US4811077A
Expired / Lapsed
US
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Compound semiconductor surface termination
Assignee: International Business Machines Corp
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Filing: 1987-06-18
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Granted: 1989-03-07
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Expires: 2007-06-18
Abstract
Abstract A surface termination of a compound semiconductor is provided wherein conditions are provided for a pristine surface to be retained in an unpinned condition and a surface layer of a non-metallic material is provided. A GaAs substrate is heated in an oxygen-free atmosphere at high temperature with hydrogen sulfide, producing a pristine surface with a coating of gallium sulfide covered with a 1,000 nanometer covering of low temperature plasma enhanced chemical vapor deposited silicon dioxide.
Inventors
- 👤 Alan B. Fowler
- 👤 John L. Freeouf
- 👤 Peter D. Kirchner
- 👤 Alan C. Warren
- 👤 Jerry M. Woodall
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 19:26
CPC Classifications
H; H10; H10P; H10P50/00; H10P14/00; H10P14/60; H10P14/68; H10P14/683; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/6938; H10P14/6939; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
98 words
A compound semiconductor crystal intermediate manufacturing product comprising in combination a monocrystalline compound semiconductor substrate taken from the group of Ga or Al or In and As or Sb and monocrystalline ternary and quaternary alloys thereof having an unpinned Fermi level at the surface thereof, means for retaining said Fermi level in the unpinned condition including a layer of only a cation ingredient of said compound semiconductor and a member taken from the group of S, Se and Te in a thickness compatible with electrical current conduction through said layer, and a surface layer of a non-metallic material.
Claim 2
Dependent Claim
98 words
A compound semiconductor crystal intermediate manufacturing product comprising in combination a monocrystalline compound semiconductor substrate taken from the group of Ga or Al or In and As or Sb and monocrystalline ternary and quaternary alloys thereof having an unpinned Fermi level at the surface thereof, means for retaining said Fermi level in the unpinned condition including a layer of only a cation ingredient of said compound semiconductor and a member taken from the group of S, Se and Te in a thickness compatible with electrical current conduction through said layer, and a surface layer of a non-metallic material.
Claim 3
Dependent Claim
25 words
The intermediate manufacturing product of claim 1 wherein said compound semiconductor crystal is GaAs and said Fermi level pinning control layer is a Ga compound.
Claim 4
Dependent Claim
29 words
The intermediate manufacturing product of claim 1 wherein said non-metallic material is taken from the group of SiO 2 , CaF 2 , NaS, ZnS, GaP, GaSe and polyimides.
Claim 5
Dependent Claim
29 words
The intermediate manufacturing product of claim 2 wherein said non-metallic material is taken from the group of SiO 2 , CaF 2 , NaS, ZnS, GaP, GaSe and polyimides.
Claim 6
Dependent Claim
28 words
The intermediate manufacturing product of claim 1 wherein said means for retaining said Fermi level layer thickness is in a range of one monolayer to approximately 20 Angstroms.
Claim 7
Dependent Claim
31 words
The intermediate manufacturing product of claim 4 wherein said means for retaining said Fermi level layer thickness is in a range of the order of one monolayer to approximately 20 Angstroms.
Claim 8
Dependent Claim
21 words
The intermediate manufacturing product of claim 1 where the surface layer is in the range of 1 to 1000 nanometers thick.
Claim 9
Dependent Claim
21 words
The intermediate manufacturing product of claim 4 where the surface layer is in the range of 1 to 1000 nanometers thick.
Claim 10
Dependent Claim
21 words
The intermediate manufacturing product of claim 5 where the surface layer is in the range of 1 to 1000 nanometers thick.
Claim 11
Dependent Claim
21 words
The intermediate manufacturing product of claim 6 where the surface layer is in the range of 1 to 1000 nanometers thick.
References Cited (Backward Citations)
US4354198A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-03-06 | 1992-09-05 | 1993-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-03-06 | 1996-09-05 | 1997-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-03-06 | 2000-09-05 | 2001-03-07 | $7700.00 | Window Closed / Lapsed |