Sub-nyquist interferometry

Claim 3

The method of interferometry claimed in claim 1, wherein said a priori knowledge is that the phase values have continuous derivatives, and that there is a region in the interferogram where the absolute phase changes by less than π per sample, and further including the step of starting said step of reconstructing absolute phase values in said region.

Claim 4

The method of interferometry claimed in claim 1, wherein said a priori knowledge is the location of a step discontinuity in the interferogram, and the absolute value of the step is known to within less than π.

Claim 5

The method of interferometry claimed in claim 1, wherein the method is phase-shifting interferometry.

Claim 6

Apparatus for performing surface measurement interferometry, comprising: a. means for forming an interferogram; b. means for sampling phase values modulo 2π of the interferogram at an array of sampling locations; c. means for reconstructing (i.e. removing 2π phase discontinuities to produce) absolute phase values from said phase values modulo 2π by adding or subtracting multiples of 2π, including means for constraining the reconstruction of said absolute phase values based upon a priori knowledge of the absolute phase values such that the absolute phase values are correctly reconstructed when the absolute phase changes by more than π per sample location.

Claim 7

Apparatus for performing surface measurement interferometry, comprising: a. means for forming an interferogram; b. means for sampling phase values modulo 2π of the interferogram at an array of sampling locations; c. means for reconstructing (i.e. removing 2π phase discontinuities to produce) absolute phase values from said phase values modulo 2π by adding or subtracting multiples of 2π, including means for constraining the reconstruction of said absolute phase values based upon a priori knowledge of the absolute phase values such that the absolute phase values are correctly reconstructed when the absolute phase changes by more than π per sample location.

Claim 8

The apparatus claimed in claim 5, wherein said a priori knowledge is the knowledge that the phase values are represented by a function having continuous derivatives, and that there is a region in the interferogram where the phase changes by less than π per sample location, and said reconstructing means beginning said reconstruction at said region, and proceeding outwardly therefrom.

Claim 9

the apparatus claimed in claim 6, including means for displaying said interferogram, and means for generating a signal representing a region on said display where the interferogram is free from aliasing, said signal being supplied to said reconstructing means for indicating said starting location.

Claim 10

The apparatus claimed in claim 5, wherein said a priori knowledge is the knowledge of the location and height of a step discontinuity in phase to within less than π.

Claim 11

The apparatus claimed in claim 5, wherein said apparatus is a phase shifting interferometer and said means for sampling the phase values modulo 2π is a sparse array of image sensing elements having g=a/x x less than 0.5 , where a is the width of the image sensing elements and x s is the pitch.

Claim 12

The apparatus claimed in claim 9 wherein G=0.1.

Claim 13

Apparatus for measuring the spatial distribution of phase differences between a test beam and a reference beam of coherent monochromatic light by phase-shifting interferometry, comprising: a. means for superposing the test beam and reference beam to form an interference pattern; b. means for detecting the intensity of the interference pattern and for generating signals representing the intensity of the interference pattern at a sparse array of sampling locations; c. means for displacing the relative phase of the reference beam and the test beam by fractions of a wavelength of the light; d. means for providing a starting location signal indicating a neighborhood of sampling locations where the phase between the test beam and the reference beam does not change by more than π between adjacent sampling locations in the neighborhood; and e. signal processing means connected to said detecting means and said starting location signal providing means and responsive to the starting location signal and the signals representing the intensity of the interference pattern detected at three or more relative phase displacements to produce a signal representing the absolute phase values of said interference pattern at each of said sampling locations, said signal processing means including, (1) means responsive to the signals representing the intensity of the interference pattern detected at three or more relative phase displacements for generating signals representing phase values modulo 2π at each sampling location, and (2) means connected to said means for generating signals representing phase values modulo 2π responsive to the signals representing phase values modulo 2π for reconstructing (i.e. removing 2π phase discontinuities to produce) an absolute phase value at each of said sampling locations, said reconstructing means starting said reconstruction at said starting location, and reconstructing said absolute phase values according to the constraints that the spatial distribution and one or more derivatives of the spatial distribution of the phase values are continuous functions.

Claim 14

Apparatus for measuring the spatial distribution of phase differences between a test beam and a reference beam of coherent monochromatic light by phase-shifting interferometry, comprising: a. means for superposing the test beam and reference beam to form an interference pattern; b. means for detecting the intensity of the interference pattern and for generating signals representing the intensity of the interference pattern at a sparse array of sampling locations; c. means for displacing the relative phase of the reference beam and the test beam by fractions of a wavelength of the light; d. means for providing a starting location signal indicating a neighborhood of sampling locations where the phase between the test beam and the reference beam does not change by more than π between adjacent sampling locations in the neighborhood; and e. signal processing means connected to said detecting means and said starting location signal providing means and responsive to the starting location signal and the signals representing the intensity of the interference pattern detected at three or more relative phase displacements to produce a signal representing the absolute phase values of said interference pattern at each of said sampling locations, said signal processing means including, (1) means responsive to the signals representing the intensity of the interference pattern detected at three or more relative phase displacements for generating signals representing phase values modulo 2π at each sampling location, and (2) means connected to said means for generating signals representing phase values modulo 2π responsive to the signals representing phase values modulo 2π for reconstructing (i.e. removing 2π phase discontinuities to produce) an absolute phase value at each of said sampling locations, said reconstructing means starting said reconstruction at said starting location, and reconstructing said absolute phase values according to the constraints that the spatial distribution and one or more derivatives of the spatial distribution of the phase values are continuous functions.

Claim 15

The apparatus claimed in claim 11, wherein said detecting means comprises a rectangular area array image sensor having a sparse array of image sensing elements.

Claim 16

The apparatus claimed in claim 12, wherein said image sensing array is characterized by G=a/x s =0.1 where a is the width of said image sensing elements in said array and x s is the pitch of elements in the array.

Claim 17

The apparatus claimed in claim 11, wherein said detecting means comprises a rectangular area array image sensor having an overlying mask defining a sparse array of apertures.

Claim 18

The apparatus claimed in claim 14, wherein said array of apertures is characterized by G=a/x s =0.1 where a is the width of one of said apertures, and x s is the pitch of apertures in the array.

Claim 19

The apparatus claimed in claim 11, wherein said apparatus comprises a Twyman-Green interferometer including a test surface and a reference surface for generating said test beam and said reference beam respectively, and said means for displacing the relative phase of the reference beam includes a piezoelectric driver for displacing said reference surface.

Claim 20

The apparatus claimed in claim 11, wherein said signal processing means comprises a digital computer.

Claim 21

The apparatus claimed in claim 17, further comprising means for generating a visual display of said interference pattern, and said means for providing a starting location signal comprising means for entering data representing the x,y coordinates of a selected region of said visual display into said digital computer.

Claim 22

The apparatus claimed in claim 11, wherein the intensity of the interference pattern is displaced and detected at four relative phase displacements separated by equal steps of π/2, and the means for generating a phase value modulo 2π solves the following equation: ##EQU5## where φ(x,y) is the phase value modulo 2π at sampling location (x,y), and i n (x,y) is the measured intensity for the n th phase displacement at sampling location (x,y).

Claim 23

The apparatus claimed in claim 19, wherein said means for reconstructing absolute phase values from phase values modulo 2π reconstructs two or more adjacent rows (or columns) having samples in the neighborhood of the starting location, then reconstructs the columns (or rows) of values from the values in the two or more reconstructed adjacent rows (or columns).

Claim 26

The method claimed in claim 21, wherein said sparse array of sampling locations is characterized by: G=a/x.sub.s =0.1 where a is the width of a sample and x s is the pitch of samples in the array.

Claim 27

The method claimed in claim 21, wherein the intensity of the interference pattern is detected at four relative phases separated by equal steps of π/2, and the phase difference values modulo 2π are generated by solving the following equation: ##EQU6## where φ(x,y) is the phase difference modulo 2π at sampling location (x,y) and i n (x,y) is the measured intensity for the n th phase displacement at sampling location (x,y).

Claim 28

Apparatus for performing phase-shifting interferometry wherein an array of phase values modulo 2π are processed to reconstruct an array of absolute phase values by removing 2π phase discontinuities from the phase values modulo 2π according to the constraint that the phase values represent a continuous function, characterized by: the array of phase values being generated from a sparsely sampled interference fringe intensity pattern, and said absolute phase values being reconstructed according to the further constraint that the first and/or higher derivatives of the array of phase values represent a continuous functions, and said reconstruction originating at a location in a neighborhood of the array where the difference in phase from one sampling location to the next is less than π.

Claim 29

Apparatus for performing phase-shifting interferometry wherein an array of phase values modulo 2π are processed to reconstruct an array of absolute phase values by removing 2π phase discontinuities from the phase values modulo 2π according to the constraint that the phase values represent a continuous function, characterized by: the array of phase values being generated from a sparsely sampled interference fringe intensity pattern, and said absolute phase values being reconstructed according to the further constraint that the first and/or higher derivatives of the array of phase values represent a continuous functions, and said reconstruction originating at a location in a neighborhood of the array where the difference in phase from one sampling location to the next is less than π.