US4762767A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Negatively operating photoresist composition, with radiation-absorbing additives
Assignee: OCG Microelectronic Materials Inc
•
Filing: 1986-04-30
•
Granted: 1988-08-09
•
Expires: 2006-04-30
Abstract
Abstract New aminoazobenzene derivatives of the general formula I ##STR1## in which R and R' independently of one another denote hydrogen, alkyl with up to 4 C atoms or halogen, X denotes hydrogen or O--Y and Y denotes alkyl or acyl with in each case up to 4 C atoms or optionally substituted aryl with up to 10 C atoms, are outstandingly suitable as radiation-absorbing substances in negatively operating photoresist compositions.
Inventors
- 👤 Gunther Haas
- 👤 Karl H. Neisius
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 02:37
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/04; C; C09; C09B; C09B29/00; C09B29/06; C09B29/08; C09B29/0805; C09B29/0807; C09B29/0809; C09B29/0811; C09B29/0813; G03F7/008; G03F7/0085; G03F7/09; G03F7/091
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
94 words
In a negatively operating photoresist composition consisting essentially of a photoresist polymer which is a cyclized rubber and a photosensitive crosslinking agent which is an aromatic bisazido compound, the improvement wherein the composition further consists essentially of an amount effective as a radiation-absorbing substance of a compound of the formula ##STR3## wherein R and R' independently are hydrogen, alkyl of up to 4C atoms or halogen, X is hydrogen or O--Y and Y is alkyl or alkanoyl in each case of up to 4C atoms, phenyl, phenyl substituted by C 1-4 -alkyl or napthyl.
Claim 2
Dependent Claim
94 words
In a negatively operating photoresist composition consisting essentially of a photoresist polymer which is a cyclized rubber and a photosensitive crosslinking agent which is an aromatic bisazido compound, the improvement wherein the composition further consists essentially of an amount effective as a radiation-absorbing substance of a compound of the formula ##STR3## wherein R and R' independently are hydrogen, alkyl of up to 4C atoms or halogen, X is hydrogen or O--Y and Y is alkyl or alkanoyl in each case of up to 4C atoms, phenyl, phenyl substituted by C 1-4 -alkyl or napthyl.
Claim 3
Dependent Claim
11 words
A composition of claim 1, wherein the bisazido compound is 2,6-bis-[(4-azido-phenyl)methylene]-4-methylcyclohexanone.
Claim 4
Dependent Claim
26 words
A composition of claim 1, wherein the amount of said radiation-absorbing substance is about 0.1 to 7 wt % based on the amount of cyclized rubber.
Claim 5
Dependent Claim
12 words
A composition of claim 1, wherein R and R' are both H.
Claim 6
Dependent Claim
9 words
A composition of claim 1, wherein X is H.
Claim 7
Dependent Claim
13 words
A composition of claim 1, wherein Y is methyl, ethyl, acetyl or phenyl.
Claim 8
Dependent Claim
15 words
A composition of claim 1, wherein 4-N-ethyl-N-(2-phenoxyethyl)-aminoazobenzene, 4-N,N-bis(2-ethoxyethyl)-aminoazobenzene or 4-N,N-bis(2-acetoxyethyl)aminoazobenzene is the radiation absorbing substance.
Claim 9
Dependent Claim
12 words
A composition of claim 1, wherein 4-N-ethyl-N-(2-methoxyethyl)-aminoazobenzene is the radiation absorbing substance.
Claim 10
Dependent Claim
22 words
An article comprising a negative photoresist composition according to claim 1 applied to the surface of a substrate having high reflecting power.
Claim 11
Dependent Claim
15 words
An article according to claim 9, wherein said substrate is silicon, aluminum, copper or chromium.
Claim 12
Dependent Claim
12 words
A composition of claim 3, wherein said amount is 0.5-4 wt %.
References Cited (Backward Citations)
GB422843A
Cited
US2336309A
Cited
US2528460A
Cited
US2833649A
Cited
US4287289A
Cited
US4268603A
Cited
US4311773A
Cited
US4349619A
Cited
US4407927A
Cited
US4414314A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-08-09 | 1992-02-08 | 1992-08-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-08-09 | 1996-02-08 | 1996-08-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-08-09 | 2000-02-08 | 2000-08-09 | $7700.00 | Window Closed / Lapsed |