US4169980A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for interference fringe center sensing
Assignee: Zygo Corp
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Filing: 1978-04-21
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Granted: 1979-10-02
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Expires: 1998-04-21
Abstract
Abstract An electro-optical sensor is described which provides an output for precisely locating the centers of interference fringes in either a real-time interference pattern or an interferogram. By scanning the fringe pattern either by moving the fringe pattern, by effectively moving the photoelectric sensor, or both, the centers of the fringes can be rapidly and precisely determined from the first derive of the output of the photodetector.
Inventors
- 👤 Carl A. Zanoni
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 12:12
CPC Classifications
G; G01; G01J; G01J9/00; G01J9/02; G01B; G01B11/00; G01B11/02; G01B11/022
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
246 words
An apparatus for rapidly locating the centers of fringes in an interference pattern comprises (1) means for providing a beam of light containing an interference pattern consisting of alternate bright and dark fringes, (2) means for scanning said interference pattern, (3) means for collecting and photosensing said beam of light, (4) means for processing the output of said photosensing means to obtain a signature indicating the centers of said fringes which comprises (5) means for differentiating the output of said photosensing means to obtain a first derivative signal which derivative is zero at the points at which the bright fringes are maxima and at which the dark fringes are minima, and (6) means for applying to said first derivative signal a threshold voltage adjustable to a preselected value, which is close to the maximum of said first derivative signal when bright fringes are being measured and to the minimum of said first derivative signal where dark fringes are being measured to produce a pulse whose width is equal to the time interval during which the first derivative signal is more positive than said positive threshold voltage in the case of bright fringes and more negative than said negative threshold voltage in the case of dark fringes, (7) means for delaying said pulse and (8) means for producing a signal indicating a fringe center only when said first derivative signal is zero and falls within said delayed pulse whereby spurious zeros due to noise are largely eliminated.
Claim 2
Independent Claim
246 words
An apparatus for rapidly locating the centers of fringes in an interference pattern comprises (1) means for providing a beam of light containing an interference pattern consisting of alternate bright and dark fringes, (2) means for scanning said interference pattern, (3) means for collecting and photosensing said beam of light, (4) means for processing the output of said photosensing means to obtain a signature indicating the centers of said fringes which comprises (5) means for differentiating the output of said photosensing means to obtain a first derivative signal which derivative is zero at the points at which the bright fringes are maxima and at which the dark fringes are minima, and (6) means for applying to said first derivative signal a threshold voltage adjustable to a preselected value, which is close to the maximum of said first derivative signal when bright fringes are being measured and to the minimum of said first derivative signal where dark fringes are being measured to produce a pulse whose width is equal to the time interval during which the first derivative signal is more positive than said positive threshold voltage in the case of bright fringes and more negative than said negative threshold voltage in the case of dark fringes, (7) means for delaying said pulse and (8) means for producing a signal indicating a fringe center only when said first derivative signal is zero and falls within said delayed pulse whereby spurious zeros due to noise are largely eliminated.
Claim 3
Dependent Claim
20 words
The apparatus of claim 1, in which a closed circuit television camera is the means for scanning said interference pattern.
Claim 4
Dependent Claim
41 words
The apparatus of claim 1, in which a real-time interference pattern is being measured on a closed circuit television monitor, and the dark fringes are used, and the centers are determined within the time required for scanning a single television field.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-10-01 | 1983-04-02 | 1983-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-10-01 | 1987-04-02 | 1987-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-10-01 | 1991-04-02 | 1991-10-02 | $7700.00 | Window Closed / Lapsed |