Abstract A vertical apparatus for heat treating a semiconductor apparatus which is provided with an opening at one end, wherein the opening of a reactor provided with a reaction gas inlet and outlet is fitted with a cap which is designed to be tightly fitted to or removed from the reactor opening, a boat rest is mounted on the cap, when the cap shuts the reactor opening, the reaction gas drawn off from the inlet is carried to the outside through the outlet, when the cap is removed from the reactor opening, a gas is carried from the inlet provided in the boat rest to the outlet at the predetermined rate, and the gas passing through the gas introducing passage and gas-discharging passage provided in the boat rest prevents the open air from flowing backward into the reactor opening.
A semiconductor substrate heat treating apparatus which comprises: a reactor provided with an opening on one side allowing for the insertion and withdrawal of a boat and the inlet and outlet of a reaction gas; a cap provided at the opening of the reactor so as to be fitted to or removed from said opening; a boat rest provided with a gas inlet and outlet and mounted on the cap; and a boat mounted on the boat rest so as to horizontally hold wafers.
Claim 2
Dependent Claim
84 words
A semiconductor substrate heat treating apparatus which comprises: a reactor provided with an opening on one side allowing for the insertion and withdrawal of a boat and the inlet and outlet of a reaction gas; a cap provided at the opening of the reactor so as to be fitted to or removed from said opening; a boat rest provided with a gas inlet and outlet and mounted on the cap; and a boat mounted on the boat rest so as to horizontally hold wafers.
Claim 3
Dependent Claim
25 words
The heat treating apparatus according to claim 1, wherein the outlet of a gas-introducing passage is positioned higher than the inlet of a gas-discharging passage.
Claim 4
Dependent Claim
33 words
The heat treating apparatus according to claim 1, wherein a cylindrical jacket is provided around the peripheral edge of the boat rest so as to shut off the boat from the open air.
Claim 5
Dependent Claim
28 words
The heat treating apparatus according to claim 1, wherein a gas entering through the gas-introducing passage has a lower temperature than the reaction gas held in the reactor.