US4820927A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam source employing a photo-emitter cathode
Assignee: SK Hynix Inc
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Filing: 1987-09-15
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Granted: 1989-04-11
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Expires: 2007-09-15
Abstract
Abstract A scanned electron beam system employs an electron beam source using an NEA activated photo-emitter as the cathode. The activated photo-emitter cathode produces a pre-shaped electron beam having a relatively small spot focussed on a target plane. The beam is selectively deflected to scan the beam spot along the target plane to expose desired patterns on that plane. The distance between the cathode and anode can be made large enough to accommodate in situ replenishment of cathode material, such as Cesium, without obstructing the electron optical path. The system includes two vacuum chambers which are differentially pumped through respective ports. The first chamber, in which the anode and cathode are located, is utilized for establishing the required electrostatic field. The second chamber is employed to produce the necessary focussing and selective beam deflection.
Inventors
- 👤 Guenther O. Langner
- 👤 Kenneth J. Harte
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:35
CPC Classifications
B; B82; B82Y; B82Y10/00; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/06; H01J37/073; B82Y40/00; H01J37/30; H01J37/301; H01J37/317; H01J37/3174; H01J2237/00; H01J2237/18; H01J2237/188
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
309 words
An electron beam system for exposing at least one target area in a target plane to a beam spot focused in the target plane, said system comprising: diode gun emitter means for emitting a beam of electrons in parabolic trajectories, said diode gun emitter means comprising a source of light energy and a photocathode responsive to said light energy for emitting said electrons from an emitter surface of said photo-cathode; an apertured anode through which the emitted electrons pass, the tangents to the parabolic trajectories at said anode intersecting in a virtual cathode plane from which the electrons appear to emerge as generally conical beam pencils having a first semi-angle α 1 ; wherein said apertured anode includes a spot-shaping aperture through which the electrons pass in passing through said apertured anode; focusing means for focusing said electrons passing through said spot-shaping aperture into a plurality of converging beam pencils converging at the target plane at a second semi-angle α s within a beam spot area in said target plane, said beam spot area having a dimension b defined by said spot-shaping aperture and said focusing means; area-defining means for selectively defining an electron-emitting area portion of said emitter surface such that electrons are emitted only from said electron-emitting area, said electron-emitting area having at least one selectable dimension s corresponding to the dimension b of said beam spot area and established equal to or greater than t(bα 1 /pα s ), wherein p is a truncation factor having a value less than one by which said beam pencils are truncated to define α 1 , and t is a compensation factor greater than one accounting for imperfect imaging, beam jitter and noise; whereby current density and uniformity of the combination of said electrons at said target plane, within said beam spot area, are maximized by reduced electron-to-electron interaction.
Claim 2
Dependent Claim
309 words
An electron beam system for exposing at least one target area in a target plane to a beam spot focused in the target plane, said system comprising: diode gun emitter means for emitting a beam of electrons in parabolic trajectories, said diode gun emitter means comprising a source of light energy and a photocathode responsive to said light energy for emitting said electrons from an emitter surface of said photo-cathode; an apertured anode through which the emitted electrons pass, the tangents to the parabolic trajectories at said anode intersecting in a virtual cathode plane from which the electrons appear to emerge as generally conical beam pencils having a first semi-angle α 1 ; wherein said apertured anode includes a spot-shaping aperture through which the electrons pass in passing through said apertured anode; focusing means for focusing said electrons passing through said spot-shaping aperture into a plurality of converging beam pencils converging at the target plane at a second semi-angle α s within a beam spot area in said target plane, said beam spot area having a dimension b defined by said spot-shaping aperture and said focusing means; area-defining means for selectively defining an electron-emitting area portion of said emitter surface such that electrons are emitted only from said electron-emitting area, said electron-emitting area having at least one selectable dimension s corresponding to the dimension b of said beam spot area and established equal to or greater than t(bα 1 /pα s ), wherein p is a truncation factor having a value less than one by which said beam pencils are truncated to define α 1 , and t is a compensation factor greater than one accounting for imperfect imaging, beam jitter and noise; whereby current density and uniformity of the combination of said electrons at said target plane, within said beam spot area, are maximized by reduced electron-to-electron interaction.
Claim 3
Dependent Claim
94 words
The system according to claim 1 further comprising; a housing sub-divided into first and second vacuum chambers by a dividing wall oriented transverse to said beam, said first chamber having a transparent window therein, said photocathode being located inside said first chamber adjacent said window, said source being located outside said first chamber and oriented to illuminate said photocathode through said window, wherein said dividing wall has a communication aperture defined therethrough aligned with said window and said photocathode and smaller in size than the widest part of said beam within said first chamber.
Claim 4
Dependent Claim
69 words
The system according to claim 2 further comprising lens means for concentrating said beam in said first chamber to permit the beam to pass substantially completely through said communication aperture into said second chamber; wherein said focusing means comprises electron optical focusing and deflection means disposed in said second chamber for selectively focusing said beam on said target plane and selectively positioning said beam spot in said target plane.
Claim 5
Dependent Claim
38 words
The system according to claim 3 wherein said lens means is an einzel lens having a beam entrance plate comprising said apertured anode and a beam exit plate corresponding to at least a portion of said dividing wall.
Claim 6
Dependent Claim
25 words
The system according to claim 2 further comprising: means for differentially pumping said first and second chambers to create effective vacuum operating pressure conditions therein.
Claim 7
Dependent Claim
17 words
The system according to claim 2 further comprising means for selectively blocking and unblocking said communication aperture.
Claim 8
Dependent Claim
26 words
The system according to claim 1 wherein said area defining means comprises means for masking said photocathode to permit electron emission only from said electron-emitting area.
Claim 9
Dependent Claim
26 words
The system according to claim 1 wherein said area defining means comprises means for selectively illuminating only portions of said photocathode corresponding to said electron-emitting area.
Claim 10
Dependent Claim
35 words
The system according to claim 1 wherein said area-defining means comprises means for defining said electron-emitting area such that a minimum of approximately twenty percent of emitted beam current is delivered to the beam spot.
Claim 11
Independent Claim
262 words
A method for exposing at least one target area in a target plane to a beam spot focused in the target plane, said method comprising the steps of: emitting a beam of electrons in parabolic trajectories from an electron-emitting area of a photocathode emitter surface; passing the emitted electrons through an apertured anode such that the tangents to the parabolic trajectories at said anode intersect in a virtual cathode plane from which the electrons appear to emerge as generally conical beam pencils having a first semi-angle α s , said apertured anode including a spot-shaping aperture and wherein said step of passing includes passing the electrons through the spot-shaping aperture; focusing the electrons passing through said spot-shaping aperture into a plurality of converging beam pencils converging at the target plane at a second semi-angle α 1 within a beam spot area in said target plane, said beam spot area having a dimension b defined by said spot-shaping aperture and said focusing; selectively defining said electron-emitting area with at least one selectable dimension s corresponding to the dimension b of said beam spot area and established equal to or greater than t(bα 1 /pα s ), wherein p is a truncation factor having a value less than one by which said beam pencils are truncated to define α 1 , and t is a compensation factor greater than one accounting for imperfect imaging, beam jitter and noise; whereby current density and uniformly of the combination of said electrons at said target plane, within said beam spot area, is maximized by reduced electron-to-electron interaction.
Claim 12
Independent Claim
262 words
A method for exposing at least one target area in a target plane to a beam spot focused in the target plane, said method comprising the steps of: emitting a beam of electrons in parabolic trajectories from an electron-emitting area of a photocathode emitter surface; passing the emitted electrons through an apertured anode such that the tangents to the parabolic trajectories at said anode intersect in a virtual cathode plane from which the electrons appear to emerge as generally conical beam pencils having a first semi-angle α s , said apertured anode including a spot-shaping aperture and wherein said step of passing includes passing the electrons through the spot-shaping aperture; focusing the electrons passing through said spot-shaping aperture into a plurality of converging beam pencils converging at the target plane at a second semi-angle α 1 within a beam spot area in said target plane, said beam spot area having a dimension b defined by said spot-shaping aperture and said focusing; selectively defining said electron-emitting area with at least one selectable dimension s corresponding to the dimension b of said beam spot area and established equal to or greater than t(bα 1 /pα s ), wherein p is a truncation factor having a value less than one by which said beam pencils are truncated to define α 1 , and t is a compensation factor greater than one accounting for imperfect imaging, beam jitter and noise; whereby current density and uniformly of the combination of said electrons at said target plane, within said beam spot area, is maximized by reduced electron-to-electron interaction.
Claim 13
Dependent Claim
36 words
The method according to claim 10 wherein the step of selectively defining includes defining the electron-emitting area such that a minimum of approximately twenty percent of the emitted beam current is received at the target spot.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-10 | 1992-10-10 | 1993-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-10 | 1996-10-10 | 1997-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-10 | 2000-10-10 | 2001-04-11 | $7700.00 | Window Closed / Lapsed |