Patent US4777061A successfully refreshed from Google Patents.
US4777061A
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Blanket tungsten deposition for dielectric
Assignee: OC Oerlikon Balzers AG
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Filing: 1987-12-14
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Granted: 1988-10-11
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Expires: 2007-12-14
Abstract
Abstract A process is disclosed for depositing tungsten non-selectively on conductors and dielectrics without the use of an adhesive interlayer. The process comprises an argon pre-treatment followed by low power plasma deposition to nucleate the tungsten. A thick, adherent layer of tungsten is then deposited.
Inventors
- 👤 Schyi-Yi Wu
- 👤 J. B. Price
- 👤 John Mendonca
- 👤 Yu Chang Chow
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:28
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/08; C23C16/14
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
65 words
A method for depositing an adherent refractory metal layer on a surface comprising the steps of: exposing said surface to a plasma glow discharge in an inert gas; exposing said surface to a plasma glow discharge in a gas mixture containing a refractory metal compound and a reducing gas; and terminating said plasma glow discharge while continuing to expose said surface to said gas mixture.
Claim 2
Independent Claim
65 words
A method for depositing an adherent refractory metal layer on a surface comprising the steps of: exposing said surface to a plasma glow discharge in an inert gas; exposing said surface to a plasma glow discharge in a gas mixture containing a refractory metal compound and a reducing gas; and terminating said plasma glow discharge while continuing to expose said surface to said gas mixture.
Claim 3
Dependent Claim
21 words
The method as set forth in claim 1 and further comprising the step of: heating said surface to a predetermined temperature.
Claim 4
Dependent Claim
23 words
The method as set forth in claim 2 wherein said heating step is an initial step and said heating continues throughout the process.
Claim 5
Dependent Claim
14 words
The method as set forth in claim 2 wherein said inert gas comprises argon.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-11 | 1992-04-11 | 1992-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-11 | 1996-04-11 | 1996-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-11 | 2000-04-11 | 2000-10-11 | $7700.00 | Window Closed / Lapsed |