Abstract A high density optical detector mosaic array assembly having a plurality of interconnect locations comprised of IC readout pads in a pattern suitable for interconnecting a plurality of integrated circuit devices. The assembly comprises a substrate, a plurality of thin film metallization layers alternating with a plurality of thick film dielectric layers wherein the first of the thin film layers is deposited directly on the substrate and is delineated to form a plurality of interconnect lines disposed in a pattern suitable to form a first row of the dectector mosaic at a first edge of the assembly and terminating at an interconnect location. Terminal pads are applied to each such interconnect line and the first thick film dielectric layer is deposited over the thin film interconnect line such that only the terminal pads are left exposed. Each alternating layer of thick film and thin film layers are similarly disposed to form a complete interconnect pattern suitable for interconnecting with the integrated circuit devices and a plurality of detector rows forming the detector mosaic interconnect lines. Bonding pads are applied to the detector mosaic such that the fill factor for detectors is about 100% for bonding pads on centers in the range of about 25 micrometers.
A high density optical detector mosaic array assembly having a plurality of interconnect locations comprised of IC readout pads in a pattern suitable for interconnecting a plurality of integrated circuit devices comprising: a substrate: B. a plurality of metallization layers alternating with a plurality of dielectric layers thicker than said metallization layers wherein the first of the metallization layers is deposited directly on the substrate and is delineated to form a plurality of interconnect lines disposed in a pattern suitable to form a first row of the detector mosaic interconnect lines at a first edge of the assembly, the metallization layer terminating at an interconnect location whereon terminal pads are applied to each such interconnect line, and wherein the first dielectric layer is deposited over the interconnect lines such that only the terminal pads are left exposed and wherein each alternating layer of dielectric and metallization layers are similarly disposed to form a complete interconnect pattern suitable for interconnecting with the integrated circuit devices at a plurality of interconnect locations and to also form a plurality of detector rows forming the detector mosaic interconnect lines at the first edge of the assembly; and C. means for bonding detectors to the detector mosaic.
Claim 2
Dependent Claim
202 words
A high density optical detector mosaic array assembly having a plurality of interconnect locations comprised of IC readout pads in a pattern suitable for interconnecting a plurality of integrated circuit devices comprising: a substrate: B. a plurality of metallization layers alternating with a plurality of dielectric layers thicker than said metallization layers wherein the first of the metallization layers is deposited directly on the substrate and is delineated to form a plurality of interconnect lines disposed in a pattern suitable to form a first row of the detector mosaic interconnect lines at a first edge of the assembly, the metallization layer terminating at an interconnect location whereon terminal pads are applied to each such interconnect line, and wherein the first dielectric layer is deposited over the interconnect lines such that only the terminal pads are left exposed and wherein each alternating layer of dielectric and metallization layers are similarly disposed to form a complete interconnect pattern suitable for interconnecting with the integrated circuit devices at a plurality of interconnect locations and to also form a plurality of detector rows forming the detector mosaic interconnect lines at the first edge of the assembly; and C. means for bonding detectors to the detector mosaic.
Claim 3
Dependent Claim
16 words
The apparatus of claim 1 additionally including a plurality of detectors bonded to the bonding means.
Claim 4
Dependent Claim
34 words
The apparatus of claim 2 wherein the means for bonding detectors to the detector mosaic comprise nominally square bonding pads deposited on the terminating edges of the detector interconnect lines in the detector mosaic.
Claim 5
Dependent Claim
11 words
The apparatus of claim 3 wherein the substrate comprises aluminum oxide.
Claim 6
Dependent Claim
33 words
The apparatus of claim 4 wherein the detector interconnect lines are selected from the group consisting of gold/chrome, nickel, molybdenum, tungsten, and other conductor metals that can be deposited as a thin film.
Claim 7
Dependent Claim
14 words
The apparatus of claim 5 wherein the detectors are comprised of mercury cadmium telluride.
Claim 8
Dependent Claim
19 words
The apparatus of claim 6 wherein the detectors have an area of no greater than about 50 micrometers square.