Patent US4795692A successfully refreshed from Google Patents.
US4795692A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Negative-working polymers useful as X-ray or E-beam resists
Assignee: Eastman Kodak Co
•
Filing: 1987-02-02
•
Granted: 1989-01-03
•
Expires: 2007-02-02
Abstract
Abstract Radiation-sensitive interpolymers comprising 10-90 mole % of a polymerized maleimide monomer are useful as resists having high sensitivity to E-beams or X-rays.
Inventors
- 👤 Charles C. Anderson
- 👤 Kristine M. Kolterman
- 👤 Sam R. Turner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 14:29
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0388; C; C08; C08F; C08F222/00; C08F222/36; C08F222/40; Y; Y10; Y10S; Y10S430/00; Y10S430/167; Y10S430/168
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
144 words
An alternating copolymer having a number average molecular weight between 10,000 and 100,000 which is sensitive to X-ray radiation and capable of being coated and developed to form a negative-working resist, said polymer having therein recurring units having the structural formula: ##STR4## wherein: R is H or methyl, R 1 and R 2 are independently H, halo or alkyl; L is a linking group; n is 0 or 1; X is selected from the group consisting of Br I, Si(CH 3 ) 3 , Sn(CH 3 ) 3 , CH 2 Br, CH 2 Cl, CH 2 I, CH 2 Si(CH 3 ) 3 , CH 2 Sn(CH 3 ) 3 and OH, and Y is selected from the group consisting of --C.tbd.CR 5 and --CR 6 ═CHR 7 where R 5 , R 6 and R 7 are independently H, halo or alkyl.
Claim 2
Dependent Claim
144 words
An alternating copolymer having a number average molecular weight between 10,000 and 100,000 which is sensitive to X-ray radiation and capable of being coated and developed to form a negative-working resist, said polymer having therein recurring units having the structural formula: ##STR4## wherein: R is H or methyl, R 1 and R 2 are independently H, halo or alkyl; L is a linking group; n is 0 or 1; X is selected from the group consisting of Br I, Si(CH 3 ) 3 , Sn(CH 3 ) 3 , CH 2 Br, CH 2 Cl, CH 2 I, CH 2 Si(CH 3 ) 3 , CH 2 Sn(CH 3 ) 3 and OH, and Y is selected from the group consisting of --C.tbd.CR 5 and --CR 6 ═CHR 7 where R 5 , R 6 and R 7 are independently H, halo or alkyl.
Claim 3
Dependent Claim
142 words
A negative-working photoresist element comprising a substrate and having thereon a coating of an X-ray radiation sensitive alternating copolymer having a number average molecular weight between 10,000 and 100,000, said polymer having therein recurring units having the structural formula: ##STR5## wherein: R is H or methyl, R 1 and R 2 are independently H, halo or alkyl; L is a linking group; n is 0 or 1; X is selected from the group consisting of Br I, Si(CH 3 ) 3 , Sn(CH 3 ) 3 , CH 2 Br, CH 2 Cl, CH 2 I, CH 2 Si(CH 3 ) 3 , CH 2 Sn(CH 3 ) 3 and OH, and Y is selected from the group consisting of --C.tbd.CR 5 and --CR 6 ═CHR 7 where R 5 , R 6 and R 7 are independently H, halo or alkyl.
Claim 4
Dependent Claim
142 words
A negative-working photoresist element comprising a substrate and having thereon a coating of an X-ray radiation sensitive alternating copolymer having a number average molecular weight between 10,000 and 100,000, said polymer having therein recurring units having the structural formula: ##STR5## wherein: R is H or methyl, R 1 and R 2 are independently H, halo or alkyl; L is a linking group; n is 0 or 1; X is selected from the group consisting of Br I, Si(CH 3 ) 3 , Sn(CH 3 ) 3 , CH 2 Br, CH 2 Cl, CH 2 I, CH 2 Si(CH 3 ) 3 , CH 2 Sn(CH 3 ) 3 and OH, and Y is selected from the group consisting of --C.tbd.CR 5 and --CR 6 ═CHR 7 where R 5 , R 6 and R 7 are independently H, halo or alkyl.
Claim 5
Dependent Claim
42 words
An alternating copolymer having a number average molecular weight between 10,000 and 100,000 which is sensitive to X-ray radiation and capable of being coated and developed to form a negative-working resist, said polymer having therein recurring units having the structural formula: ##STR6##
Claim 6
Dependent Claim
42 words
An alternating copolymer having a number average molecular weight between 10,000 and 100,000 which is sensitive to X-ray radiation and capable of being coated and developed to form a negative-working resist, said polymer having therein recurring units having the structural formula: ##STR6##
Claim 7
Dependent Claim
12 words
The polymer of claim 1 wherein L is alkylene, arylene or arylenealkylene.
Claim 8
Dependent Claim
11 words
The polymer of claim 4 wherein L is methylene or phenylene.
Claim 9
Dependent Claim
20 words
The polymer of claim 1 wherein Y is selected from the group consisting of --CH═CH 2 , --C.tbd.CH, and --CBr═CHBr.
Claim 10
Dependent Claim
12 words
The element of claim 2 wherein L is alkylene, arylene or arylenealkylene.
Claim 11
Dependent Claim
11 words
The element of claim 2 wherein L is methylene or phenylene.
Claim 12
Dependent Claim
20 words
The element of claim 2 wherein Y is selected from the group consisting of --CH═CH 2 , --C.tbd.CH, and --CBr═CHBr.
References Cited (Backward Citations)
US2650215A
Cited
US3857822A
Cited
US4158731A
Cited
US4289842A
Cited
US4532332A
Cited
US4568734A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-03 | 1992-07-04 | 1993-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-03 | 1996-07-04 | 1997-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-03 | 2000-07-04 | 2001-01-03 | $7700.00 | Window Closed / Lapsed |