US4800251A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for forming a resist pattern
Assignee: Toshiba Corp
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Filing: 1986-07-11
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Granted: 1989-01-24
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Expires: 2006-07-11
Abstract
Abstract A hot plate and temperature-holding plate are set in a vacuum chamber. A blank mask is taken into the vacuum chamber through an inlet port. The blank mask is placed on the hot plate. The interior pressure of vacuum chamber is reduced to a level ranging between 0.1 torr and 0.9 torr. Under this condition the blank mask is baked at a temperature of 100° C.±5° C. for 3 minutes. After the baking is brought to an end, the blank mask is carried by walking beams from the surface of the hot block to the surface of the temperature-holding plate. The blank mask is cooled to approximately room temperature on the temperature-holding plate. When the blank mask reaches the predetermined temperature level, a plasma is generated by a high frequency power source between the electrode plate, set above the blank mask and temperature-holding block, for the predetermined length of time, thereby descumming the blank mask.
Inventors
- 👤 Yasuo Matsuoka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 00:02
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; G; G03; G03F; G03F7/00; G03F7/26; G03F7/40
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
132 words
A resist pattern-forming apparatus which bakes a substrate on which a predetermined resist pattern has been developed and descums said substrate, comprising: a vacuum chamber operable to be mechanically evacuated; baking means set in said vacuum chamber to bake said substrate; temperature holding means provided in said vacuum chamber to maintain the baked substrate at a predetermined temperature; transport means for carrying said substrate from said baking means to said temperature holding means; descumming means for descumming a surface of said substrate while said temperature holding means maintains said surface at the predetermined temperature level; means for detecting the temperature of the substrate placed on said temperature-holding means; and means for operating said descumming means for a predetermined length of time at times when said detecting means detects the predetermined temperature level.
Claim 2
Dependent Claim
132 words
A resist pattern-forming apparatus which bakes a substrate on which a predetermined resist pattern has been developed and descums said substrate, comprising: a vacuum chamber operable to be mechanically evacuated; baking means set in said vacuum chamber to bake said substrate; temperature holding means provided in said vacuum chamber to maintain the baked substrate at a predetermined temperature; transport means for carrying said substrate from said baking means to said temperature holding means; descumming means for descumming a surface of said substrate while said temperature holding means maintains said surface at the predetermined temperature level; means for detecting the temperature of the substrate placed on said temperature-holding means; and means for operating said descumming means for a predetermined length of time at times when said detecting means detects the predetermined temperature level.
Claim 3
Dependent Claim
22 words
The resist pattern-forming apparatus according to claim 1, wherein said baking means includes a hot plate for heating the substrate placed thereon.
Claim 4
Dependent Claim
27 words
The resist pattern-forming apparatus according to claim 2, wherein said temperature-holding means includes means for maintaining the baked substrate at a temperature lower than the baking temperature.
Claim 5
Dependent Claim
56 words
The resist pattern-forming apparatus according to claim 3, wherein said temperature-holding means includes a temperature-holding plate provided with an internal heater and a pipe through which a cooling medium circulates; and said substrate is placed on said temperature-holding plate to be maintained at the predetermined temperature level by holding means of said heater and cooling medium.
Claim 6
Dependent Claim
42 words
The resist pattern-forming apparatus according to claim 4 wherein said temperature-holding plate has a top wall, said hot plate has an upper surface, and the top wall of said temperature-holding plate is positioned lower than the upper surface of said hot plate.
Claim 7
Dependent Claim
21 words
The resist pattern-forming apparatus according to claim 1, wherein said transport means includes walking beams for carrying said substrate on it.
Claim 8
Dependent Claim
44 words
The resist pattern-forming apparatus according to claim 6, wherein said transport means comprises a first cylinder and piston for moving said walking beams in a substantially horizontal direction, and a second cylinder and piston for carrying said walking beams in a substantially vertical direction.
Claim 9
Dependent Claim
38 words
The resist pattern-forming apparatus according to claim 4, wherein said descumming means includes a pair of electrodes and a high frequency power source, and a plasma is generated between said paired electrodes by said high frequency power source.
Claim 10
Dependent Claim
18 words
The resist pattern-forming apparatus according to claim 8, wherein said temperature-holding plate constitutes one of said paired electrodes.
Claim 11
Dependent Claim
70 words
The resist pattern-forming apparatus according to claim 1, wherein said means for operating said descumming means includes means for controlling the substrate temperature during the descumming operation and the length of time of said descumming operation in accordance with the relationship between a value arrived at by multiplying the substrate temperature, during the descumming operation, by the duration of said descumming operation and the dimensional variations of the resist pattern.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-24 | 1992-07-25 | 1993-01-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-24 | 1996-07-25 | 1997-01-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-24 | 2000-07-25 | 2001-01-24 | $7700.00 | Window Closed / Lapsed |