Method of fabricating a contact type color image sensor

Claim 1

A method of fabricating a contact type color image sensor at low temperature comprising the steps of forming a plurality of photoelectric converting elements having light receiving areas on a substrate; forming a passivation film on selected light receiving areas, forming a light shielding film on said passivation film by depositing a thin film of metal selected from the group consisting of Al, Cr, Au, Pt, Ru, or Mo and forming a color filter on other selected light receiving areas of each photoelectric converting element by forming a dyeable polymer layer and dyeing said dyeable polymer layer, wherein said step of forming said color filter comprises the steps of: forming a first relief pattern made of a dyeable polymer layer corresponding to a first group of said photoelectric converting elements, dyeing said first relief pattern, forming a first color filter by fixing said first relief pattern thus dyed, forming a second relief pattern made of a dyeable polymer layer corresponding to a second group of said photoelectric converting elements, dyeing said second relief pattern, and forming the second color filter by fixing said second relief pattern thus dyed.

Claim 2

A method of fabricating a contact type color image sensor at low temperature comprising the steps of forming a plurality of photoelectric converting elements having light receiving areas on a substrate; forming a passivation film on selected light receiving areas, forming a light shielding film on said passivation film by depositing a thin film of metal selected from the group consisting of Al, Cr, Au, Pt, Ru, or Mo and forming a color filter on other selected light receiving areas of each photoelectric converting element by forming a dyeable polymer layer and dyeing said dyeable polymer layer, wherein said step of forming said color filter comprises the steps of: forming a first relief pattern made of a dyeable polymer layer corresponding to a first group of said photoelectric converting elements, dyeing said first relief pattern, forming a first color filter by fixing said first relief pattern thus dyed, forming a second relief pattern made of a dyeable polymer layer corresponding to a second group of said photoelectric converting elements, dyeing said second relief pattern, and forming the second color filter by fixing said second relief pattern thus dyed.

Claim 8

A method of fabricating a contact type color image sensor comprising the steps of forming a plurality of photoelectric converting elements to be juxtaposed on an elongated substrate, and forming a color filter on a light receiving area of each photoelectric converting element, wherein said step of forming said color filter comprises the sequential steps of: forming a first relief pattern of a dyeable polymer layer corresponding to a first group of said photoelectric element, dyeing said relief pattern, forming a first color filter by fixing said first relief pattern thus dyed, forming a second relief pattern of a dyeable polymer layer corresponding to a second group of said photoelectric converting elements, dyeing said second relief pattern, and forming the second color filter by fixing said second relief pattern thus dyed.

Claim 9

A method of fabricating a contact type color image sensor comprising the steps of forming a plurality of photoelectric converting elements to be juxtaposed on an elongated substrate, and forming a color filter on a light receiving area of each photoelectric converting element, wherein said step of forming said color filter comprises the sequential steps of: forming a first relief pattern of a dyeable polymer layer corresponding to a first group of said photoelectric element, dyeing said relief pattern, forming a first color filter by fixing said first relief pattern thus dyed, forming a second relief pattern of a dyeable polymer layer corresponding to a second group of said photoelectric converting elements, dyeing said second relief pattern, and forming the second color filter by fixing said second relief pattern thus dyed.

Claim 10

A method of fabricating a contact type color image sensor comprising the steps of forming a plurality of photoelectric converting elements to be juxtaposed on an elongated substrate, forming a passivation film, and forming a color filter on a light receiving area of each photoelectric converting element, where said step of forming a color filter comprises the sequential steps of: forming a first relief pattern of a dyeable polymer layer on said passivation film of a first group of said photoelectric converting elements, dyeing said first relief pattern, forming a first color filter by fixing said first relief pattern thus dyed, forming a second relief pattern of a dyeable polymer layer on said passivation film of a second group of said photoelectric converting elements, dyeing said second relief pattern, and forming the second color filter by fixing said second relief pattern thus dyed.

Claim 11

A method of fabricating a contact type color image sensor comprising the steps of forming a plurality of photoelectric converting elements to be juxtaposed on an elongated substrate, forming a passivation film, and forming a color filter on a light receiving area of each photoelectric converting element, where said step of forming a color filter comprises the sequential steps of: forming a first relief pattern of a dyeable polymer layer on said passivation film of a first group of said photoelectric converting elements, dyeing said first relief pattern, forming a first color filter by fixing said first relief pattern thus dyed, forming a second relief pattern of a dyeable polymer layer on said passivation film of a second group of said photoelectric converting elements, dyeing said second relief pattern, and forming the second color filter by fixing said second relief pattern thus dyed.