US4785186A
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Amorphous silicon ionizing particle detectors
Assignee: Xerox Corp
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Filing: 1986-10-21
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Granted: 1988-11-15
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Expires: 2006-10-21
Abstract
Abstract Amorphous silicon ionizing particle detectors having a hydrogenated amorphous silicon (a--Si:H) thin film deposited via plasma assisted chemical vapor deposition techniques are utilized to detect the presence, position and counting of high energy ionizing particles, such as electrons, x-rays, alpha particles, beta particles and gamma radiation.
Inventors
- 👤 Robert A. Street
- 👤 Victor P. Mendez
- 👤 Selig N. Kaplan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 01:32
CPC Classifications
H; H10; H10F; H10F30/00; H10F30/20; H10F30/29; H10F30/295; G; G01; G01T; G01T1/00; G01T1/16; G01T1/24; G01T1/242; H10F30/292; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/166; H10F77/1662; H10F77/40; H10F77/496; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/548
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
175 words
A particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector where, upon penetration into said detector body portion, form electron-hole pairs and comprising: a substrate, first electrode means formed on said substrate, an a--Si:H film deposited on said first electrode, said a--Si:H film comprises three monolithic, contiguous regions consecutively comprising an a--Si region doped to be a first conductivity type, an intrinsic region of a--Si and an a--Si region doped to be a second conductivity type, second electrode means formed over said a--Si:H film, means to increase the sensitivity to a level sufficient to detect single ionizing particles as they individually impact said detector body portion by increasing the collection efficiency of said a--Si:H film intrinsic region to have a low trap density below 1×10 16 cm -3 ev -1 with a large film thickness above 1 μm and operative at voltages above 50 volts per μm, and means to collect said electron-hole pairs and indicate the number and energy level of said ionizing particles.
Claim 2
Dependent Claim
175 words
A particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector where, upon penetration into said detector body portion, form electron-hole pairs and comprising: a substrate, first electrode means formed on said substrate, an a--Si:H film deposited on said first electrode, said a--Si:H film comprises three monolithic, contiguous regions consecutively comprising an a--Si region doped to be a first conductivity type, an intrinsic region of a--Si and an a--Si region doped to be a second conductivity type, second electrode means formed over said a--Si:H film, means to increase the sensitivity to a level sufficient to detect single ionizing particles as they individually impact said detector body portion by increasing the collection efficiency of said a--Si:H film intrinsic region to have a low trap density below 1×10 16 cm -3 ev -1 with a large film thickness above 1 μm and operative at voltages above 50 volts per μm, and means to collect said electron-hole pairs and indicate the number and energy level of said ionizing particles.
Claim 3
Dependent Claim
29 words
The particle detector of claim 1 where said a--Si:H film comprises a single intrinsic layer of a--Si having a thickness in the range of 1 μm to 15 μm.
Claim 4
Dependent Claim
86 words
The particle detector of claim 1 comprising a plurality of said a--Si:H film detectors formed in a stack on said substrate, electrode means formed between the first of said detectors and said substrate, electrode means formed between adjacently stacked detectors forming one or more intermediate electrode means, electrode means formed on the top most detector of said stack, said intermediate electrode means being commonly connected together according to the conductivity type of the adjacently formed detector, voltage bias means connected across said commonly connected electrode means.
Claim 5
Dependent Claim
38 words
The particle detector of claim 1 comprising a Si--Ge alloy wherein said Ge comprises about 3%-20% atomic weight to advance the interaction of said particles with said film and so as to enhance the sensitivity of said detector.
Claim 6
Dependent Claim
71 words
The particle detector of claim 1 formed as detector array wherein said first electrode means comprises a first set of spatially formed parallel electrodes on said substrate, said second electrode means comprises a second set of spatially formed parallel electrodes on said film, said second electrode set being substantially orthogonal to said first electrode set forming electrode cross points with said film to function as individually addressed detectors in said array.
Claim 7
Dependent Claim
38 words
The particle detector of claim 1 including means to dispose at least a planar portion of said film at an angle transverse to the path of incoming high energy ionizing particles to enhance the sensitivity of said detector.
Claim 8
Independent Claim
160 words
A method for improving the detection of high energy ionizing particles which comprises the steps of: providing a detector body portion of a--Si:H film, said film being sandwiched between a pair of electrodes, increasing the sensitivity level of said a--Si:H film sufficient to detect single ionizing particles as they individually impact said detector body portion by increasing the collection efficiency of said a--Si:H film to have a low trap density below 1×10 16 cm -3 ev -1 with a large film thickness above 1 μm and operative at voltages above 50 volts per μm, placing the detector in a path of ionizing particle radiation wherein said radiation is separated into electron-hole pairs as said radiation penetrates into said detector body portion, separating and collecting said electron-hole pairs, detecting said collected electron-hole pairs by measuring the output current response upon collection thereof wherein each detected current output pulse is representative of a single electron-hole pair, and counting said current output pulses.
Claim 9
Independent Claim
160 words
A method for improving the detection of high energy ionizing particles which comprises the steps of: providing a detector body portion of a--Si:H film, said film being sandwiched between a pair of electrodes, increasing the sensitivity level of said a--Si:H film sufficient to detect single ionizing particles as they individually impact said detector body portion by increasing the collection efficiency of said a--Si:H film to have a low trap density below 1×10 16 cm -3 ev -1 with a large film thickness above 1 μm and operative at voltages above 50 volts per μm, placing the detector in a path of ionizing particle radiation wherein said radiation is separated into electron-hole pairs as said radiation penetrates into said detector body portion, separating and collecting said electron-hole pairs, detecting said collected electron-hole pairs by measuring the output current response upon collection thereof wherein each detected current output pulse is representative of a single electron-hole pair, and counting said current output pulses.
Claim 10
Dependent Claim
13 words
The method of claim 7 wherein said detector is a back-to-back Schottky diode.
Claim 11
Dependent Claim
12 words
The method of claim 7 wherein said detector is a p-i-n diode.
Claim 12
Dependent Claim
14 words
The method of claim 7 wherein said detector is a stack of p-i-n diodes.
Claim 13
Dependent Claim
30 words
The method of claim 7 which includes the steps of: calibrating the current output pulses from the detector with a known source to determine the energy of the particles detected.
Claim 14
Dependent Claim
25 words
The method of claim 7 which includes the steps of: providing a series of stack detectors to enhance the efficiency of collection of electron-hole pairs.
Claim 15
Dependent Claim
75 words
A single particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector, said detector comprising a combination of contiguous films of a--Si:H film and CsI, said CsI film causing said particles to be converted into photons, said a--Si film sensitive to said photons and separating them into electron-hole pairs, means to collect said electron-hole pairs indicative of the number and energy level of said ionizing particles.
Claim 16
Dependent Claim
75 words
A single particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector, said detector comprising a combination of contiguous films of a--Si:H film and CsI, said CsI film causing said particles to be converted into photons, said a--Si film sensitive to said photons and separating them into electron-hole pairs, means to collect said electron-hole pairs indicative of the number and energy level of said ionizing particles.
Claim 17
Dependent Claim
41 words
The particle detector of claim 13 wherein said a--Si:H film comprises three monolithic, contiguous regions consecutively comprising a Si region doped to be a first conductivity type, an intrinsic region and a Si region doped to be a second conductivity type.
Claim 18
Dependent Claim
138 words
A single particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector where, upon penetration into said detector body portion, form electron-hole pairs, means to separate said electron-hole pairs and collect the separated electrons and holes indicative of the number and energy level of said particles, a--Si:H film comprising said body portion and having at least, in part, a planar surface for receiving said particles and generating said electron-hole pairs, means to support said film planar surface at an angle transverse to said particle path to increase the path length of particle penetration in said film and to permit the unincumbered separation and collection of said electron-hole pairs without interference in the collection of other separated electrons and holes so as to increase the sensitivity level of particle detection.
Claim 19
Dependent Claim
138 words
A single particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector where, upon penetration into said detector body portion, form electron-hole pairs, means to separate said electron-hole pairs and collect the separated electrons and holes indicative of the number and energy level of said particles, a--Si:H film comprising said body portion and having at least, in part, a planar surface for receiving said particles and generating said electron-hole pairs, means to support said film planar surface at an angle transverse to said particle path to increase the path length of particle penetration in said film and to permit the unincumbered separation and collection of said electron-hole pairs without interference in the collection of other separated electrons and holes so as to increase the sensitivity level of particle detection.
Claim 20
Dependent Claim
40 words
The particle detector of claim 15 wherein said a--Si:H film comprises three monolithic, contiguous regions consecutively comprising a Si region doped to be a first conductivity type, an intrinsic region and a--Si region doped to be a second conductivity type.
Claim 21
Dependent Claim
43 words
The particle detector of claim 15 wherein said support means comprises a support member having a plurality of elongated triangular shaped ridges spatially across said member, said ridges having one or more sides disposed at an angle transverse relative to said particle path.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-11-15 | 1992-05-16 | 1992-11-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-11-15 | 1996-05-16 | 1996-11-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-11-15 | 2000-05-16 | 2000-11-15 | $7700.00 | Window Closed / Lapsed |