Patent US4778332A successfully refreshed from Google Patents.
US4778332A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer flip apparatus
Assignee: ASML Holding NV
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Filing: 1987-02-09
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Granted: 1988-10-18
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Expires: 2007-02-09
Abstract
Abstract Apparatus is disclosed for automatically transferring a semiconductor wafer between a horizontal and a vertical plane, beginning and ending in precisely located positions. A wafer support arm is carried by a transfer member which also includes a motor for rotating the support arm between a "start" position and an intermediate position in a horizontal plane. Another motor is provided for rotating the transfer member to position the support arm in a vertical plane. The wafer support arm is then returned to its original position relative to the transfer member, thus establishing a "finish" position in the vertical plane.
Inventors
- 👤 William Byers
- 👤 Peter Kochersperger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:30
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/32; H10P72/3202; H10P72/70; H10P72/78; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136; Y10S414/141
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
185 words
Apparatus for transferring a semiconductor wafer from a preestablished start position in a first plane to a preestablished finish position in a second plane, which comprises: a base member; first drive means mounted on said base member; a transfer member connected to said first drive means for rotation thereby between first and second positions; a wafer support arm carried by said transfer member and rotatable therewith between said first plane and said second plane; second drive means carried by said transfer member for rotating said wafer support arm from said start position to an intermediate position in said first plane and from said intermediate position to said finish position in said second plane, said start and finish positions being substantially the same relative to said transfer member; a support member attached to said base member, and wherein; said base member includes a first limit stop for establishing said start position; said support member includes a second limit stop for establishing said finish position; and said wafer support arm carries at least one third limit stop engagable with either of said first and second limit stops.
Claim 2
Dependent Claim
185 words
Apparatus for transferring a semiconductor wafer from a preestablished start position in a first plane to a preestablished finish position in a second plane, which comprises: a base member; first drive means mounted on said base member; a transfer member connected to said first drive means for rotation thereby between first and second positions; a wafer support arm carried by said transfer member and rotatable therewith between said first plane and said second plane; second drive means carried by said transfer member for rotating said wafer support arm from said start position to an intermediate position in said first plane and from said intermediate position to said finish position in said second plane, said start and finish positions being substantially the same relative to said transfer member; a support member attached to said base member, and wherein; said base member includes a first limit stop for establishing said start position; said support member includes a second limit stop for establishing said finish position; and said wafer support arm carries at least one third limit stop engagable with either of said first and second limit stops.
Claim 3
Dependent Claim
39 words
The apparatus of claim 1 wherein said at least one third limit stop comprises one of a ball or concave cone and each of said first and second limit stops comprise the other of said ball or concave cone.
Claim 4
Dependent Claim
16 words
The apparatus of claim 1 wherein said first drive means comprises a motor and gear train.
Claim 5
Dependent Claim
16 words
The apparatus of claim 3 wherein said second drive means comprises a motor and gear train.
Claim 6
Dependent Claim
14 words
The apparatus of claim 1 wherein said first and second planes are substantially perpendicular.
Claim 7
Dependent Claim
20 words
The apparatus of claim 1 wherein said wafer support arm defines a vacuum groove for securing said semiconductor wafer thereto.
Claim 8
Dependent Claim
20 words
The apparatus of claim 2 wherein each of said first and second drive means comprises a motor and gear train.
Claim 9
Dependent Claim
14 words
The apparatus of claim 7 wherein said first and second planes are substantially perpendicular.
Claim 10
Dependent Claim
20 words
The apparatus of claim 8 wherein said wafer support arm defines a vacuum groove for securing said semiconductor wafer thereto.
Claim 11
Independent Claim
147 words
A device for transferring a semiconductor wafer from a first predetermined location in a first plane to a second predetermined location in a second plane comprising: a support; a transfer member rotatably attached to said support; means attached to said support for rotating said transfer member about an axis parallel to the first plane; a wafer support arm rotatably attached to said transfer member; means attached to said transfer member and capable of moving therewith, for rotating said wafer support arm; first means associated with said support and said wafer support arm for precisely locating in the first plane said wafer support arm relative to said support; second means associated with said support and said wafer support arm for precisely locating in the second plane said wafer support arm relative to said support; said first and second means for precisely locating comprises mating balls and concave cones.
Claim 12
Independent Claim
147 words
A device for transferring a semiconductor wafer from a first predetermined location in a first plane to a second predetermined location in a second plane comprising: a support; a transfer member rotatably attached to said support; means attached to said support for rotating said transfer member about an axis parallel to the first plane; a wafer support arm rotatably attached to said transfer member; means attached to said transfer member and capable of moving therewith, for rotating said wafer support arm; first means associated with said support and said wafer support arm for precisely locating in the first plane said wafer support arm relative to said support; second means associated with said support and said wafer support arm for precisely locating in the second plane said wafer support arm relative to said support; said first and second means for precisely locating comprises mating balls and concave cones.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-18 | 1992-04-18 | 1992-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-18 | 1996-04-18 | 1996-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-18 | 2000-04-18 | 2000-10-18 | $7700.00 | Window Closed / Lapsed |