US4820788A
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US
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Poly(silyl silane)homo and copolymers
Assignee: Individual
•
Filing: 1986-10-31
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Granted: 1989-04-11
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Expires: 2006-10-31
Abstract
Abstract Poly(silyl silanes) have been prepared. They have high photosensitivity and excellent resistance to oxygen-reactive ion etching processes. They are useful as photodepolymerizable photoresists, barrier layers, etc.
Inventors
- 👤 John M. Zeigler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 17:06
CPC Classifications
C; C08; C08G; C08G77/00; C08G77/60; C08G77/48; C08G77/485; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0754
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
31 words
In a linear polysilane having a main chain of at least ten catenated Si atoms and pendant side groups, the improvement wherein at least one side group is a silyl group.
Claim 2
Dependent Claim
31 words
In a linear polysilane having a main chain of at least ten catenated Si atoms and pendant side groups, the improvement wherein at least one side group is a silyl group.
Claim 3
Dependent Claim
10 words
A linear poly(silyl silane) having at least ten recurring units.
Claim 4
Dependent Claim
10 words
A linear poly(silyl silane) having at least ten recurring units.
Claim 5
Dependent Claim
42 words
A poly(silyl silane) of claim 2 of the formula ##STR6## wherein each of A, B, C, D, E and F independently is organosilyl, poly(organosilyl), organo or H, at least one of A, B, C, D, E and F being organosilyl or poly(organosilyl).
Claim 6
Dependent Claim
9 words
A polymer of claim 3 of the formula ##STR7##
Claim 7
Dependent Claim
9 words
A polymer of claim 3 of the formula ##STR8##
Claim 8
Dependent Claim
26 words
A polymer of claim 3, wherein the chain length of side chain poly(organosilyl) groups is up to about one-half the chain length of the main chain.
Claim 9
Dependent Claim
17 words
A polymer of claim 3, wherein none of A, B, C, D, E and F is H.
Claim 10
Dependent Claim
19 words
A polymer of claim 3, wherein all of A, B, C, D, E and F are organosilyl or poly(organosilyl).
Claim 11
Dependent Claim
20 words
A polymer of claim 3, wherein only one of A, B, C, D, E and F is silyl or poly(organosilyl).
Claim 12
Dependent Claim
18 words
A polymer of claim 3, wherein at least two of A, C and E are silyl or poly(organosilyl).
Claim 13
Dependent Claim
23 words
A polymer of claim 3, wherein the organo portions are aliphatic or aromatic groups wherein said polymer is resistive to oxygen-reactive ion etching.
Claim 14
Dependent Claim
50 words
A polymer of claim 3, wherein the organo groups are C 1-15 -alkyl, C 3-15 -cycloalkyl, C 6-14 -aryl, C 7-20 -aralkyl or C 7-20 -alkaryl and those in the side chain silyl groups can also be organosilyl or poly(organosilyl) and n is at least 30, or C 2-7 -alkylene.
Claim 15
Dependent Claim
50 words
A polymer of claim 7, wherein the organo groups are C 1-15 -alkyl, C 3-15 -cycloalkyl, C 6-14 -aryl, C 7-20 -aralkyl or C 7-20 -alkaryl and those in the side chain silyl groups can also be organosilyl or poly(organosilyl) and n is at least 30, or C 2-7 -alkylene.
Claim 16
Dependent Claim
25 words
A polymer of claim 13, wherein the organic portions are methyl, ethyl, n- or i-propyl, t-butyl, cyclohexyl, phenyl, phenyl-C 1-3 -alkyl or C 1-3 -alkylphenyl.
Claim 17
Dependent Claim
12 words
A polymer of claim 13, wherein the silyl groups are trimethylsilyl groups.
Claim 18
Dependent Claim
35 words
A polymer of claim 13, wherein said organo groups are substituted by C 1-8 -alkyl, C 1-8 -alkoxy, C 6-10 -aryl, mono- or di(C 1-6 -alkyl)-amino, C 2-8 -alkanoyl, amino, hydroxy or C 2-8 -alkanoyloxy.
Claim 19
Dependent Claim
17 words
A polymer of claim 14, wherein only one side group of the polymer's repeating unit is silyl.
Claim 20
Dependent Claim
17 words
A polymer of claim 16, wherein only one side group of the polymer's repeating unit is silyl.
Claim 21
Dependent Claim
32 words
A copoly(silyl silane) of claim 3 of the formula ##STR9## wherein B and D are methyl and A and C are cyclohexyl/trimethylsilyl, t-butyl/trimethysilyl, i-propyl/trimethylsilyl or n-propyl/trimethylsilyl and n is at least 30.
Claim 22
Dependent Claim
32 words
A copoly(silyl silane) of claim 3 of the formula ##STR10## wherein B and D are methyl and A and C are cyclohexyl/triphenylsilyl, t-butyl/triphenylsilyl, i-propyl/triphenylsilyl or n-propyl/triphenylsilyl and n is at least 30.
Claim 23
Dependent Claim
32 words
A copoly(silyl silane) of claim 3 of the formula ##STR11## wherein B and D are methyl and A and C are cyclohexyl/triethylsilyl, t-butyl/triethylsilyl, i-propyl/triethylsilyl or n-propyl/triethylsilyl and n is at least 30.
Claim 24
Dependent Claim
8 words
A poly(silylsilane) of claim 2 in isolated form.
Claim 25
Dependent Claim
9 words
A poly(silylsilane) of claim 2 which is essentially oligomer-free.
Claim 26
Dependent Claim
9 words
A poly(silylsilane) of claim 2 which is substantially non-crystalline.
Claim 27
Dependent Claim
11 words
A poly(silylsilane) of claim 2 which is soluble in non-polar solvents.
Claim 28
Dependent Claim
10 words
A poly(silylsilane) of claim 2 which is substantially not crosslinked.
Claim 29
Dependent Claim
11 words
A poly(silylsilane) of claim 2 wherein n is at least 500.
Claim 30
Dependent Claim
11 words
A poly(silylsilane) of claim 2 wherein n is at least 1,000.
Claim 31
Dependent Claim
32 words
In a solid, linear polysilane having a main chain of at least ten catenated Si atoms and pendant side groups, the improvement wherein at least one side group is a silyl group.
Claim 32
Dependent Claim
32 words
In a solid, linear polysilane having a main chain of at least ten catenated Si atoms and pendant side groups, the improvement wherein at least one side group is a silyl group.
Claim 33
Dependent Claim
11 words
A solid, linear poly(silyl silane) having at least ten recurring units.
Claim 34
Dependent Claim
11 words
A solid, linear poly(silyl silane) having at least ten recurring units.
Claim 35
Dependent Claim
50 words
A solid, linear poly(silyl silane) of claim 30 of the formula ##STR12## wherein each of A, B, C, D, E and F independently is organosilyl, poly(organosilyl), organo or H, at least one of A, B, C, D, E and F being organosilyl or poly(organosilyl), and n is at least 10.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-10 | 1992-10-10 | 1993-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-10 | 1996-10-10 | 1997-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-10 | 2000-10-10 | 2001-04-11 | $7700.00 | Window Closed / Lapsed |