Patent US4771730A successfully refreshed from Google Patents.
US4771730A
Expired / Lapsed
US
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Vacuum processing apparatus wherein temperature can be controlled
Assignee: Shibaura Mechatronics Corp
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Filing: 1987-09-09
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Granted: 1988-09-20
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Expires: 2007-09-09
Abstract
Abstract A vacuum processing apparatus has a vacuum vessel within which a work to be processed is drawn and held fixed on a specimen table by an electrode functioning doubly as an electrostatic chuck, to which is connected a gas feeding pipe for feeding a gas affording good heat transmission between the mutually contacting surfaces of the work and the electrode thereby to control the temperature of the work.
Inventors
- 👤 Masashi Tezuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:34
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; H10P72/722; Y; Y10; Y10T; Y10T279/00; Y10T279/23
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
117 words
A vacuum processing apparatus wherein temperature can be controlled comprising: a vacuum vessel the interior of which constitutes a vacuum processing chamber, in which a work is to be vacuum processed; a specimen table installed in and at one side of the processing chamber and provided with means for controlling the temperature thereof; an electrode mounted on said specimen table and within said chamber and being functionable as an electrostatic chuck to fixedly hold the work, said first electrode comprising an electrode plate and a dielectric film covering the electrode plate; a gas feeding pipe for introducing a gas for affording good heat transmission into the interfacial interstice between the work thus held and the first electrode.
Claim 2
Dependent Claim
117 words
A vacuum processing apparatus wherein temperature can be controlled comprising: a vacuum vessel the interior of which constitutes a vacuum processing chamber, in which a work is to be vacuum processed; a specimen table installed in and at one side of the processing chamber and provided with means for controlling the temperature thereof; an electrode mounted on said specimen table and within said chamber and being functionable as an electrostatic chuck to fixedly hold the work, said first electrode comprising an electrode plate and a dielectric film covering the electrode plate; a gas feeding pipe for introducing a gas for affording good heat transmission into the interfacial interstice between the work thus held and the first electrode.
Claim 3
Dependent Claim
38 words
A vacuum processing apparatus as claimed in claim 1 in which said electrode comprises an electrode made of aluminum and an inorganic, insulative, dielectric film of Al 2 O 3 covering the outer surface of said aluminum electrode.
Claim 4
Dependent Claim
36 words
A vacuum processing apparatus as claimed in claim 1 in which said electrode comprises an electrode made of copper and an organic, insulative, dielectric film of a polyimide covering the outer surface of said copper electrode.
Claim 5
Dependent Claim
28 words
A vacuum processing apparatus as claimed in claim 1 in which said electrode is mounted on the lower surface of the ceiling wall of the vacuum processing chamber.
Claim 6
Dependent Claim
28 words
A vacuum processing apparatus as claimed in claim 1 in which said electrode is mounted on the inner surface of a side wall of the vacuum processing chamber.
Claim 7
Dependent Claim
21 words
A vacuum processing apparatus as climed in claim 1 in which a heating device is imbeddedly provided in the specimen table.
Claim 8
Dependent Claim
22 words
A vacuum processing apparatus as claimed in claim 1 in which said gas for affording good heat transmission is a cooling gas.
References Cited (Backward Citations)
US4313783A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-09-20 | 1992-03-21 | 1992-09-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-09-20 | 1996-03-21 | 1996-09-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-09-20 | 2000-03-21 | 2000-09-20 | $7700.00 | Window Closed / Lapsed |