extending inwardly of said housing, said diaphragms defining at least two interior passages, each of which communicate with the said upper and lower pumping ports, respectively; and (c) aperture means located within the central opening of said diaphragms to permit passage of said electron beam from said vacuum liner tube into said interior passages and then into the specimen chamber of said environmental scanning electron microscope and to limit passage of gas molecules from the said specimen chamber into the said interior passages.

Claim 3

An objective lens assembly as recited in claim 1 wherein the apertures are contained within an aperture carrier releasably mounted and sealed within the central opening of said diaphragms.

Claim 4

An objective lens assembly as recited in claim 1 wherein said aperture carrier is threadedly received within the lower part of the objective lens assembly.

Claim 5

An objective lens assembly as recited in claim 1 wherein said two interior passages contain gas at different pressures.

Claim 6

An objective lens assembly as recited in claim 4 wherein the zone of low pressure is located between the two nonmagnetic annular diaphragms.

Claim 7

An objective lens assembly as recited in claim 4 wherein the zone of higher pressure is located between one of the nonmagnetic diaphragms and the final magnetic diaphragm.

Claim 8

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (b) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another; (c) at least two annular diaphragms comprised of nonmagnetic material and a final magnetic annular diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring; and (d) aperture means located within the central openings of said diaphragms to permit passage of said electron beam from said vacuum liner tube into said interior passages and then into the specimen chamber of said environmental scanning electron microscope and to limit passage of gas molecules from the said specimen chamber into the said interior passages.

Claim 9

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (b) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another; (c) at least two annular diaphragms comprised of nonmagnetic material and a final magnetic annular diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring; and (d) aperture means located within the central openings of said diaphragms to permit passage of said electron beam from said vacuum liner tube into said interior passages and then into the specimen chamber of said environmental scanning electron microscope and to limit passage of gas molecules from the said specimen chamber into the said interior passages.

Claim 10

An objective lens assembly as recited in claim 7 wherein the apertures are contained within an aperture carrier releasably mounted and sealed within the central openings of said diaphragms.

Claim 11

An objective lens assembly as recited in claim 7 wherein said aperture carrier is threadedly received within the lower part of the objective lens assembly.

Claim 12

An objective lens assembly for an environmental scanning microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (b) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another; (c) at least two annular diaphragms comprised of nonmagnetic material and a final magnetic annular diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring; and (d) a combination aperture holder and electron detector releasably received and sealed within the central openings of the said annular diaphragms, said aperture holder having apertures therein for passage of the electron beam and gas into and out of the specimen chamber of the environmental scanning electron microscope and the said interior passages and having electron detector means associated with the lower portion thereof, said detector means being insulated from the body of said aperture holder.

Claim 13

An objective lens assembly for an environmental scanning microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (b) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another; (c) at least two annular diaphragms comprised of nonmagnetic material and a final magnetic annular diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring; and (d) a combination aperture holder and electron detector releasably received and sealed within the central openings of the said annular diaphragms, said aperture holder having apertures therein for passage of the electron beam and gas into and out of the specimen chamber of the environmental scanning electron microscope and the said interior passages and having electron detector means associated with the lower portion thereof, said detector means being insulated from the body of said aperture holder.

Claim 14

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing the beam of electrons passing through said liner tube; (b) an upper annular ring comprised of magnetic material abutting said magnetic housing at one end thereof and a lower ring comprised of magnetic material abutting said first ring, each of said rings having a plurality of circumferentially disposed ports therein; (i) an annular upper diaphragm comprised of nonmagnetic material attached and sealed to an upper portion of said upper ring and extending inwardly thereof, said upper diaphragm having a central bushing which receives said vacuum liner, (ii) an annular intermediate diaphragm comprised of nonmagnetic material attached and sealed to a lower portion of said upper ring and extending inwardly thereof, and (iii) an annular lower diaphragm comprised of magnetic material attached and sealed to said lower ring and extending inwardly thereof and comprising the final pole piece of said objective lens assembly, said upper and intermediate diaphragms defining an upper interior passage which communicates at its periphery with the plurality of ports in said upper ring and said intermediate and lower diaphragms defining a lower interior passage which communicates at its periphery with the plurality of ports in said lower ring; and (c) (i) upper aperture means located within the central opening of said upper diaphragm sized to permit passage of an electron beam from said vacuum liner tube into said upper interior passage, (ii) intermediate aperture means located within the central opening of said intermediate diaphragm sized to permit passage of said electron beam into said lower interior passage and to limit passage of gas from said lower interior passage to said upper interior passage, and (iii) lower aperture means located within the central opening of said lower diaphragm sized to permit passage of said electron beam into the specimen chamber of said environmental scanning microscope and to limit the passage of gas from the said specimen chamber into said lower interior passage.

Claim 15

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing the beam of electrons passing through said liner tube; (b) an upper annular ring comprised of magnetic material abutting said magnetic housing at one end thereof and a lower ring comprised of magnetic material abutting said first ring, each of said rings having a plurality of circumferentially disposed ports therein; (i) an annular upper diaphragm comprised of nonmagnetic material attached and sealed to an upper portion of said upper ring and extending inwardly thereof, said upper diaphragm having a central bushing which receives said vacuum liner, (ii) an annular intermediate diaphragm comprised of nonmagnetic material attached and sealed to a lower portion of said upper ring and extending inwardly thereof, and (iii) an annular lower diaphragm comprised of magnetic material attached and sealed to said lower ring and extending inwardly thereof and comprising the final pole piece of said objective lens assembly, said upper and intermediate diaphragms defining an upper interior passage which communicates at its periphery with the plurality of ports in said upper ring and said intermediate and lower diaphragms defining a lower interior passage which communicates at its periphery with the plurality of ports in said lower ring; and (c) (i) upper aperture means located within the central opening of said upper diaphragm sized to permit passage of an electron beam from said vacuum liner tube into said upper interior passage, (ii) intermediate aperture means located within the central opening of said intermediate diaphragm sized to permit passage of said electron beam into said lower interior passage and to limit passage of gas from said lower interior passage to said upper interior passage, and (iii) lower aperture means located within the central opening of said lower diaphragm sized to permit passage of said electron beam into the specimen chamber of said environmental scanning microscope and to limit the passage of gas from the said specimen chamber into said lower interior passage.

Claim 16

An objective lens assembly as recited in claim 11 wherein said intermediate and lower aperture means are contained within an aperture carrier which is releasably received and sealed within the said central openings of said intermediate and lower diaphragms.

Claim 17

An objective lens assembly as recited in claim 12 wherein the said aperture carrier is threadedly received within the annular lower diaphragm.

Claim 18

An objective lens assembly as recited in claim 11 wherein the intermediate aperture means is from 50 to 1000 microns in diameter.

Claim 19

An objective lens assembly as recited in claim 11 wherein the lower aperture means is from 50 to 1000 microns in diameter.

Claim 20

A combination objective lens assembly and aperture holder for use in an environmental electron scanning microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (b) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another; (c) at least two annular diaphragms comprised of nonmagnetic material and a final annular magnetic diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring; and (d) a combination aperture holder and electron detector releasably sealed within the central openings of said final annular pole piece and one of said diaphragms comprised of: (i) a main body having a conduit therein, said main body being adapted to be releasably received and sealed within a recess in said objective lens assembly; (ii) a lower aperture in the lower end of said conduit sized to permit an electron beam to pass through and to limit the passage of gas from the specimen chamber of the said environmental scanning electron microscope to the zone above said lower aperture; (iii) a port in said main body above the said lower aperture, said port providing communication from said conduit into a lower interior passage in said objective lens assembly; and (iv) a higher aperture within said conduit positioned above said lower aperture and above the said port therein, said upper aperture being sized to permit an electron beam to pass therethrough and to limit the passage of gas from the conduit to a higher passage within said objective lens assembly.

Claim 21

A combination objective lens assembly and aperture holder for use in an environmental electron scanning microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (b) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another; (c) at least two annular diaphragms comprised of nonmagnetic material and a final annular magnetic diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring; and (d) a combination aperture holder and electron detector releasably sealed within the central openings of said final annular pole piece and one of said diaphragms comprised of: (i) a main body having a conduit therein, said main body being adapted to be releasably received and sealed within a recess in said objective lens assembly; (ii) a lower aperture in the lower end of said conduit sized to permit an electron beam to pass through and to limit the passage of gas from the specimen chamber of the said environmental scanning electron microscope to the zone above said lower aperture; (iii) a port in said main body above the said lower aperture, said port providing communication from said conduit into a lower interior passage in said objective lens assembly; and (iv) a higher aperture within said conduit positioned above said lower aperture and above the said port therein, said upper aperture being sized to permit an electron beam to pass therethrough and to limit the passage of gas from the conduit to a higher passage within said objective lens assembly.

Claim 22

A combination objective lens assembly, aperture holder and detector for use in an environmental electron scanning microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing the beam of electrons passing through said liner tube; (b) an upper annular ring comprised of magnetic material abutting said magnetic housing at one end thereof and a lower ring comprised of magnetic material abutting said first ring, each of said rings having a plurality of circumferentially disposed ports therein; (i) an annular upper diaphragm comprised of nonmagnetic material attached and sealed to an upper portion of said upper ring and extending inwardly thereof, said upper diaphragm having a central bushing which receives said vacuum liner, (ii) an annular intermediate diaphragm comprised of nonmagnetic material attached and sealed to a lower portion of said upper ring and extending inwardly thereof, and (iii) an annular lower diaphragm comprised of a magnetic material attached and sealed to said lower ring and extending inwardly thereof and comprising the final pole piece of said objective lens assembly, said upper and intermediate diaphragms defining an upper interior passage which communicates at its periphery with the plurality of ports in said upper ring and said intermediate and lower diaphragms defining a lower interior passage which communicates at its periphery with the plurality of ports in said lower ring; and (c) a combination aperture holder and electron detector releasable sealed within the central openings of said annular lower and intermediate diaphragms and comprised of: (i) a main body having a conduit therein, said main body being adapted to be releasably received and sealed within a recess in said objective lens assembly; (ii) a lower aperture in the lower end of said conduit sized to permit an electron beam to pass through and to limit the passage of gas from the specimen chamber of the said environmental scanning electron microscope to the zone above said lower aperture; (iii) a port in said main body above the said lower aperture, said port providing communication from said conduit into a lower interior passage in said objective lens assembly; (iv) a higher aperture within said conduit positioned above said lower aperture and above the said port therein, said upper aperture being sized to permit an electron beam to pass therethrough and to limit the passage of gas from: the conduit to an upper interior passage within said objective lens assembly; and (v) an electron detector located at the lower end of said main body and separated therefrom by insulating means.

Claim 23

A combination objective lens assembly, aperture holder and detector for use in an environmental electron scanning microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing the beam of electrons passing through said liner tube; (b) an upper annular ring comprised of magnetic material abutting said magnetic housing at one end thereof and a lower ring comprised of magnetic material abutting said first ring, each of said rings having a plurality of circumferentially disposed ports therein; (i) an annular upper diaphragm comprised of nonmagnetic material attached and sealed to an upper portion of said upper ring and extending inwardly thereof, said upper diaphragm having a central bushing which receives said vacuum liner, (ii) an annular intermediate diaphragm comprised of nonmagnetic material attached and sealed to a lower portion of said upper ring and extending inwardly thereof, and (iii) an annular lower diaphragm comprised of a magnetic material attached and sealed to said lower ring and extending inwardly thereof and comprising the final pole piece of said objective lens assembly, said upper and intermediate diaphragms defining an upper interior passage which communicates at its periphery with the plurality of ports in said upper ring and said intermediate and lower diaphragms defining a lower interior passage which communicates at its periphery with the plurality of ports in said lower ring; and (c) a combination aperture holder and electron detector releasable sealed within the central openings of said annular lower and intermediate diaphragms and comprised of: (i) a main body having a conduit therein, said main body being adapted to be releasably received and sealed within a recess in said objective lens assembly; (ii) a lower aperture in the lower end of said conduit sized to permit an electron beam to pass through and to limit the passage of gas from the specimen chamber of the said environmental scanning electron microscope to the zone above said lower aperture; (iii) a port in said main body above the said lower aperture, said port providing communication from said conduit into a lower interior passage in said objective lens assembly; (iv) a higher aperture within said conduit positioned above said lower aperture and above the said port therein, said upper aperture being sized to permit an electron beam to pass therethrough and to limit the passage of gas from: the conduit to an upper interior passage within said objective lens assembly; and (v) an electron detector located at the lower end of said main body and separated therefrom by insulating means.

Claim 24

An improved environmental scanning electron microscope comprising: (a) means for generating and directing an electron beam toward a specimen; (b) a combination objective lens assembly and aperture holder comprising: (i) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (ii) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another; (iii) at least two annular diaphragms comprised of nonmagnetic material and a final magnetic diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring; and (iv) a combination aperture holder and electron detector releasably sealed within the central openings of said magnetic diaphragm and one of said nonmagnetic diaphragms and comprised of: a main body having a conduit therein, releasably received and sealed within a recess in said objective lens assembly; a lower aperture in the lower end of said conduit sized to permit an electron beam to pass through and to limit the passage of gas from the specimen chamber of the said environmental scanning electron microscope to the zone above said lower aperture; a port in said main body above the said lower aperture, said port providing communication from said conduit into a lower interior passage in said objective lens assembly; a higher aperture within said conduit positioned above said lower aperture and above the said port therein, said upper aperture being sized to permit an electron beam to pass therethrough and to limit the passage of gas from the conduit to a higher passage within said objective lens assembly; (c) a specimen chamber positioned below said objective lens, which maintains the specimen enveloped in gas in registration with the lower aperture such that a surface of the specimen may be exposed to the focused beam of electrons; (d) a specimen mount located within the specimen chamber and positioned for supporting the specimen so as to allow the focused beam of electrons to interact with the specimen; and (e) electron detection means positioned to detect electrons resulting from said interaction.

Claim 25

An improved environmental scanning electron microscope comprising: (a) means for generating and directing an electron beam toward a specimen; (b) a combination objective lens assembly and aperture holder comprising: (i) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (ii) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another; (iii) at least two annular diaphragms comprised of nonmagnetic material and a final magnetic diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring; and (iv) a combination aperture holder and electron detector releasably sealed within the central openings of said magnetic diaphragm and one of said nonmagnetic diaphragms and comprised of: a main body having a conduit therein, releasably received and sealed within a recess in said objective lens assembly; a lower aperture in the lower end of said conduit sized to permit an electron beam to pass through and to limit the passage of gas from the specimen chamber of the said environmental scanning electron microscope to the zone above said lower aperture; a port in said main body above the said lower aperture, said port providing communication from said conduit into a lower interior passage in said objective lens assembly; a higher aperture within said conduit positioned above said lower aperture and above the said port therein, said upper aperture being sized to permit an electron beam to pass therethrough and to limit the passage of gas from the conduit to a higher passage within said objective lens assembly; (c) a specimen chamber positioned below said objective lens, which maintains the specimen enveloped in gas in registration with the lower aperture such that a surface of the specimen may be exposed to the focused beam of electrons; (d) a specimen mount located within the specimen chamber and positioned for supporting the specimen so as to allow the focused beam of electrons to interact with the specimen; and (e) electron detection means positioned to detect electrons resulting from said interaction.

Claim 26

An improved environment scanning electron microscope as recited in claim 18 further comprising means for recording information detected by said detector.

Claim 27

An improved environment scanning electron microscope as recited in claim 19 wherein said recording means includes a current amplifier receiving the current collected at the detection means, said current amplifier floating at the detector bias voltage and coupled at full bandwidth to grounded video circuits.

Claim 28

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube, said housing having a pumping port therein; (b) an annular diaphragm of nonmagnetic material and a final magnetic annular diaphragm attached to said housing at different axial locations and extending inwardly of said housing, said diaphragms defining an interior passage which communicates with said pumping port; and (c) aperture means located within the central opening of said diaphragms to permit passage of said electron beam from said vacuum liner tube into said interior passage and then into the specimen chamber of said environmental scanning microscope and to limit passage of gas molecules from the said specimen chamber into the said interior passage.

Claim 29

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube, said housing having a pumping port therein; (b) an annular diaphragm of nonmagnetic material and a final magnetic annular diaphragm attached to said housing at different axial locations and extending inwardly of said housing, said diaphragms defining an interior passage which communicates with said pumping port; and (c) aperture means located within the central opening of said diaphragms to permit passage of said electron beam from said vacuum liner tube into said interior passage and then into the specimen chamber of said environmental scanning microscope and to limit passage of gas molecules from the said specimen chamber into the said interior passage.

Claim 30

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (b) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing a pumping port; (c) an annular diaphragm of nonmagnetic material and a final magnetic annular diaphragm attached to said housing at different axial locations and extending inwardly of said housing, said diaphragms defining an interior passage which communicates with said pumping port; and (d) a combination aperture holder and electron detector releasably received and sealed within the central openings of said diaphragms, said aperture holder having apertures therein for passage of the electron beam and gas into and out of the specimen chamber of the environmental scanning electron microscope and the said interior passage and having electron detector means associated with the lower portion thereof, said detector means being insulated from the body of said aperture holder.

Claim 31

An objective lens assembly for an environmental scanning electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube; (b) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing a pumping port; (c) an annular diaphragm of nonmagnetic material and a final magnetic annular diaphragm attached to said housing at different axial locations and extending inwardly of said housing, said diaphragms defining an interior passage which communicates with said pumping port; and (d) a combination aperture holder and electron detector releasably received and sealed within the central openings of said diaphragms, said aperture holder having apertures therein for passage of the electron beam and gas into and out of the specimen chamber of the environmental scanning electron microscope and the said interior passage and having electron detector means associated with the lower portion thereof, said detector means being insulated from the body of said aperture holder.

Claim 32

An objective lens assembly for an environmental electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube, said housing having upper and lower pumping parts therein axially distanced from one another; and (b) at least one annular diaphragm of nonmagnetic material and a final magnetic annular diaphragm attached to said housing at different axial locations and extending inwardly of said housing, said diaphragms defining at least two interior passage, each of which communicates with the said upper and lower pumping ports, respectively.

Claim 33

An objective lens assembly for an environmental electron microscope comprising: (a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube, said housing having upper and lower pumping parts therein axially distanced from one another; and (b) at least one annular diaphragm of nonmagnetic material and a final magnetic annular diaphragm attached to said housing at different axial locations and extending inwardly of said housing, said diaphragms defining at least two interior passage, each of which communicates with the said upper and lower pumping ports, respectively.