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US4795680A Expired / Lapsed US ⏱️ 0.0 years remaining

Polyimide-siloxanes, method of making and use

Assignee: General Electric Co
•
Filing: 1987-02-05
•
Granted: 1989-01-03
•
Expires: 2007-02-05
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Abstract

Abstract Polyimide-siloxanes are provided resulting from the intercondensation of organic diamines with organosiloxanes having terminal silyl-substituted aromatic organic anhydride groups. Semiconductor devices and composites using such polyimidesiloxanes as dielectric or passivating layers, films, adhesives and composites are also provided.

Inventors

  • 👤 Jonathan D. Rich
  • 👤 Peter P. Policastro
  • 👤 Pamela K. Hernandez

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 12:34
CPC Classifications
C; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1057; C08G73/106; B; B32; B32B; B32B15/00; B32B15/04; B32B15/08; B32B27/00; B32B27/28; B32B27/281; C08G77/00; C08G77/04; C08G77/14; C08G77/42; C08G77/452; C08G77/455; C08G77/48; C08G77/54; H; H10; H10W; H10W74/00; H10W74/40; H10W74/47; H10W74/476; B32B2379/00; B32B2379/08; B32B2383/00; B32B2457/00; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31663

Claims Analysis

Total Claims: 42
Claim 1
Independent Claim 101 words
Polyimide-siloxane comprising repeat groups selected from the class consisting of, ##STR23## a mixture thereof, and mixtures of such groups with imide groups of the formula ##STR24## wherein R is selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organoterminated polydiorganosiloxane, R 3 is a tetravalent C.sub.(1-14) aromatic organic radical, and n is an integer equal to 5 to about 2000 inclusive.
Claim 2
Dependent Claim 101 words
Polyimide-siloxane comprising repeat groups selected from the class consisting of, ##STR23## a mixture thereof, and mixtures of such groups with imide groups of the formula ##STR24## wherein R is selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organoterminated polydiorganosiloxane, R 3 is a tetravalent C.sub.(1-14) aromatic organic radical, and n is an integer equal to 5 to about 2000 inclusive.
Claim 3
Dependent Claim 138 words
Polyimide-siloxane having recurring chemically combined imide-siloxane groups comprising the anhydride-amine intercondensation reaction product of (A) a mixture of anhydrides comprising (i) organic dianhydride, and (ii) siloxane anhydride having chemically-combined units of the formula, ##STR25## or such siloxane anhydride units chemically-combined with siloxane units of the formula, ##STR26## intercondensed with (B) diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, where R is a member selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radical substituted with radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorganosiloxane radical, a is a whole number equal to 0 to 2 inclusive, and b is a whole number equal to 0 to 3 inclusive.
Claim 4
Dependent Claim 138 words
Polyimide-siloxane having recurring chemically combined imide-siloxane groups comprising the anhydride-amine intercondensation reaction product of (A) a mixture of anhydrides comprising (i) organic dianhydride, and (ii) siloxane anhydride having chemically-combined units of the formula, ##STR25## or such siloxane anhydride units chemically-combined with siloxane units of the formula, ##STR26## intercondensed with (B) diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, where R is a member selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radical substituted with radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorganosiloxane radical, a is a whole number equal to 0 to 2 inclusive, and b is a whole number equal to 0 to 3 inclusive.
Claim 5
Dependent Claim 123 words
Polyimide-siloxane in accordance with claim 2, which comprises by weight, from 5% to 95% of siloxane-imide repeat groups of the formula, ##STR27## chemically-combined with 95% to 5% of imide groups of the formula, ##STR28## where R is a member selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorganosiloxane radical, R 3 is a tetravalent C.sub.(6-14) aromatic organic radical, c is an integer equal to 1 to 200 inclusive, and n is an integer equal to 1 to about 2,000 inclusive.
Claim 6
Dependent Claim 39 words
Polyimide siloxane in accordance with claim 2, where the siloxane anhydride has the formula, ##STR29## where R is a C.sub.(1-14) monovalent hydrocarbon radical or a C.sub.(1-14) monovalent hydrocarbon radical substituted with the same or different radicals neutral during intercondensation.
Claim 7
Dependent Claim 50 words
Polyimide-siloxane in accordance with claim 2, where the siloxane anhydride is ##STR30## R is a member selected from the class consisting of C.sub.(1-14) monoval®nt hydrocarbon radicals, and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, and n is an integer equal to about 1 to about 2,000 inclusive.
Claim 8
Dependent Claim 48 words
Polyimide-siloxane in accordance with claim 2, where the siloxane anhydride is ##STR31## R is a member selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, and m is an integer equal to 1 to 3 inclusive.
Claim 9
Dependent Claim 14 words
Polyimide-siloxane in accordance with claim 2, where the organic anhydride is an aromatic bis(etheranhydride).
Claim 10
Dependent Claim 13 words
Polyimide-siloxane in accordance with claim 2, where the organic dianhydride is 2,2-bis[4-(3,4-dicarboxyphenoxy)phenyl]propane dianhydride.
Claim 11
Dependent Claim 13 words
Polyimide-siloxane in accordance with claim 2, where the organic dianhydride is pyromellitic dianhydride.
Claim 12
Dependent Claim 13 words
Polyimide-siloxane in accordance with claim 2, where the organic dianhydride is benzophenone dianhydride.
Claim 13
Dependent Claim 13 words
Polyimide-siloxane in accordance with claim 2, where the organic dianhydride is oxy-bis-(4-phthalic anhydride).
Claim 14
Dependent Claim 13 words
Polyimide-siloxane in accordance with claim 2, where the organic dianhydride is 5,5'-(1,1,3,3-tetramethyl-1,3-disiloxanediyl)-bisnorbornane-2,3 -dicarboxylicanhydride.
Claim 15
Dependent Claim 12 words
Polyimide-siloxane in accordance with claim 2, where the diamine is p-phenylene diamine.
Claim 16
Dependent Claim 11 words
Polyimide-siloxane in accordance with claim 2, where the diamine is 4,4?-oxydianiline.
Claim 17
Dependent Claim 12 words
Polyimide-siloxane in accordance with claim 2, where the diamine is m-phenylene diamine.
Claim 18
Dependent Claim 77 words
Polyimide-siloxane comprising chemically-combined siloxane-imide repeat groups of the formula, ##STR32## where R is selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo-terminated polydiorganosiloxane radical, and n is an integer equal to 5 to about 2000 inclusive.
Claim 19
Dependent Claim 77 words
Polyimide-siloxane comprising chemically-combined siloxane-imide repeat groups of the formula, ##STR32## where R is selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo-terminated polydiorganosiloxane radical, and n is an integer equal to 5 to about 2000 inclusive.
Claim 20
Dependent Claim 111 words
Polyamideacid-siloxane comprising chemically-combined units resulting from the intercondensation of substantially equal molar amounts of amine and anhydride from a mixture of organic dianhydride, siloxane anhydride of the formula, ##STR33## and diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, where R is a member selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with the same or different radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorganosiloxane radical, and n is an integer equal to 5 to about 2,000 inclusive.
Claim 21
Dependent Claim 111 words
Polyamideacid-siloxane comprising chemically-combined units resulting from the intercondensation of substantially equal molar amounts of amine and anhydride from a mixture of organic dianhydride, siloxane anhydride of the formula, ##STR33## and diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, where R is a member selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with the same or different radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorganosiloxane radical, and n is an integer equal to 5 to about 2,000 inclusive.
Claim 22
Dependent Claim 95 words
Polyamideacid-siloxane comprising the intercondensation reaction product of substantially equal molar amounts of amine and anhydride resulting from agitating a mixture or organic dianhydride, and siloxane anhydride of the formula, ##STR34## with diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, in the presence of an organic solvent, where R is a member selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, and R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorganosiloxane radical.
Claim 23
Dependent Claim 95 words
Polyamideacid-siloxane comprising the intercondensation reaction product of substantially equal molar amounts of amine and anhydride resulting from agitating a mixture or organic dianhydride, and siloxane anhydride of the formula, ##STR34## with diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, in the presence of an organic solvent, where R is a member selected from the class consisting of C.sub.(1-14) monovalent hydrocarbon radicals and C.sub.(1-14) monovalent hydrocarbon radicals substituted with radicals neutral during intercondensation, and R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorganosiloxane radical.
Claim 24
Dependent Claim 12 words
Polyamide acid-siloxane of claim 17, where the organic dianhydride is bisphenol-A dianhydride.
Claim 25
Dependent Claim 11 words
Polyamideacid-siloxane of claim 17, where the organic dianhydride is benzophenone dianhydride.
Claim 26
Dependent Claim 11 words
Polyamideacid-siloxane of claim 17, where the organic dianhydride is oxybisphthalic anhydride.
Claim 27
Dependent Claim 11 words
Polyamideacid-siloxane of claim 17, where the organic dianhydride is pyromellitic dianhydride.
Claim 28
Dependent Claim 141 words
A composite comprising a polyimide layer and a metal layer and an intermediate layer of polyimide siloxane comprising the intercondensation reaction product of (A) siloxane anhydride having chemically combined units of the formula, ##STR35## and or a mixture of such siloxane anhydride units chemically combined with siloxane units of the formula, ##STR36## (B) organic diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, where R is a C.sub.(1-14) monovalent hydrocarbon radical or a C.sub.(1-14) monovalent hydrocarbon radical substituted with the same or different radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorgano siloxane radical, a is a whole number equal to 0 to 2 inclusive, and b is a whole number equal to 0 to 3 inclusive.
Claim 29
Dependent Claim 141 words
A composite comprising a polyimide layer and a metal layer and an intermediate layer of polyimide siloxane comprising the intercondensation reaction product of (A) siloxane anhydride having chemically combined units of the formula, ##STR35## and or a mixture of such siloxane anhydride units chemically combined with siloxane units of the formula, ##STR36## (B) organic diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, where R is a C.sub.(1-14) monovalent hydrocarbon radical or a C.sub.(1-14) monovalent hydrocarbon radical substituted with the same or different radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorgano siloxane radical, a is a whole number equal to 0 to 2 inclusive, and b is a whole number equal to 0 to 3 inclusive.
Claim 30
Dependent Claim 17 words
A composite comprising glass fiber, carbon fiber, or polyamide fiber and the polyimide siloxane of claim 2.
Claim 31
Dependent Claim 16 words
A composite comprising glass fiber, carbon fiber, or polyamide fiber and the polyimide-siloxane of claim 16.
Claim 32
Dependent Claim 8 words
A polyimide-siloxane film in accordance with claim 2.
Claim 33
Dependent Claim 8 words
A polyimide-siloxane film in accordance with claim 16.
Claim 34
Dependent Claim 138 words
A semiconductor device having a layer of a polyimide-siloxane having recurring chemically combined imidesiloxane groups comprising the intercondensation reaction product of (A) siloxane anhydride having chemically combined units of the formula, ##STR37## or a mixture of such siloxane anhydride units chemically combined with siloxane units of the formula ##STR38## (B) organic diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, where R is a C.sub.(1-14) monovalent hydrocarbon radical or a C.sub.(1-14) monovalent hydrocarbon radical substituted with the same or different radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorgano siloxane radical, a is a whole number equal to 0 to 2 inclusive, and b is a whole number equal to 0 to 3 inclusive.
Claim 35
Dependent Claim 138 words
A semiconductor device having a layer of a polyimide-siloxane having recurring chemically combined imidesiloxane groups comprising the intercondensation reaction product of (A) siloxane anhydride having chemically combined units of the formula, ##STR37## or a mixture of such siloxane anhydride units chemically combined with siloxane units of the formula ##STR38## (B) organic diamine of the formula, NH.sub.2 R.sup.2 NH.sub.2, where R is a C.sub.(1-14) monovalent hydrocarbon radical or a C.sub.(1-14) monovalent hydrocarbon radical substituted with the same or different radicals neutral during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorgano siloxane radical, a is a whole number equal to 0 to 2 inclusive, and b is a whole number equal to 0 to 3 inclusive.
Claim 36
Dependent Claim 125 words
A semiconductor device having as a dielectric layer, a polyimide-siloxane comprising chemically combined siloxaneimide repeat groups of the formula, ##STR39## or a mixture of such siloxaneimide repeat groups and imide groups of the formula, ##STR40## where R is selected from the class consisting of a C.sub.(1-14) monovalent hydrocarbon radical and a C.sub.(1-14) monovalent hydrocarbon radical substituted with radicals inert during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorgano siloxane radical, R 3 is a tetravalent C.sub.(6-13) aromatic organic radical, c is an integer equal to 1 to 200 inclusive, and m is an integer equal to 1 to about 3 inclusive.
Claim 37
Dependent Claim 125 words
A semiconductor device having as a dielectric layer, a polyimide-siloxane comprising chemically combined siloxaneimide repeat groups of the formula, ##STR39## or a mixture of such siloxaneimide repeat groups and imide groups of the formula, ##STR40## where R is selected from the class consisting of a C.sub.(1-14) monovalent hydrocarbon radical and a C.sub.(1-14) monovalent hydrocarbon radical substituted with radicals inert during intercondensation, R 1 is a C.sub.(6-14) trivalent aromatic organic radical, R 2 is a member selected from the class consisting of a C.sub.(2-20) divalent organic radical and a C.sub.(2-8) organo terminated polydiorgano siloxane radical, R 3 is a tetravalent C.sub.(6-13) aromatic organic radical, c is an integer equal to 1 to 200 inclusive, and m is an integer equal to 1 to about 3 inclusive.
Claim 38
Dependent Claim 24 words
A semiconductor device in accordance with claim 29, where the polyimide-siloxane layer comprises the intercondensation reaction product of 1,3-bis(3,4-dicarboxyphenyl)-1, 3,3-tetramethyldisiloxane dianhydride and 4,440 -diaminodiphenylether.
Claim 39
Dependent Claim 22 words
A semiconductor device in accordance with claim 29, resulting from the intercondensation of a mixture of 1,3-bis(3,4-dicarboxyphenyl)-1,1,3,3-tetramethyldisiloxane dianhydride and oxy-bis(4-phthalicanhydride) and 4,4-diaminodiphenylether.
Claim 40
Dependent Claim 30 words
A semiconductor device in accordance with claim 29, resulting from the intercondensation product of a mixture of 1,3-bis(3,4-dicarboxyphenyl)-1,1,3,3-tetramethyldisiloxane dianhydride, pyromellitic dianhydride and a mixture of para and meta phenylene diamine.
Claim 41
Dependent Claim 29 words
A semiconductor device in accordance with claim 29 resulting from the intercondensation product of 1,3-bis(3,4-dicarboxyphenyl)-1,1,3,3-tetramethyldisiloxane dianhydride, benzophenone tetracarboxylic acid anhydride and a mixture of para and meta phenylene diamine.
Claim 42
Dependent Claim 25 words
A semiconductor device in accordance with claim 29 resulting from the intercondensation product of 1,3-bis(3,4-dicarboxyphenyl)-1,1,3,3-tetramethyldisiloxane dianhydride, oxy-bis(4-phthalicanhydride) and mixture of para and meta phenylene diamine.

References Cited (Backward Citations)

US4011198A Cited
US4017340A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-01-03 1992-07-04 1993-01-03 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-01-03 1996-07-04 1997-01-03 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-01-03 2000-07-04 2001-01-03 $7700.00 Window Closed / Lapsed

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