US4798739A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma-assisted method for thin film fabrication
Assignee: SOLEMS 3 RUE LEON BLUM ZI LES GLAISES 91120 PALAISEAU (FRANCE) A CORP OF FRANCE SA
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Filing: 1986-10-21
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Granted: 1989-01-17
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Expires: 2006-10-21
Abstract
Abstract A device has a low-pressure tank placed inside an airtight chamber for plasma-depositing onto at least two substrata spaced apart in a substantial parallel relationship in the tank thin films. To effect the decomposition of the gas reagent inside the tank, at least one perforated polarized plasma generating electrode is interposed between the substrate. The airtight chamber has a pressure lower than that of the tank.
Inventors
- 👤 Jacques Schmitt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:43
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/515
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
81 words
Process of forming thin films by means of a plasma assisted chemical deposit of the type having a non-airtight tank in which is enclosed at least one reagent gas, at least one substratum in the form of a support plate for the thin films, and at least one polarized plasma-generating electrode, the process comprising the steps of: placing the tank inside an airtight chamber; and maintaining lower pressure in the airtight chamber than in the tank wherein the reagent gas circulates.
Claim 2
Dependent Claim
81 words
Process of forming thin films by means of a plasma assisted chemical deposit of the type having a non-airtight tank in which is enclosed at least one reagent gas, at least one substratum in the form of a support plate for the thin films, and at least one polarized plasma-generating electrode, the process comprising the steps of: placing the tank inside an airtight chamber; and maintaining lower pressure in the airtight chamber than in the tank wherein the reagent gas circulates.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-17 | 1992-07-18 | 1993-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-17 | 1996-07-18 | 1997-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-17 | 2000-07-18 | 2001-01-17 | $7700.00 | Window Closed / Lapsed |