Patent US4791273A successfully refreshed from Google Patents.
US4791273A
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Vaporizer system for ion source
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1987-05-15
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Granted: 1988-12-13
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Expires: 2007-05-15
Abstract
Abstract A vaporizer system for an ion source includes a radiation source positioned on the vaporizer axis for providing radiation, multiple crucibles radially spaced from the axis and circumferentially spaced from each other and a reflector rotatable about the axis for directing radiation from the source at a selected one of the crucibles. The radiation causes heating of the selected crucible and vaporization of a solid source material contained therein. The radiation source is a visible and/or infrared emitting lamp such as a quartz halogen lamp. The crucibles are thermally isolated from each other by a heat shield so that the selected crucible is heated while the others remain relatively cool.
Inventors
- 👤 Shu Satoh
- 👤 Louis E. Evans, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:41
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/20; H01J37/00; H01J37/02; H01J37/04; H01J37/08; H01J27/022
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
103 words
A vaporizer comprising: at least two crucibles each having a cavity for containing a solid source material to be vaporized and having an outlet for vapor generated in said cavity; radiation source means for providing radiation for heating a selected crucible and vaporizing a source material in said cavity of said selected crucible; and movable reflector means having a first position for reflecting radiation from said radiation source means toward a first selected one of said crucibles vaporization of the source material contained and a second position for reflecting radiation from said radiation source means toward a second selected one of said crucibles.
Claim 2
Dependent Claim
103 words
A vaporizer comprising: at least two crucibles each having a cavity for containing a solid source material to be vaporized and having an outlet for vapor generated in said cavity; radiation source means for providing radiation for heating a selected crucible and vaporizing a source material in said cavity of said selected crucible; and movable reflector means having a first position for reflecting radiation from said radiation source means toward a first selected one of said crucibles vaporization of the source material contained and a second position for reflecting radiation from said radiation source means toward a second selected one of said crucibles.
Claim 3
Dependent Claim
30 words
A vaporizer as defined in claim 1 wherein said radiation source means comprises a radiation source which emits radiation in a spectrum selected from infrared, visible or a combination thereof.
Claim 4
Dependent Claim
24 words
A vaporizer as defined in claim 1 wherein said reflector means includes a thermal radiation absorbing back surface to facilitate cooling of nonselected crucibles.
Claim 5
Dependent Claim
16 words
A vaporizer as defined in claim 1 wherein said radiation source means comprises a quartz lamp.
Claim 6
Dependent Claim
77 words
A vaporizer as defined in claim 1 wherein said movable reflector means comprises a reflecting surface movable between said first and said second positions, a substantial fraction of the radiation from said radiation source means being directed toward said first crucible when said reflecting surface is in said first position and a substantial fraction of the radiation from said radiation source being directed toward said second selected crucible when said reflecting surface is in said second position.
Claim 7
Dependent Claim
19 words
A vaporizer as defined in claim 5 further including heat shield means positioned between said at least two crucibles.
Claim 8
Dependent Claim
124 words
A vaporizer system comprising: radiation source means positioned on an axis for providing radiation; at least two crucibles radially spaced from said axis and circumferentially spaced from each other, said crucibles each having a cavity for containing a solid source material; reflector means rotatable about said axis from a first position for reflecting radiation from said radiation source means toward a first selected one of said at least two crucibles for causing vaporization of a source material contained in said cavity of said first selected crucible to a second position for reflecting radiation from said source means toward a second selected crucible of said at least two crucibles for causing vaporization of a source material contained in said cavity of said second selected crucible.
Claim 9
Dependent Claim
124 words
A vaporizer system comprising: radiation source means positioned on an axis for providing radiation; at least two crucibles radially spaced from said axis and circumferentially spaced from each other, said crucibles each having a cavity for containing a solid source material; reflector means rotatable about said axis from a first position for reflecting radiation from said radiation source means toward a first selected one of said at least two crucibles for causing vaporization of a source material contained in said cavity of said first selected crucible to a second position for reflecting radiation from said source means toward a second selected crucible of said at least two crucibles for causing vaporization of a source material contained in said cavity of said second selected crucible.
Claim 10
Dependent Claim
31 words
A vaporizer system as defined in claim 7 wherein said radiation source means comprises a radiation source which emits radiation in a spectrum selected from infrared, visible or a combination thereof.
Claim 11
Dependent Claim
23 words
A vaporizer system as defined in claim 7 wherein said radiation source means comprises a tubular quartz halogen lamp parallel to the axis.
Claim 12
Dependent Claim
68 words
A vaporizer system as defined in claim 9 wherein said rotatable reflector means comprises a reflecting surface movable between a plurality of position including a first position for directing a substantial fraction of the radiation from said radiation source means toward said first selected one of said crucibles and a second position for directing a substantial fraction of said radiation toward said second selected one of said crucibles.
Claim 13
Dependent Claim
37 words
A vaporizer system as defined in claim 10 wherein said reflecting surface has a parabolic shape in a plane perpendicular to said axis, said parabolic shape having a focal point coincident with the axis of said lamp.
Claim 14
Dependent Claim
25 words
A vaporizer system as defined in claim 7 wherein said reflector means includes a thermal radiation absorbing back surface to facilitate cooling of nonselected crucibles.
Claim 15
Dependent Claim
25 words
A vaporizer system as defined in claim 7 wherein said at least two crucibles comprise three crucibles spaced apart by 120 degrees around said axis.
Claim 16
Dependent Claim
24 words
A vaporizer system as defined in claim 10 further including means for rotating said reflecting surface between said first position and said second position.
Claim 17
Dependent Claim
59 words
A vaporizer system a defined in claim 7 wherein each crucible comprises a container having a side wall and wherein a portion of the side wall closest to said axis is thicker than a portion of said side wall remote from said axis to promote uniform delivery of heat to a source material to be placed in said crucible.
Claim 18
Dependent Claim
20 words
A vaporizer system as defined in claim 7 further including heat shield means positioned between said at least two crucibles.
Claim 19
Dependent Claim
28 words
A vaporizer system as defined in claim 16 wherein said crucibles are thermally isolated from said heat shield means to prevent thermal loss from said crucibles by conduction.
Claim 20
Dependent Claim
35 words
A vaporizer system as defined in claim 17 wherein said heat shield means comprises a generally cylindrical body having cavities for mounting said at east two crucibles, said radiation source means and said reflector means.
Claim 21
Dependent Claim
128 words
A vaporizer comprising: a crucible having a cavity for containing a solid source material to be vaporized and having an outlet for vapor generated in said cavity; radiation source means for providing radiation for heating the crucible and for vaporizing a source material to be placed in said cavity; and reflector means for reflecting radiation from said radiation source means toward said crucible to cause vaporization of a source material to be contained in said cavity, said crucible comprising a container having a side wall wherein a portion of the side wall closest to said radiation source means is thicker than a portion of the side wall remote from said radiation source means in order to promote uniform delivery of heat to a source material in said cavity.
Claim 22
Dependent Claim
128 words
A vaporizer comprising: a crucible having a cavity for containing a solid source material to be vaporized and having an outlet for vapor generated in said cavity; radiation source means for providing radiation for heating the crucible and for vaporizing a source material to be placed in said cavity; and reflector means for reflecting radiation from said radiation source means toward said crucible to cause vaporization of a source material to be contained in said cavity, said crucible comprising a container having a side wall wherein a portion of the side wall closest to said radiation source means is thicker than a portion of the side wall remote from said radiation source means in order to promote uniform delivery of heat to a source material in said cavity.
References Cited (Backward Citations)
US2862441A
Cited
US3155813A
Cited
US3619562A
Cited
US3869675A
Cited
US4015029A
Cited
US4328763A
Cited
US4532412A
Cited
US4571486A
Cited
US4503087A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-12-13 | 1992-06-13 | 1992-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-12-13 | 1996-06-13 | 1996-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-12-13 | 2000-06-13 | 2000-12-13 | $7700.00 | Window Closed / Lapsed |