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Optical path sensor including a filter

Assignee: US Philips Corp
•
Filing: 1986-12-03
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Granted: 1988-10-11
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Expires: 2006-12-03
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Abstract

Abstract An optical path sensor including a filter through which passes a radiation beam comprising light of at least two wavelengths and which filter, as it is moved perpendicularly to the direction of the optical radiation beam, causes the attenuations for the beam components of different wavelengths to change in a different ratio. In a filter constructed in a simple manner with low-cost elements two phase gratings are arranged one after the other in the beam direction, only one of the gratings being movable perpendicularly to the beam direction and in that the zero-order diffraction beams are directed towards a detector.

Inventors

  • 👤 Hans O. B. Dammann
  • 👤 Reiner U. Orlowski

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 07:57
CPC Classifications
G; G01; G01D; G01D5/00; G01D5/26; G01D5/32; G01D5/34; G01D5/36; G01D5/38

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 142 words
An optical displacement sensor comprising means for delivering a sensing beam of radiation, said sensing beam comprising a first component with a first wavelength and a second component with a second wavelength, a compound phase grating comprising two subgratings arranged one behind the other in the path of the sensing beam, said phase grating transmitting light in the zero-order, one of said subgratings being movable perpendicularly of the beam direction, the intensity of the zero-order light being dependent on the movement of the subgrating, said movement representing the displacement to be sensed, said movement having a maximum effect on the intensity of the first wavelength component of the zero-order beam and a minimum effect on the intensity of the second wavelength component of the zero-order beam, means for receiving said zero-order beam formed by the compound grating out of the sensing beam.
Claim 2
Dependent Claim 142 words
An optical displacement sensor comprising means for delivering a sensing beam of radiation, said sensing beam comprising a first component with a first wavelength and a second component with a second wavelength, a compound phase grating comprising two subgratings arranged one behind the other in the path of the sensing beam, said phase grating transmitting light in the zero-order, one of said subgratings being movable perpendicularly of the beam direction, the intensity of the zero-order light being dependent on the movement of the subgrating, said movement representing the displacement to be sensed, said movement having a maximum effect on the intensity of the first wavelength component of the zero-order beam and a minimum effect on the intensity of the second wavelength component of the zero-order beam, means for receiving said zero-order beam formed by the compound grating out of the sensing beam.
Claim 3
Dependent Claim 18 words
An optical displacement sensor as claimed in claim 1, characterized in that the two subgratings are transmission gratings.
Claim 4
Dependent Claim 25 words
An optical displacement sensor as claimed in claim 1, characterized in that one subgrating is a transmission grating and the other is a reflection grating.
Claim 5
Dependent Claim 21 words
An optical displacement sensor as claimed claim 1, characterized in that at least one of the subgratings is a stepped grating.
Claim 6
Dependent Claim 20 words
An optical displacement sensor as claimed in claim 4, characterized in that at least one subgrating is a single-step grating.
Claim 7
Dependent Claim 18 words
An optical displacement sensor as claimed in claim 5, characterized in that the two subgratings are single-step gratings.
Claim 8
Dependent Claim 19 words
An optical displacement sensor as claimed in claim 6, characterized in that the subgratings have the same grating period.
Claim 9
Dependent Claim 22 words
An optical displacement sensor as claimed in claim 7, characterized in that the step heights of the two single-step gratings are equal.
Claim 10
Dependent Claim 71 words
An optical displacement sensor as claimed in claim 8, characterized in that the ratio between the wavelengths λ 1 and λ 2 of two light components of the radiation beam is approximately ##EQU8## in which k is a positive or negative integer and in that the step heights d of the phase gratings are each chosen to be ##EQU9## in which n is the refractive index of the phase grating material.

References Cited (Backward Citations)

US3482107A Cited
US3586665A Cited
US4051367A Cited
US4091281A Cited
US4585307A Cited
US4679901A Cited
US4649351A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-10-11 1992-04-11 1992-10-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-10-11 1996-04-11 1996-10-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-10-11 2000-04-11 2000-10-11 $7700.00 Window Closed / Lapsed

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