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US4791301A
Expired / Lapsed
US
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Device for the input of a nominal value for the impact point of an electron beam on a medium
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1986-10-28
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Granted: 1988-12-13
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Expires: 2006-10-28
Abstract
Abstract The nominal position value for the impact point of an electron beam on a medium located in a crucible is input to a device having a screen on which the contours of the crucible are represented. Light pen means establish a plurality of nominal positions of impact of the electron beam within the represented contours of the crucible.
Inventors
- 👤 Volker Bauer
- 👤 Josef Heimerl
- 👤 Horst Ranke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:31
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J37/3005; H01J37/302; H01J37/305
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
61 words
Device for input of a nominal position value for the impact point of an electron beam on a medium located in a crucible, said device comprising a screen on which the contours of the crucible are represented and light pen means for establishing a plurality of nominal positions of impact of the electron beam within the represented contours of the crucible.
Claim 2
Dependent Claim
61 words
Device for input of a nominal position value for the impact point of an electron beam on a medium located in a crucible, said device comprising a screen on which the contours of the crucible are represented and light pen means for establishing a plurality of nominal positions of impact of the electron beam within the represented contours of the crucible.
Claim 3
Dependent Claim
22 words
Device as defined in claim 1, including means for determining the retention time of the electron beam at the respective nominal positions.
Claim 4
Dependent Claim
26 words
Device as defined in claim 1, wherein the light pen means for establishing the nominal positions includes a light stylus operable in conjunction with said screen.
Claim 5
Dependent Claim
25 words
Device as defined in claim 1, including a memory electrically coupled to the screen, in which data representing the contours of the crucible are stored.
Claim 6
Dependent Claim
29 words
Device as defined in claim 1, including a display device means for the displaying of the actual position of the impact point of the electron beam on the screen.
Claim 7
Dependent Claim
30 words
Device as defined in claim 1, including a deflector unit means for adjusting the impact point of the electron beam onto the medium by means of magnetic or electrical fields.
Claim 8
Dependent Claim
19 words
Device as defined in claim 1, wherein the actual position of the electron beam is represented on the screen.
Claim 9
Dependent Claim
20 words
Device as defined in claim 4, including means for storing, into said memory, data representing the contours of the crucible.
Claim 10
Dependent Claim
47 words
Device as defined in claim 4, wherein during a detection of the contours of a right-angled crucible, the electron beam is manually led to the crucible corners and a calculator device establishes the total contour between individual corner positions of the crucible by a linear interpolation means.
Claim 11
Dependent Claim
52 words
Device as defined in claim 4, including means for the direct input of a nominal x, y position and for generating corresponding deflector currents in a deflector system for said electron beam, the electron beam is immediately and at least approximately directed into a nominal position by the means for direct input.
Claim 12
Dependent Claim
60 words
Device as defined in claim 10, including a control device for comparing an actual impact position of said electron beam with an exact nominal position and for activating said deflector system to move said electron beam from said actual impact position to said exact nominal position, said actual impact position determined by a sensor electrically coupled to said control device.
Claim 13
Dependent Claim
53 words
Device as defined in claim 1, wherein several impact points of the electron beam are stored in a storage means as nominal values and that these impact points are sequentially approached by the electron beam, whereby the time T required for the approach to all points is also stored in said storage means.
Claim 14
Dependent Claim
89 words
Device as defined in claim 1, wherein after the input of the nominal positions in an input and storage means and a respective corresponding tarrying time for each position, the nominal positions of the beam are first run via a position run means with a 10 4 tarrying time, whereby current values, input into a magnetic deflector unit by a means for moving the beam, are related to actual position coordinates of the electron beam and are corrected with respect to the nominal positions by a means for correcting.
Claim 15
Dependent Claim
30 words
Device as defined in claim 13, wherein after completion of a first correction phase, the position run means performs a position run with a tarrying time of 10 3 .
Claim 16
Dependent Claim
27 words
Device as defined in claim 14, wherein upon completion of a second correction phase, the position run means performs a run with a 10 2 tarrying time.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-12-13 | 1992-06-13 | 1992-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-12-13 | 1996-06-13 | 1996-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-12-13 | 2000-06-13 | 2000-12-13 | $7700.00 | Window Closed / Lapsed |